Difference between revisions of "Template:News"
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+ | === NanoFab staff awarded Goleta's Innovator of the Year 2023 === |
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− | === KLA Tencor Profilometer Coming === |
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+ | NanoFab staff member [[Demis D. John]] has been awarded the ''City of Goleta's "Innovator of the Year"'' for 2023! The award stems from the UCSB Nanofab's impact on the communities of Santa Barbara County and surrounding regions, in enabling cutting edge technology companies to thrive, which also enables many local careers in advanced high-tech. See the [https://sbscchamber.com/goletas-finest-2023-award-recipients-announced/ full announcement by the Santa Barbara South Coast Chamber of Commerce]. //[[User:John d|John d]] 13:58, 7 November 2023 (PST) |
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− | We have purchased a new KLA Tencor Stylus Profilometer, that will be installed in Bay 4 over the next month or so! |
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− | === |
+ | === NanoFab Featured in Regional Tech Videos === |
+ | The UCSB NanoFab is showcased as a driver of innovation and enabler of the regional high-tech industry. |
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− | We've installed new [http://www.intellemetrics.com/LEP.htm Intellemetrics LEP500 Laser Endpoint Detection] monitoring on the [[DSEIII_(PlasmaTherm/Deep_Silicon_Etcher)|DSEiii]] & [[ICP_Etch_2_(Panasonic_E640)|ICP#2]] & [[ICP_Etch_1_(Panasonic_E626I)|ICP#1]] etchers. This allows you to terminate your etch at a calibrated/modeled distance into a layer, and removes the need to calibrate etch rates for most processes. |
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+ | See the videos here: |
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− | === Metal Processes on the Atomic Layer Deposition === |
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+ | {| class="wikitable" |
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− | We now have Ruthenium (Ru) and Platinum (Pt) metal depositions developed on the [[Atomic_Layer_Deposition_(Oxford_FlexAL)|Oxford FlexAL ALD]] tool. See the [[Atomic_Layer_Deposition_Recipes|Atomic Layer Deposition: Recipes]] page or contact [[Bill_Mitchell|Bill Mitchell]] for more information. |
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+ | |[https://fast.wistia.net/embed/iframe/l46hsnwg4b?controlsVisibleOnLoad=true&muted=0&playerColor©LinkAndThumbnailEnabled=false '''''Santa Barbara County: This is TechTopia'''''] [[File:Techtopia_Vid_-_Thumbnail_PlayButton.jpg|none|300x300px|link=https://fast.wistia.net/embed/iframe/l46hsnwg4b?controlsVisibleOnLoad=true&muted=0&playerColor©LinkAndThumbnailEnabled=false]] |
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+ | |[https://www.youtube.com/watch?v=op746os6eRI '''''UCSB NanoFab: An Innovation Center'''''] [[File:NanoFab_COE_Engineering_Vid_-_thumbnail_2_crop.jpg|none|300x300px|link=https://www.youtube.com/watch?v=op746os6eRI]] |
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− | === New Deep Silicon Etcher Online === |
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+ | |} |
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− | A new [[DSEIII_(PlasmaTherm/Deep_Silicon_Etcher)|Plasma-Therm Versaline DSE III DRIE etcher]] has been qualified for bosch etch and single-step etches, and is available for use. The new tool features much higher silicon etch rates, improved uniformity, and allows for photoresist up to the edges of the wafer. An Intellemetrics LEP500 laser end point monitor has also been installed on the system. |
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− | === 2016 Survey Results === |
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− | See the May 2016 {{file|Survey052016.pdf| User Survey Results}}. |
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+ | === CHIPS Act Award Announced to USC and UCSB NanoFab === |
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− | === CAIBE Ion Mill Available === |
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+ | [https://carbajal.house.gov/news/documentsingle.aspx?DocumentID=1672 U.S. Congressman Salud Carbajal congratulates UCSB and the NanoFab] on receiving a [https://www.nist.gov/chips CHIPS & Science Act] award, as part of the [https://microelectronicscommons.org/ California DREAMS Hub (Microelectronics Commons) led by USC]. |
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− | The [[CAIBE (Oxford Ion Mill)]] is up and running! Contact [[Brian Lingg]] for more information. |
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− | // [[User: |
+ | // [[User:John d|Demis]] 12:06, 4 October 2023 (PDT) |
− | === |
+ | === JEOL SEM's Installed === |
+ | Both SEM's have been replaced with new JEOL [[SEM_1_(JEOL_IT800SHL)|SEM's #1]] and [[Field_Emission_SEM_2_(JEOL_IT800SHL)|SEM #2]]. SEM#1 has the NABITY lithography system installed, and SEM #2 has always-on EDAX elemental analysis. Contact the [[Aidan_Hopkins|supervisor, Aidan Hopkins]], for more information. |
