Vacuum Deposition Recipes: Revision history

24 August 2024

• curprev 00:1100:11, 24 August 2024‎ Noahdutra talk contribs‎ 31,957 bytes +4,913‎ added Thermal Evap rankings to wiki Tag: Visual edit

19 August 2024

• curprev 18:1018:10, 19 August 2024‎ Thibeault talk contribs‎ 27,044 bytes −4‎ →‎Deposition Tools/Materials Table Tag: Visual edit
• curprev 18:1018:10, 19 August 2024‎ Thibeault talk contribs‎ 27,048 bytes +59‎ →‎Deposition Tools/Materials Table Tag: Visual edit

13 August 2024

• curprev 19:3819:38, 13 August 2024‎ Noahdutra talk contribs‎ 26,989 bytes −378‎ added sputters' rankings Tag: Visual edit

6 August 2024

• curprev 22:4422:44, 6 August 2024‎ John d talk contribs‎ 27,367 bytes +72‎ linked to ranking table at bottom Tag: Visual edit

5 August 2024

• curprev 17:1617:16, 5 August 2024‎ Noahdutra talk contribs‎ 27,295 bytes +2,866‎ added Ebeams rankings Tag: Visual edit
• curprev 16:5516:55, 5 August 2024‎ Noahdutra talk contribs‎ 24,429 bytes −30‎ No edit summary Tag: Visual edit
• curprev 16:5416:54, 5 August 2024‎ Noahdutra talk contribs‎ 24,459 bytes −47‎ No edit summary Tag: Visual edit
• curprev 16:5316:53, 5 August 2024‎ Noahdutra talk contribs‎ 24,506 bytes +16‎ No edit summary Tag: Visual edit
• curprev 16:5216:52, 5 August 2024‎ Noahdutra talk contribs‎ 24,490 bytes +912‎ added process ranking table Tag: Visual edit

31 July 2024

• curprev 21:1321:13, 31 July 2024‎ Ffoong talk contribs‎ 23,578 bytes −20‎ Correct the links for UNAXIS PECVD Tag: Visual edit
• curprev 21:1221:12, 31 July 2024‎ Ffoong talk contribs‎ 23,598 bytes −10‎ No edit summary Tag: Visual edit
• curprev 21:1121:11, 31 July 2024‎ Ffoong talk contribs‎ 23,608 bytes +4‎ Add R level for UNAXIS PECVD Tag: Visual edit
• curprev 20:3920:39, 31 July 2024‎ Ffoong talk contribs‎ 23,604 bytes −20‎ R5 on IBD Al2O3 Tag: Visual edit
• curprev 20:3820:38, 31 July 2024‎ Ffoong talk contribs‎ 23,624 bytes −504‎ Added R levels to IBD dep Tag: Visual edit
• curprev 18:0018:00, 31 July 2024‎ Ffoong talk contribs‎ 24,128 bytes +28‎ add R levels for ALD system Tag: Visual edit

30 July 2024

• curprev 22:3422:34, 30 July 2024‎ Ffoong talk contribs‎ 24,100 bytes +15‎ change PECVD1 R levels and add links Tag: Visual edit
• curprev 22:1822:18, 30 July 2024‎ Ffoong talk contribs‎ 24,085 bytes +18‎ Changed PECVD2 levels and added proper internal links Tag: Visual edit
• curprev 22:1322:13, 30 July 2024‎ Ffoong talk contribs‎ 24,067 bytes +1‎ Changed Si in PECVD2 to R3 Tag: Visual edit

7 July 2022

• curprev 22:4422:44, 7 July 2022‎ John d talk contribs‎ m 24,066 bytes +17‎ →‎Process Control Data: smaller font Tag: Visual edit
• curprev 22:4422:44, 7 July 2022‎ John d talk contribs‎ 24,049 bytes +157‎ →‎Deposition Tools/Materials Table: removed tempalte for smaller table explanation Tag: Visual edit

8 June 2022

• curprev 22:5522:55, 8 June 2022‎ John d talk contribs‎ 23,892 bytes +412‎ link to process control data Tag: Visual edit

27 September 2021

• curprev 18:3418:34, 27 September 2021‎ Ningcao talk contribs‎ 23,480 bytes +48‎ No edit summary
• curprev 18:3218:32, 27 September 2021‎ Ningcao talk contribs‎ 23,432 bytes −4‎ No edit summary
• curprev 18:3118:31, 27 September 2021‎ Ningcao talk contribs‎ 23,436 bytes −7‎ No edit summary
• curprev 18:2918:29, 27 September 2021‎ Ningcao talk contribs‎ 23,443 bytes +26‎ No edit summary
• curprev 18:2618:26, 27 September 2021‎ Ningcao talk contribs‎ 23,417 bytes +33‎ No edit summary

