Oxygen Plasma System Recipes: Revision history

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curprev 20:2320:23, 15 May 2024‎ John d talk contribs‎ 6,131 bytes +355‎ →‎SiN Etching: PR backside protect Tag: Visual edit

curprev 20:5520:55, 1 March 2024‎ John d talk contribs‎ 5,776 bytes +148‎ →‎N2/O2 Recipes: note that wafers get hotter than recipe name indicates. Tag: Visual edit

curprev 20:4620:46, 29 February 2024‎ John d talk contribs‎ 5,628 bytes +132‎ →‎N2/O2 effect on Gold contacts & Substrate Temperature: minor additions to clarify gold optical absorption Tag: Visual edit

curprev 19:0219:02, 30 November 2023‎ John d talk contribs‎ 5,496 bytes +158‎ →‎Plasma Clean (YES EcoClean): links to recipe screenshots for both N2-O2 & O2 Tag: Visual edit

curprev 23:4623:46, 16 November 2023‎ John d talk contribs‎ 5,338 bytes +65‎ →‎Plasma Clean (YES EcoClean): added Ru oxidation in O2-only Tag: Visual edit

curprev 17:0817:08, 9 September 2023‎ John d talk contribs‎ 5,273 bytes +299‎ →‎N2/O2 Recipes: clarified recipe renaming, and hearing of wafers Tag: Visual edit

curprev 17:3017:30, 8 September 2023‎ Ffoong talk contribs‎ 4,974 bytes +11‎ add temp variations Tag: Visual edit

curprev 14:1414:14, 9 August 2023‎ John d talk contribs‎ 4,963 bytes −16‎ →‎O2-Only Recipes: removed "To be added", as these recipes are currently on the tool Tag: Visual edit

curprev 17:0417:04, 1 August 2023‎ John d talk contribs‎ 4,979 bytes +146‎ →‎O2-Only Recipes: note on dim plasma Tag: Visual edit

curprev 00:1400:14, 19 July 2023‎ Ffoong talk contribs‎ 4,833 bytes 0‎ changed 120C to 130C per our Trello action Tag: Visual edit

curprev 23:0923:09, 17 July 2023‎ John d talk contribs‎ m 4,833 bytes −19‎ →‎O2 Recipe Characterization Tag: Visual edit
curprev 23:0223:02, 17 July 2023‎ John d talk contribs‎ 4,852 bytes +1,512‎ →‎Plasma Clean (YES EcoClean): updates, explained Gold oxidation etc. Placeholders for recipe names Tag: Visual edit

curprev 16:5516:55, 5 June 2023‎ Ffoong talk contribs‎ 3,027 bytes +20‎ add link Tag: Visual edit
curprev 16:5216:52, 5 June 2023‎ Ffoong talk contribs‎ 3,007 bytes +104‎ →‎O2-Only Recipes: add details Tag: Visual edit

curprev 21:1321:13, 2 June 2023‎ Ffoong talk contribs‎ 2,903 bytes −46‎ →‎O2-Only Recipes: section on O2-only recipe Tag: Visual edit

curprev 18:3018:30, 1 June 2023‎ John d talk contribs‎ 2,949 bytes −64‎ →‎Plasma Clean (YES EcoClean): deleted false link Tag: Visual edit
curprev 18:2918:29, 1 June 2023‎ John d talk contribs‎ 3,013 bytes +277‎ →‎Plasma Clean (YES EcoClean): added sub headings to N2/O2, link to new page Tag: Visual edit

curprev 20:0520:05, 11 November 2022‎ John d talk contribs‎ 2,736 bytes −64‎ →‎Chamber Clean after CF4 Etching: deleted 300W recipe Tag: Visual edit

curprev 07:4007:40, 21 January 2021‎ John d talk contribs‎ 2,800 bytes +427‎ →‎Plasma Clean (YES EcoClean): guidelines added Tag: Visual edit
curprev 07:3707:37, 21 January 2021‎ John d talk contribs‎ m 2,373 bytes +5‎ →‎O2 Ashing Tag: Visual edit
curprev 07:3707:37, 21 January 2021‎ John d talk contribs‎ 2,368 bytes +538‎ →‎Ashers (Technics PEII): added O2 ashing recipes Tag: Visual edit

curprev 16:4116:41, 25 September 2019‎ John d talk contribs‎ 1,830 bytes −30‎ →‎Plasma Clean (YES EcoClean): correct YES EcoClean link Tag: Visual edit

curprev 00:2900:29, 19 September 2019‎ Thibeault talk contribs‎ 1,860 bytes −13‎ →‎Plasma Clean (YES EcoClean) Tag: Visual edit
curprev 00:2200:22, 19 September 2019‎ Thibeault talk contribs‎ 1,873 bytes +102‎ →‎Plasma Clean (YES EcoClean) Tag: Visual edit
curprev 00:0000:00, 19 September 2019‎ Thibeault talk contribs‎ 1,771 bytes +28‎ →‎Plasma Clean (YES EcoClean) Tag: Visual edit

curprev 04:1304:13, 17 September 2019‎ Thibeault talk contribs‎ 1,743 bytes +69‎ No edit summary

curprev 17:5517:55, 12 September 2019‎ Sawyer l talk contribs‎ 1,674 bytes +277‎ →‎Plasma Activation (EVG 810): added recipe details Tag: Visual edit

curprev 21:5321:53, 11 September 2019‎ Sawyer l talk contribs‎ 1,397 bytes +303‎ added recipe file links Tag: Visual edit
curprev 21:5121:51, 11 September 2019‎ Sawyer l talk contribs‎ 1,094 bytes −3‎ No edit summary Tag: Visual edit
curprev 21:5021:50, 11 September 2019‎ Sawyer l talk contribs‎ 1,097 bytes +70‎ added recipe link Tag: Visual edit
curprev 21:4721:47, 11 September 2019‎ Sawyer l talk contribs‎ 1,027 bytes +87‎ →‎Plasma Activation (EVG 810): added recipe list Tag: Visual edit

curprev 05:0005:00, 19 September 2018‎ John d talk contribs‎ 940 bytes +500‎ →‎UV Ozone Reactor: added some basic info Tag: Visual edit

curprev 22:2522:25, 28 August 2018‎ John d talk contribs‎ 440 bytes +296‎ →‎Ashers (Technics PEII): added SiN etch and chamber clean Tag: Visual edit

curprev 13:3213:32, 17 August 2012‎ Zwarburg talk contribs‎ 144 bytes +12‎ No edit summary

curprev 20:5520:55, 18 July 2012‎ Zwarburg talk contribs‎ 132 bytes +132‎ Created page with "{{recipes}} =Ashers (Technics PEII)= =Plasma Clean (Gasonics 2000)= =UV Ozone Reactor= =Plasma Activation (EVG 810)="

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