Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP): Revision history

14 June 2024

• curprev 16:5916:59, 14 June 2024‎ John d talk contribs‎ 3,972 bytes +20‎ added tool model to toolinfo

22 November 2023

• curprev 20:0920:09, 22 November 2023‎ John d talk contribs‎ 3,952 bytes +73‎ added "FL-ICP" for SEO Tag: Visual edit

23 June 2023

• curprev 19:1019:10, 23 June 2023‎ John d talk contribs‎ 3,879 bytes +202‎ →‎Documentation: link to Manual edge bead removal page Tag: Visual edit

30 August 2022

• curprev 17:4817:48, 30 August 2022‎ Silva talk contribs‎ 3,677 bytes +24‎ No edit summary

19 July 2022

• curprev 18:4518:45, 19 July 2022‎ John d talk contribs‎ m 3,653 bytes −3‎ →‎Recipes: updated Process Control Data text Tag: Visual edit

30 November 2021

• curprev 17:4417:44, 30 November 2021‎ Freeborn d talk contribs‎ 3,656 bytes +93‎ Uploaded PDF. Tag: Visual edit
• curprev 17:0017:00, 30 November 2021‎ Freeborn d talk contribs‎ 3,563 bytes +16‎ Uploaded a PDF Tag: Visual edit
• curprev 16:5316:53, 30 November 2021‎ Freeborn d talk contribs‎ 3,547 bytes +98‎ Added PDF doc. Tag: Visual edit

28 October 2021

• curprev 02:4402:44, 28 October 2021‎ Silva talk contribs‎ 3,449 bytes −8‎ No edit summary

2 October 2021

• curprev 00:1300:13, 2 October 2021‎ John d talk contribs‎ m 3,457 bytes +7‎ →‎Detailed Specifications Tag: Visual edit
• curprev 00:1200:12, 2 October 2021‎ John d talk contribs‎ 3,450 bytes +318‎ →‎Detailed Specifications: mentioned 5mm exlcusion & wafers breaking Tag: Visual edit
• curprev 00:1000:10, 2 October 2021‎ John d talk contribs‎ 3,132 bytes +289‎ added small-sample mounting notes Tag: Visual edit
• curprev 00:0700:07, 2 October 2021‎ John d talk contribs‎ 2,843 bytes −941‎ deleted old mounting/Bosch process info Tag: Visual edit

4 September 2021

• curprev 19:5119:51, 4 September 2021‎ Jcrode talk contribs‎ 3,784 bytes −3‎ Text replacement - "/wiki/index.php" to "/w/index.php"
• curprev 19:4719:47, 4 September 2021‎ Jcrode talk contribs‎ 3,787 bytes +6‎ Text replacement - "/wiki/index.php/" to "/wiki/index.php?title="

4 May 2021

• curprev 16:5916:59, 4 May 2021‎ John d talk contribs‎ 3,781 bytes +96‎ →‎Recipes: mention historical data Tag: Visual edit

30 July 2020

• curprev 00:1000:10, 30 July 2020‎ John d talk contribs‎ m 3,685 bytes −16‎ →‎Detailed Specifications: update LEP description Tag: Visual edit
• curprev 00:0900:09, 30 July 2020‎ John d talk contribs‎ m 3,701 bytes 0‎ →‎Recipes: spelling Tag: Visual edit
• curprev 00:0800:08, 30 July 2020‎ John d talk contribs‎ m 3,701 bytes +6‎ →‎Recipes: bolded Tag: Visual edit

8 June 2020

• curprev 18:1818:18, 8 June 2020‎ John d talk contribs‎ 3,695 bytes +321‎ link to lase rmonitor pages Tag: Visual edit

15 April 2020

• curprev 17:3117:31, 15 April 2020‎ Silva talk contribs‎ 3,374 bytes −1‎ No edit summary

7 April 2020

• curprev 01:3501:35, 7 April 2020‎ Jcrode talk contribs‎ 3,375 bytes +1‎ Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/"

19 July 2019

• curprev 22:3222:32, 19 July 2019‎ John d talk contribs‎ m 3,374 bytes −47‎ →‎Documentation: corrected link
• curprev 22:3222:32, 19 July 2019‎ John d talk contribs‎ 3,421 bytes +117‎ →‎Documentation: link to SOP & mention Cortex software

13 June 2019

• curprev 23:2623:26, 13 June 2019‎ Freeborn d talk contribs‎ 3,304 bytes −29‎ →‎Documentation Tag: Visual edit

