Stepper 1 (GCA6300) How to select proper chuck: Revision history

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20 June 2019

  • curprev 22:1322:13, 20 June 2019‎ Biljana talk contribs‎ 1,071 bytes +1,071‎ Created page with "{| class="wikitable" | colspan="3" |GCA 6300 CHUCKS |- |Chuck Name/Wafer Size |Substrate Thickness |Chuck Thickness |- | | | |- |1/4 of 2"(and smaller) |~717um (+/-100) |5.40..." Tag: Visual edit
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