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− | Files generated with Nanofab tools (SEM images, AFM profiles, etc.) are now available on the nanofab SFTP server. Please check [http://signupmonkey.ece.ucsb.edu SignupMonkey] for details. |
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− | // [[User: |
+ | // [[User:John d|John d]] 18:31, 20 September 2023 (PDT) |
+ | |||
+ | === Wide FOV Microscope Installed === |
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+ | We have installed an AmScope stereo microscope in Bay 4 for wide field-of-view digital imaging/capture, with >2cm of FOV currently available. Wiki page here: [[Microscopes#Microscope_.238:_AmScope_Wide_Field_of_View_Stereoscope_.28Bay_4.29|AmScope Wide Field of View Stereoscope]] |
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+ | === Loomis Scribe & Break installed === |
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+ | We have installed a new [https://loomisinc.com/lsd-155lt/ Loomis LSD-155LT] Automated Scribe & Break Cleaving tool in the Back-End Processing lab. Qualifications are underway. Contact [[Aidan_Hopkins|supervisor, Aidan Hopkins]], for more information. |
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+ | === Dektak XT installed === |
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+ | We have replaced the old Dektak 6M with a new Dektak XT profilometer. This tool will provide robust, fast metrology for rapid in-process topography inspection. |
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+ | === New Process Control data tables === |
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+ | We have added [[Process_Group_-_Process_Control_Data|"Process Control Data"]] - data on deposition/etch repeatability - to a number of our highest used etchers and deposition tools. The datasheets are linked in multiple places, mainly on the Recipes pages for each tool, or on the general Recipes pages for [[Vacuum_Deposition_Recipes|'''Deposition Recipes''']] or [[Dry_Etching_Recipes|'''Etch Recipes''']]. |
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+ | ===''[[Template:News_-_Older_Articles|See older articles at this link]]''=== |
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Latest revision as of 22:06, 16 November 2023
News from the U.C. Santa Barbara Nanofabrication Facility.
NanoFab staff awarded Goleta's Innovator of the Year 2023
NanoFab staff member Demis D. John has been awarded the City of Goleta's "Innovator of the Year" for 2023! The award stems from the UCSB Nanofab's impact on the communities of Santa Barbara County and surrounding regions, in enabling cutting edge technology companies to thrive, which also enables many local careers in advanced high-tech. See the full announcement by the Santa Barbara South Coast Chamber of Commerce. //John d 13:58, 7 November 2023 (PST)
NanoFab Featured in Regional Tech Videos
The UCSB NanoFab is showcased as a driver of innovation and enabler of the regional high-tech industry.
See the videos here:
Santa Barbara County: This is TechTopia | UCSB NanoFab: An Innovation Center |
// John d 09:26, 1 November 2023 (PST)
CHIPS Act Award Announced to USC and UCSB NanoFab
U.S. Congressman Salud Carbajal congratulates UCSB and the NanoFab on receiving a CHIPS & Science Act award, as part of the California DREAMS Hub (Microelectronics Commons) led by USC. // Demis 12:06, 4 October 2023 (PDT)
JEOL SEM's Installed
Both SEM's have been replaced with new JEOL SEM's #1 and SEM #2. SEM#1 has the NABITY lithography system installed, and SEM #2 has always-on EDAX elemental analysis. Contact the supervisor, Aidan Hopkins, for more information. // John d 18:31, 20 September 2023 (PDT)
Wide FOV Microscope Installed
We have installed an AmScope stereo microscope in Bay 4 for wide field-of-view digital imaging/capture, with >2cm of FOV currently available. Wiki page here: AmScope Wide Field of View Stereoscope // John d 14:52, 19 April 2023 (PDT)
Loomis Scribe & Break installed
We have installed a new Loomis LSD-155LT Automated Scribe & Break Cleaving tool in the Back-End Processing lab. Qualifications are underway. Contact supervisor, Aidan Hopkins, for more information. // John d 09:41, 16 April 2023 (PDT)
Dektak XT installed
We have replaced the old Dektak 6M with a new Dektak XT profilometer. This tool will provide robust, fast metrology for rapid in-process topography inspection. // John d 10:41, 25 January 2023 (PST)
New Process Control data tables
We have added "Process Control Data" - data on deposition/etch repeatability - to a number of our highest used etchers and deposition tools. The datasheets are linked in multiple places, mainly on the Recipes pages for each tool, or on the general Recipes pages for Deposition Recipes or Etch Recipes. // John d 16:07, 5 January 2023 (PST)
See older articles at this link