Contact Aligner (SUSS MA-6): Revision history

5 September 2024

• curprev 21:4721:47, 5 September 2024‎ John d talk contribs‎ 4,638 bytes +453‎ links to CAD file info Tag: Visual edit

30 July 2024

• curprev 15:1015:10, 30 July 2024‎ Sawyer l talk contribs‎ 4,185 bytes +2‎ No edit summary

22 September 2023

• curprev 21:0821:08, 22 September 2023‎ John d talk contribs‎ 4,183 bytes +122‎ →‎Documentation: link to UCSB mask ordering procedure Tag: Visual edit

2 August 2023

• curprev 16:3416:34, 2 August 2023‎ Sawyer l talk contribs‎ 4,061 bytes −1‎ Minor SOP edit (typo) Tag: Visual edit

28 April 2023

• curprev 18:1818:18, 28 April 2023‎ John d talk contribs‎ 4,062 bytes +205‎ →‎About: explained BSA a bit more. Tag: Visual edit
• curprev 18:1618:16, 28 April 2023‎ John d talk contribs‎ 3,857 bytes +163‎ mentioned motorized systems Tag: Visual edit

4 January 2023

• curprev 00:3800:38, 4 January 2023‎ John d talk contribs‎ 3,694 bytes +135‎ →‎Documentation: added link to alignment mark GDS file Tag: Visual edit

18 October 2022

• curprev 14:2214:22, 18 October 2022‎ Sawyer l talk contribs‎ 3,559 bytes +183‎ Added additional tool specs, including BSA objective spacing Tag: Visual edit

30 August 2022

• curprev 17:0517:05, 30 August 2022‎ Silva talk contribs‎ 3,376 bytes +23‎ No edit summary

1 March 2022

• curprev 15:5615:56, 1 March 2022‎ John d talk contribs‎ m 3,353 bytes +130‎ →‎About: minor rearrangement Tag: Visual edit
• curprev 15:5215:52, 1 March 2022‎ John d talk contribs‎ m 3,223 bytes +62‎ linked to SB6 Bonder page Tag: Visual edit
• curprev 15:4515:45, 1 March 2022‎ Sawyer l talk contribs‎ 3,161 bytes +347‎ Added chuck and mask sizes Tag: Visual edit

8 December 2021

• curprev 19:1219:12, 8 December 2021‎ John d talk contribs‎ 2,814 bytes +53‎ →‎Documentation: link to "backside alignment - allowed mark locations" Tag: Visual edit
• curprev 19:1019:10, 8 December 2021‎ John d talk contribs‎ m 2,761 bytes +2‎ minor wording Tag: Visual edit

11 August 2021

• curprev 21:0821:08, 11 August 2021‎ Sawyer l talk contribs‎ 2,759 bytes −6‎ →‎Documentation Tag: Visual edit
• curprev 21:0821:08, 11 August 2021‎ Sawyer l talk contribs‎ 2,765 bytes −3‎ →‎Documentation Tag: Visual edit
• curprev 21:0721:07, 11 August 2021‎ Sawyer l talk contribs‎ 2,768 bytes +100‎ →‎Documentation: Added BA6 SOP Tag: Visual edit

7 August 2021

• curprev 16:2016:20, 7 August 2021‎ John d talk contribs‎ 2,668 bytes +157‎ link to recipes Tag: Visual edit

13 July 2021

• curprev 17:2417:24, 13 July 2021‎ Sawyer l talk contribs‎ 2,511 bytes −31‎ Updated SOP with BSA steps, removed old BSA steps Tag: Visual edit

30 November 2020

• curprev 19:1919:19, 30 November 2020‎ Sawyer l talk contribs‎ 2,542 bytes −18‎ Intensity info for CH2 updated, SOP updated Tag: Visual edit

29 October 2020

• curprev 15:1315:13, 29 October 2020‎ Sawyer l talk contribs‎ 2,560 bytes +12‎ New SOP rev. Change Ch2 intensity info Tag: Visual edit

13 February 2020

• curprev 22:2222:22, 13 February 2020‎ Thibeault talk contribs‎ 2,548 bytes +10‎ →‎About

24 September 2019

• curprev 21:1121:11, 24 September 2019‎ Sawyer l talk contribs‎ 2,538 bytes +22‎ →‎Detailed Specifications Tag: Visual edit

17 September 2019

• curprev 18:3918:39, 17 September 2019‎ Sawyer l talk contribs‎ 2,516 bytes +430‎ →‎Detailed Specifications: updated system specs Tag: Visual edit

11 September 2019

• curprev 23:0823:08, 11 September 2019‎ Sawyer l talk contribs‎ 2,086 bytes +82‎ visual aid link Tag: Visual edit
• curprev 23:0723:07, 11 September 2019‎ Sawyer l talk contribs‎ 2,004 bytes +32‎ No edit summary Tag: Visual edit
• curprev 23:0723:07, 11 September 2019‎ Sawyer l talk contribs‎ 1,972 bytes −26‎ SOP linked Tag: Visual edit
• curprev 23:0323:03, 11 September 2019‎ Sawyer l talk contribs‎ 1,998 bytes +55‎ verbiage and spec changes Tag: Visual edit

2 April 2019

• curprev 23:2223:22, 2 April 2019‎ Sawyer l talk contribs‎ 1,943 bytes −7‎ Contact info changed to Lee S. Tag: Visual edit

3 July 2018

• curprev 22:4822:48, 3 July 2018‎ John d talk contribs‎ 1,950 bytes +45‎ →‎Documentation: Link to Backside ALignment quickstart Tag: Visual edit
• curprev 22:4722:47, 3 July 2018‎ John d talk contribs‎ 1,905 bytes −159‎ →‎Documentation: combined 4 pages into one PDF Tag: Visual edit

17 March 2014

• curprev 19:3619:36, 17 March 2014‎ Dfreeborn talk contribs‎ 2,064 bytes +108‎ →‎Documentation
• curprev 19:3219:32, 17 March 2014‎ Dfreeborn talk contribs‎ 1,956 bytes +46‎ →‎Documentation
• curprev 19:2719:27, 17 March 2014‎ Dfreeborn talk contribs‎ 1,910 bytes +46‎ →‎Documentation
• curprev 19:1819:18, 17 March 2014‎ Dfreeborn talk contribs‎ 1,864 bytes +46‎ →‎Documentation
• curprev 19:1319:13, 17 March 2014‎ Dfreeborn talk contribs‎ 1,818 bytes +18‎ →‎Documentation
• curprev 19:1019:10, 17 March 2014‎ Dfreeborn talk contribs‎ 1,800 bytes −16‎ →‎Documentation
• curprev 19:0119:01, 17 March 2014‎ Dfreeborn talk contribs‎ 1,816 bytes +17‎ →‎Documentation
• curprev 18:5918:59, 17 March 2014‎ Dfreeborn talk contribs‎ 1,799 bytes +28‎ →‎Documentation
• curprev 18:5718:57, 17 March 2014‎ Dfreeborn talk contribs‎ 1,771 bytes +17‎ No edit summary

11 July 2012

• curprev 13:4913:49, 11 July 2012‎ Zwarburg talk contribs‎ 1,754 bytes +11‎ No edit summary

30 June 2012

• curprev 22:1622:16, 30 June 2012‎ Zwarburg talk contribs‎ 1,743 bytes +1,743‎ Created page with "{{tool|{{PAGENAME}} |picture=ContactAligner.jpg |type = Lithography |super= Don Freeborn |phone=(805)839-3918x216 |location=Bay 7 |email=freeborn@ece.ucsb.edu |description = Mask…"