User contributions for Freeborn d

14 September 2022

• 23:4223:42, 14 September 2022 diff hist +30‎ DSEIII (PlasmaTherm/Deep Silicon Etcher) ‎ →‎Operation Procedures & Documentation
• 23:3923:39, 14 September 2022 diff hist 0‎ N File:PT-DSEiii - Running a process.pdf ‎No edit summary
• 23:3723:37, 14 September 2022 diff hist 0‎ File:Editing a Recipe on Plasma.pdf ‎ Freeborn d uploaded a new version of File:Editing a Recipe on Plasma.pdf current

23 August 2022

• 20:5120:51, 23 August 2022 diff hist +4‎ Chemical-Mechanical Polisher (Logitech) ‎ →‎Instructions
• 20:1820:18, 23 August 2022 diff hist +41‎ Chemical-Mechanical Polisher (Logitech) ‎ →‎Instructions Tag: Visual edit: Switched
• 20:1520:15, 23 August 2022 diff hist +4‎ Chemical-Mechanical Polisher (Logitech) ‎ →‎Instructions Tag: Visual edit
• 20:1220:12, 23 August 2022 diff hist +24‎ Chemical-Mechanical Polisher (Logitech) ‎ CMP SOP Tag: Visual edit: Switched
• 20:0020:00, 23 August 2022 diff hist +21‎ N File:CMP.pdf ‎ CMP SOP current

26 January 2022

• 23:5423:54, 26 January 2022 diff hist −21‎ E-Beam 3 (Temescal) ‎ →‎Documentation Tag: Visual edit
• 23:4723:47, 26 January 2022 diff hist +6‎ E-Beam 3 (Temescal) ‎ →‎Documentation
• 23:4423:44, 26 January 2022 diff hist 0‎ File:EB -3 OPERATING INSTRUCTIONS docx.pdf ‎ Freeborn d uploaded a new version of File:EB -3 OPERATING INSTRUCTIONS docx.pdf current

6 January 2022

• 18:4818:48, 6 January 2022 diff hist 0‎ N File:EB -3 OPERATING INSTRUCTIONS docx.pdf ‎No edit summary
• 18:4718:47, 6 January 2022 diff hist −1‎ E-Beam 3 (Temescal) ‎ →‎Documentation

30 November 2021

• 17:4417:44, 30 November 2021 diff hist +93‎ Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) ‎ Uploaded PDF. Tag: Visual edit
• 17:0017:00, 30 November 2021 diff hist +16‎ Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) ‎ Uploaded a PDF Tag: Visual edit
• 16:5716:57, 30 November 2021 diff hist 0‎ N File:Cleaning Rules for Fluorine ICP Etch tool.pdf ‎No edit summary current
• 16:5316:53, 30 November 2021 diff hist +98‎ Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) ‎ Added PDF doc. Tag: Visual edit
• 16:5116:51, 30 November 2021 diff hist 0‎ N File:Editing a Recipe on Plasma.pdf ‎No edit summary

23 March 2020

• 21:1521:15, 23 March 2020 diff hist +1‎ E-Beam 1 (Sharon) ‎ →‎Documentation Tag: Visual edit
• 20:5520:55, 23 March 2020 diff hist +4‎ E-Beam 1 (Sharon) ‎ →‎Documentation Tag: Visual edit
• 20:4920:49, 23 March 2020 diff hist +28‎ E-Beam 1 (Sharon) ‎ Undo revision 157330 by Freeborn d (talk) Tag: Undo
• 20:4220:42, 23 March 2020 diff hist −28‎ E-Beam 1 (Sharon) ‎ →‎Documentation
• 20:0120:01, 23 March 2020 diff hist +41‎ N File:EB-1 operation instructions.pdf ‎ EB#1 operation instructions current
• 19:3019:30, 23 March 2020 diff hist +41‎ N File:Ebeam 1 operating instructions.pdf ‎ New operating instructions. current