27 November 2018

• curprev 16:1116:11, 27 November 2018‎ John d talk contribs‎ m 3,333 bytes +33‎ →‎Detailed Specifications: minor update to laser mon description Tag: Visual edit
• curprev 16:1016:10, 27 November 2018‎ John d talk contribs‎ 3,300 bytes +77‎ →‎Recipes: corrected link to recipes sub-heading Tag: Visual edit
• curprev 16:0716:07, 27 November 2018‎ John d talk contribs‎ m 3,223 bytes +23‎ →‎Detailed Specifications: corrected subscripts Tag: Visual edit

18 September 2018

• curprev 23:1623:16, 18 September 2018‎ John d talk contribs‎ 3,200 bytes +91‎ →‎Recipes: fixed recipe links to point to correct section (Fluorine etch, not DeepRIE) Tag: Visual edit
• curprev 23:1323:13, 18 September 2018‎ John d talk contribs‎ 3,109 bytes −173‎ removed warning about outdated info

10 September 2018

• curprev 23:2023:20, 10 September 2018‎ Freeborn d talk contribs‎ 3,282 bytes −360‎ Removed reference to the Bosch process. Tag: Visual edit
• curprev 23:1523:15, 10 September 2018‎ Freeborn d talk contribs‎ 3,642 bytes +11‎ Added gases. Tag: Visual edit

28 August 2018

• curprev 21:5621:56, 28 August 2018‎ John d talk contribs‎ m 3,631 bytes +7‎ bolded the top note Tag: Visual edit: Switched
• curprev 21:5321:53, 28 August 2018‎ John d talk contribs‎ 3,624 bytes +166‎ note indicate info is from pre-conversion Tag: Visual edit
• curprev 21:5121:51, 28 August 2018‎ John d talk contribs‎ m 3,458 bytes 0‎ John d moved page Si Deep RIE (PlasmaTherm/Bosch Etch) to Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP): tool converted

7 October 2017

• curprev 07:4907:49, 7 October 2017‎ John d talk contribs‎ m 3,458 bytes +15‎ minor
• curprev 07:4607:46, 7 October 2017‎ John d talk contribs‎ 3,443 bytes +28‎ →‎Recipes: link to ICP Etching / recipes section Tag: Visual edit: Switched

31 August 2017

• curprev 19:1319:13, 31 August 2017‎ John d talk contribs‎ m 3,415 bytes +2‎ No edit summary
• curprev 19:1219:12, 31 August 2017‎ John d talk contribs‎ m 3,413 bytes 0‎ →‎Documentation: reorder

3 June 2016

• curprev 23:5823:58, 3 June 2016‎ Thibeault talk contribs‎ 3,413 bytes +92‎ →‎Detailed Specifications

21 April 2014

• curprev 23:0423:04, 21 April 2014‎ Dfreeborn talk contribs‎ 3,321 bytes +85‎ →‎Documentation

17 April 2014

• curprev 18:0918:09, 17 April 2014‎ Dfreeborn talk contribs‎ 3,236 bytes +47‎ →‎Documentation
• curprev 18:0818:08, 17 April 2014‎ Dfreeborn talk contribs‎ 3,189 bytes +51‎ →‎Documentation
• curprev 18:0518:05, 17 April 2014‎ Dfreeborn talk contribs‎ 3,138 bytes +17‎ No edit summary

26 September 2013

• curprev 01:3701:37, 26 September 2013‎ Ray t talk contribs‎ 3,121 bytes +163‎ No edit summary

11 July 2012

• curprev 13:4613:46, 11 July 2012‎ Zwarburg talk contribs‎ m 2,958 bytes 0‎ moved Si Deep RIE (Bosch Etch) to Si Deep RIE (PlasmaTherm/Bosch Etch)
• curprev 13:4613:46, 11 July 2012‎ Zwarburg talk contribs‎ 2,958 bytes +11‎ No edit summary

1 July 2012

• curprev 14:3114:31, 1 July 2012‎ Zwarburg talk contribs‎ 2,947 bytes −1‎ No edit summary
• curprev 14:2914:29, 1 July 2012‎ Zwarburg talk contribs‎ 2,948 bytes +2‎ No edit summary
• curprev 14:2814:28, 1 July 2012‎ Zwarburg talk contribs‎ 2,946 bytes +2,946‎ Created page with "{{tool|{{PAGENAME}} |picture=RIE5.jpg |type = Dry Etch |super= Don Freeborn |phone= 805-893-3918x216 |location=Bay 2 |email=freeborn@ece.ucsb.edu |description = SiRIE Based Flour…"