DSEIII (PlasmaTherm/Deep Silicon Etcher): Revision history

6 November 2024

• curprev 21:5121:51, 6 November 2024‎ John d talk contribs‎ 6,912 bytes +1,325‎ pasted NoahD's example SEM's Tag: Visual edit: Switched

31 May 2024

• curprev 22:4622:46, 31 May 2024‎ John d talk contribs‎ 5,587 bytes +615‎ added beter Bosch example showing striations Tag: Visual edit

15 February 2024

• curprev 22:1722:17, 15 February 2024‎ John d talk contribs‎ m 4,972 bytes +12‎ added model number
• curprev 22:1522:15, 15 February 2024‎ John d talk contribs‎ 4,960 bytes +191‎ added example SEM Tag: Visual edit

5 October 2022

• curprev 05:5005:50, 5 October 2022‎ John d talk contribs‎ 4,769 bytes −32‎ fixed link to SOP Tag: Visual edit

14 September 2022

• curprev 23:4223:42, 14 September 2022‎ Freeborn d talk contribs‎ 4,801 bytes +30‎ →‎Operation Procedures & Documentation

30 August 2022

• curprev 17:4917:49, 30 August 2022‎ Silva talk contribs‎ 4,771 bytes +24‎ No edit summary

20 January 2022

• curprev 17:0517:05, 20 January 2022‎ Bosch t talk contribs‎ 4,747 bytes +358‎ →‎Recipes

1 December 2021

• curprev 18:0118:01, 1 December 2021‎ John d talk contribs‎ 4,389 bytes +439‎ added section for Edge-Bead removal of PR etc Tag: Visual edit

28 October 2021

• curprev 02:4202:42, 28 October 2021‎ Silva talk contribs‎ 3,950 bytes −8‎ No edit summary

4 September 2021

• curprev 19:5119:51, 4 September 2021‎ Jcrode talk contribs‎ 3,958 bytes −3‎ Text replacement - "/wiki/index.php" to "/w/index.php"
• curprev 19:4719:47, 4 September 2021‎ Jcrode talk contribs‎ 3,961 bytes +6‎ Text replacement - "/wiki/index.php/" to "/wiki/index.php?title="

3 September 2021

• curprev 20:3320:33, 3 September 2021‎ John d talk contribs‎ m 3,955 bytes −4‎ corrected header level Tag: Visual edit

14 October 2020

• curprev 15:4515:45, 14 October 2020‎ John d talk contribs‎ 3,959 bytes +732‎ updated text, added Clamp text Tag: Visual edit

23 July 2020

• curprev 17:0817:08, 23 July 2020‎ John d talk contribs‎ 3,227 bytes +6‎ →‎Documentation: bolded Tag: Visual edit
• curprev 17:0817:08, 23 July 2020‎ John d talk contribs‎ 3,221 bytes +260‎ added allowed materisl: Al2O3, Al, Crystalbond wax, wafer size and clamp Tag: Visual edit

8 June 2020

• curprev 18:1418:14, 8 June 2020‎ John d talk contribs‎ 2,961 bytes +306‎ links to laser monitor pages Tag: Visual edit

15 April 2020

• curprev 17:3217:32, 15 April 2020‎ Silva talk contribs‎ 2,655 bytes −1‎ No edit summary

7 April 2020

• curprev 01:2901:29, 7 April 2020‎ Jcrode talk contribs‎ 2,656 bytes +1‎ Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/"

1 October 2018

• curprev 22:2922:29, 1 October 2018‎ John d talk contribs‎ 2,655 bytes +26‎ →‎Recipes: fixed recipes link Tag: Visual edit

9 April 2018

• curprev 17:4017:40, 9 April 2018‎ John d talk contribs‎ 2,629 bytes +205‎ →‎Recipes: linked to recipes Tag: Visual edit

6 November 2017

• curprev 17:4517:45, 6 November 2017‎ Thibeault talk contribs‎ 2,424 bytes 0‎ No edit summary
• curprev 17:4317:43, 6 November 2017‎ Thibeault talk contribs‎ 2,424 bytes +2,424‎ Created page with "{{tool|{{PAGENAME}} |picture=DSEIII.jpg |type = Dry Etch |super= Don Freeborn |phone= 805-893-3918x216 |location=Bay 2 |email=freeborn@ece.ucsb.edu |description = Deep Silicon..."