4 September 2021

• curprev 19:5019:50, 4 September 2021‎ Jcrode talk contribs‎ 23,384 bytes −18‎ Text replacement - "/wiki/index.php" to "/w/index.php"
• curprev 19:4819:48, 4 September 2021‎ Jcrode talk contribs‎ 23,402 bytes +36‎ Text replacement - "/wiki/index.php/" to "/wiki/index.php?title="

17 June 2021

• curprev 18:3018:30, 17 June 2021‎ John d talk contribs‎ m 23,366 bytes 0‎ changed IBD SiON A --> R Tag: Visual edit

2 June 2021

• curprev 20:2420:24, 2 June 2021‎ John d talk contribs‎ m 23,366 bytes +35‎ BG color of "SiN- Low stress"

12 January 2021

• curprev 17:4917:49, 12 January 2021‎ John d talk contribs‎ m 23,331 bytes 0‎ SPutt4: Ru: A-->R Tag: Visual edit
• curprev 17:4817:48, 12 January 2021‎ John d talk contribs‎ 23,331 bytes +50‎ added link to APutter 4 : Ru ("A") Tag: Visual edit

2 July 2020

• curprev 01:0001:00, 2 July 2020‎ John d talk contribs‎ 23,281 bytes +177‎ Corrected Unaxis Dep links. New row: low-stress Nitride. Tag: Visual edit

7 April 2020

• curprev 01:3001:30, 7 April 2020‎ Jcrode talk contribs‎ 23,104 bytes +6‎ Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/"

17 September 2019

• curprev 04:2804:28, 17 September 2019‎ Thibeault talk contribs‎ 23,098 bytes −3,952‎ Delete Sputter1 and 2 Tag: Visual edit

19 July 2019

• curprev 23:3423:34, 19 July 2019‎ John d talk contribs‎ 27,050 bytes −12‎ corrected PECVD2 a-Si link Tag: Visual edit

30 November 2018

• curprev 01:1501:15, 30 November 2018‎ John d talk contribs‎ m 27,062 bytes +74‎ fixed AJA3 Cr link Tag: Visual edit

16 July 2018

• curprev 14:0414:04, 16 July 2018‎ John d talk contribs‎ m 26,988 bytes +74‎ link to sputter 5 section Tag: Visual edit

9 July 2018

• curprev 16:0916:09, 9 July 2018‎ John d talk contribs‎ 26,914 bytes +74‎ sputt4 link to TiN - recipes table Tag: Visual edit

25 May 2018

• curprev 16:5416:54, 25 May 2018‎ Thibeault talk contribs‎ 26,840 bytes −30‎ minor link edit sputter5 Tag: Visual edit
• curprev 16:5216:52, 25 May 2018‎ Thibeault talk contribs‎ m 26,870 bytes +19‎ link to sputter5 recipes Tag: Visual edit

14 May 2018

• curprev 23:4923:49, 14 May 2018‎ Thibeault talk contribs‎ 26,851 bytes +147‎ Fixed ALD Links to proper headings Tag: Visual edit
• curprev 23:4423:44, 14 May 2018‎ Thibeault talk contribs‎ 26,704 bytes +10‎ Pt ALD link Tag: Visual edit

1 May 2018

• curprev 21:1221:12, 1 May 2018‎ Bosch t talk contribs‎ 26,694 bytes +8‎ No edit summary Tag: Visual edit
• curprev 21:0921:09, 1 May 2018‎ Bosch t talk contribs‎ 26,686 bytes −46‎ Updated to "new" sputter 5 link Tag: Visual edit

16 March 2018

• curprev 21:0621:06, 16 March 2018‎ John d talk contribs‎ 26,732 bytes +32‎ IBD Al2O3 "R" link Tag: Visual edit

14 March 2018

• curprev 03:3303:33, 14 March 2018‎ John d talk contribs‎ m 26,700 bytes −9‎ removed 'sortable' tag Tag: Visual edit
• curprev 00:4000:40, 14 March 2018‎ John d talk contribs‎ 26,709 bytes +71‎ fixed IBD SiOn link Tag: Visual edit
• curprev 00:3900:39, 14 March 2018‎ John d talk contribs‎ 26,638 bytes −38‎ IBD SiOxNy link Tag: Visual edit