ICP Etching Recipes: Revision history

27 September 2013

• curprev 21:0321:03, 27 September 2013‎ Thibeault talk contribs‎ 1,380 bytes +134‎ →‎ICP Etch 2 (Panasonic E640)
• curprev 18:5618:56, 27 September 2013‎ Thibeault talk contribs‎ 1,246 bytes 0‎ →‎Al Etch (Panasonic 1)
• curprev 18:5418:54, 27 September 2013‎ Thibeault talk contribs‎ 1,246 bytes 0‎ →‎Al Etch (Panasonic 1)
• curprev 18:4918:49, 27 September 2013‎ Thibeault talk contribs‎ 1,246 bytes +83‎ →‎ICP Etch 1 (Panasonic E626I)
• curprev 18:0018:00, 27 September 2013‎ Thibeault talk contribs‎ 1,163 bytes +11‎ →‎SiO2 Etching (Panasonic 1)

25 September 2013

• curprev 18:0918:09, 25 September 2013‎ Ningcao talk contribs‎ 1,152 bytes +8‎ →‎Si Deep RIE (PlasmaTherm/Bosch Etch)
• curprev 17:0017:00, 25 September 2013‎ Ningcao talk contribs‎ 1,144 bytes +39‎ →‎Si Deep RIE (PlasmaTherm/Bosch Etch)
• curprev 16:5716:57, 25 September 2013‎ Ningcao talk contribs‎ 1,105 bytes +146‎ →‎ICP Etch 1 (Panasonic E626I)

24 September 2013

• curprev 21:1421:14, 24 September 2013‎ Ningcao talk contribs‎ 959 bytes +38‎ →‎GaN Etch (Unaxis VLR)
• curprev 21:1221:12, 24 September 2013‎ Ningcao talk contribs‎ 921 bytes +60‎ →‎ICP-Etch (Unaxis VLR)
• curprev 16:4016:40, 24 September 2013‎ Ningcao talk contribs‎ 861 bytes −99‎ →‎XeF2 Etch (Xetch)
• curprev 16:2116:21, 24 September 2013‎ Ningcao talk contribs‎ 960 bytes −4‎ No edit summary
• curprev 16:2116:21, 24 September 2013‎ Ningcao talk contribs‎ 964 bytes +28‎ No edit summary

19 September 2013

• curprev 22:5022:50, 19 September 2013‎ Ningcao talk contribs‎ 936 bytes −111‎ →‎RIE Etch 5 (RIE#5)
• curprev 22:4122:41, 19 September 2013‎ Ningcao talk contribs‎ 1,047 bytes +33‎ →‎RIE Etch 5 (RIE#5)
• curprev 22:3822:38, 19 September 2013‎ Ningcao talk contribs‎ 1,014 bytes +78‎ →‎ICP Etch 1 (Panasonic E626I)

18 September 2013

• curprev 23:0023:00, 18 September 2013‎ Ningcao talk contribs‎ 936 bytes −1‎ →‎XeF2 Etch (Xetch)
• curprev 22:5822:58, 18 September 2013‎ Ningcao talk contribs‎ 937 bytes −11‎ →‎XeF2 Etch (Xetch)
• curprev 22:5822:58, 18 September 2013‎ Ningcao talk contribs‎ 948 bytes +1‎ →‎XeF2 Etch (Xetch)
• curprev 22:5622:56, 18 September 2013‎ Ningcao talk contribs‎ 947 bytes −1‎ →‎XeF2 Etch (Xetch))
• curprev 22:5522:55, 18 September 2013‎ Ningcao talk contribs‎ 948 bytes −1‎ →‎XeF22 Etch (Xetch))
• curprev 22:5522:55, 18 September 2013‎ Ningcao talk contribs‎ 949 bytes +12‎ →‎XeF2 Etch (Xetch))
• curprev 22:5422:54, 18 September 2013‎ Ningcao talk contribs‎ 937 bytes −3‎ No edit summary
• curprev 22:5122:51, 18 September 2013‎ Ningcao talk contribs‎ 940 bytes −9‎ →‎Si-Etch (XeF2 Etch (Xetch))
• curprev 22:4922:49, 18 September 2013‎ Ningcao talk contribs‎ 949 bytes +3‎ →‎Si-Etch (XeF2 Etch (Xetch))
• curprev 22:4522:45, 18 September 2013‎ Ningcao talk contribs‎ 946 bytes +31‎ →‎ICP Etch 1 (Panasonic E626I)
• curprev 22:4422:44, 18 September 2013‎ Ningcao talk contribs‎ 915 bytes +1‎ →‎ICP Etch 1 (Panasonic E626I)
• curprev 22:1922:19, 18 September 2013‎ Ningcao talk contribs‎ 914 bytes +56‎ →‎ICP Etch 1 (Panasonic E626I)