21 March 2020

• 02:1902:19, 21 March 2020 diff hist −8‎ Don Freeborn ‎ Changed e-mail and ph number. Tag: Visual edit
• 02:1502:15, 21 March 2020 diff hist +28‎ PECVD 1 (PlasmaTherm 790) ‎ Changed tool supervisor. Tag: Visual edit
• 01:5601:56, 21 March 2020 diff hist +1‎ Thermal Evap 1 ‎ Changed tool supervisor. Tag: Visual edit
• 01:5301:53, 21 March 2020 diff hist +32‎ E-Beam 1 (Sharon) ‎ Changed tool supervisor. Tag: Visual edit
• 01:5101:51, 21 March 2020 diff hist +32‎ E-Beam 4 (CHA) ‎ Changed tool supervisor. Tag: Visual edit

19 July 2019

• 17:2317:23, 19 July 2019 diff hist 0‎ N File:Running a process on Plasma Therm SLR.pdf ‎No edit summary current

13 June 2019

• 23:2623:26, 13 June 2019 diff hist −29‎ Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) ‎ →‎Documentation Tag: Visual edit

25 February 2019

• 22:2622:26, 25 February 2019 diff hist −209‎ Don Freeborn ‎ Added links. Tag: Visual edit
• 22:1922:19, 25 February 2019 diff hist −900‎ Don Freeborn ‎ Linked the Fluorine etch page. Tag: Visual edit
• 22:0822:08, 25 February 2019 diff hist −108‎ Don Freeborn ‎ Changed list. Tag: Visual edit

29 January 2019

• 20:0020:00, 29 January 2019 diff hist +15‎ m Wafer Bonder (Logitech WBS7) ‎ →‎Operation Procedures Tag: Visual edit
• 15:5115:51, 29 January 2019 diff hist +45‎ m Wafer Bonder (SUSS SB6-8E) ‎ →‎Detailed Specifications Tag: Visual edit

7 November 2018

• 22:2422:24, 7 November 2018 diff hist −15‎ m E-Beam 3 (Temescal) ‎ →‎About: Removed the word rotated. Tag: Visual edit

10 September 2018

• 23:2023:20, 10 September 2018 diff hist −360‎ Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) ‎ Removed reference to the Bosch process. Tag: Visual edit
• 23:1523:15, 10 September 2018 diff hist +11‎ Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) ‎ Added gases. Tag: Visual edit

13 March 2014

• 15:5315:53, 13 March 2014 diff hist −1‎ E-BEAM ‎No edit summary current
• 15:5215:52, 13 March 2014 diff hist −3‎ E-Beam 3 (Temescal) ‎ →‎Documentation
• 15:5115:51, 13 March 2014 diff hist +1‎ E-BEAM ‎No edit summary
• 15:5015:50, 13 March 2014 diff hist −2,679‎ E-BEAM ‎ Replaced content with " *E-BEAM #3OPERATING INSTRUCTIONS-1.pdft"
• 15:4615:46, 13 March 2014 diff hist +2,676‎ E-BEAM ‎No edit summary
• 15:4115:41, 13 March 2014 diff hist −4‎ E-Beam 3 (Temescal) ‎ →‎Documentation
• 15:3215:32, 13 March 2014 diff hist +1‎ E-Beam 3 (Temescal) ‎ →‎Documentation
• 15:2215:22, 13 March 2014 diff hist 0‎ File:Documentations.pdf ‎ Freeborn d uploaded a new version of "File:Documentations.pdf" current
• 15:1915:19, 13 March 2014 diff hist −2,624‎ E-Beam 3 (Temescal) ‎ →‎Documentation
• 15:1215:12, 13 March 2014 diff hist +2,620‎ E-Beam 3 (Temescal) ‎ →‎Documentation
• 15:0615:06, 13 March 2014 diff hist −17‎ E-BEAM ‎No edit summary