17 September 2013

• curprev 18:4218:42, 17 September 2013‎ Ningcao talk contribs‎ 858 bytes −47‎ →‎Si-Etch (XeF2 Etch (Xetch))
• curprev 18:4218:42, 17 September 2013‎ Ningcao talk contribs‎ 905 bytes +49‎ →‎Si Etch (XeF2 Etch (Xetch))
• curprev 18:3718:37, 17 September 2013‎ Ningcao talk contribs‎ 856 bytes +23‎ →‎Si Etch (XeF2 Etch (Xetch))
• curprev 18:3518:35, 17 September 2013‎ Ningcao talk contribs‎ 833 bytes +6‎ →‎Si Etch (XeF2 Etcher)
• curprev 18:3318:33, 17 September 2013‎ Ningcao talk contribs‎ 827 bytes +54‎ →‎InP Etch (Unaxis VLR)

30 August 2013

• curprev 18:4918:49, 30 August 2013‎ Thibeault talk contribs‎ 773 bytes +16‎ →‎ICP Etch 2 (Panasonic E640)
• curprev 18:4818:48, 30 August 2013‎ Thibeault talk contribs‎ 757 bytes −6‎ →‎ICP Etch 1 (Panasonic E626I)
• curprev 18:4718:47, 30 August 2013‎ Thibeault talk contribs‎ 763 bytes −1‎ →‎ICP Etch 1 (Panasonic E626I)
• curprev 18:4718:47, 30 August 2013‎ Thibeault talk contribs‎ 764 bytes −161‎ →‎ICP Etch 1 (Panasonic E626I)
• curprev 18:2018:20, 30 August 2013‎ Thibeault talk contribs‎ 925 bytes +102‎ →‎SiO2 Vertical Etch (Panasonic 1)
• curprev 18:1918:19, 30 August 2013‎ Thibeault talk contribs‎ 823 bytes +161‎ →‎SiO2 Vertical Etch (Panasonic 1)

21 August 2013

• curprev 17:5217:52, 21 August 2013‎ Biljana talk contribs‎ 662 bytes −74‎ →‎SiO2 Vertical Etch (Panasonic 1)
• curprev 17:4617:46, 21 August 2013‎ Biljana talk contribs‎ 736 bytes −6‎ →‎SiO2 Vertical Etch (Panasonic 1)
• curprev 17:4217:42, 21 August 2013‎ Biljana talk contribs‎ 742 bytes +81‎ →‎SiO2 Vertical Etch (Panasonic 1)

10 July 2013

• curprev 23:1023:10, 10 July 2013‎ Thibeault talk contribs‎ 661 bytes +5‎ No edit summary
• curprev 22:3422:34, 10 July 2013‎ Thibeault talk contribs‎ 656 bytes +4‎ No edit summary
• curprev 22:3322:33, 10 July 2013‎ Thibeault talk contribs‎ 652 bytes −3‎ No edit summary

18 June 2013

• curprev 20:5520:55, 18 June 2013‎ Thibeault talk contribs‎ 655 bytes +26‎ No edit summary
• curprev 20:5420:54, 18 June 2013‎ Thibeault talk contribs‎ 629 bytes +50‎ No edit summary

20 August 2012

• curprev 20:1620:16, 20 August 2012‎ Zwarburg talk contribs‎ 579 bytes +28‎ No edit summary
• curprev 20:1520:15, 20 August 2012‎ Zwarburg talk contribs‎ 551 bytes +24‎ →‎SiO Vertical Etch
• curprev 20:1220:12, 20 August 2012‎ Zwarburg talk contribs‎ 527 bytes +236‎ →‎ICP-Etch (Unaxis VLR)