Test Data of etching SiO2 with CHF3/CF4: Revision history

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curprev 20:1520:15, 11 January 2023‎ Noahdutra talk contribs‎ 7,016 bytes +228‎ No edit summary Tag: Visual edit

curprev 21:5021:50, 16 December 2022‎ Noahdutra talk contribs‎ 6,788 bytes +228‎ No edit summary Tag: Visual edit
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curprev 01:3001:30, 22 November 2022‎ Noahdutra talk contribs‎ 6,332 bytes +228‎ No edit summary Tag: Visual edit

curprev 01:1401:14, 15 November 2022‎ Noahdutra talk contribs‎ 6,104 bytes +230‎ No edit summary Tag: Visual edit

curprev 03:5303:53, 22 October 2022‎ Noahdutra talk contribs‎ 5,874 bytes +231‎ No edit summary Tag: Visual edit

curprev 20:2520:25, 14 October 2022‎ Noahdutra talk contribs‎ 5,643 bytes +94‎ No edit summary Tag: Visual edit

curprev 17:2817:28, 10 October 2022‎ Noahdutra talk contribs‎ 5,549 bytes +137‎ No edit summary Tag: Visual edit

curprev 18:3718:37, 7 October 2022‎ Noahdutra talk contribs‎ 5,412 bytes +95‎ No edit summary Tag: Visual edit

curprev 20:3320:33, 3 October 2022‎ Noahdutra talk contribs‎ 5,317 bytes +234‎ No edit summary Tag: Visual edit

curprev 20:4820:48, 30 September 2022‎ Noahdutra talk contribs‎ 5,083 bytes +95‎ No edit summary Tag: Visual edit

curprev 20:3620:36, 26 September 2022‎ Noahdutra talk contribs‎ 4,988 bytes +320‎ No edit summary Tag: Visual edit

curprev 15:2915:29, 13 September 2022‎ Noahdutra talk contribs‎ 4,668 bytes +286‎ No edit summary Tag: Visual edit

curprev 01:1601:16, 27 August 2022‎ Noahdutra talk contribs‎ 4,382 bytes +230‎ No edit summary Tag: Visual edit

curprev 00:1400:14, 20 August 2022‎ Noahdutra talk contribs‎ 4,152 bytes +9‎ No edit summary Tag: Visual edit
curprev 00:1000:10, 20 August 2022‎ Noahdutra talk contribs‎ 4,143 bytes +226‎ No edit summary Tag: Visual edit

curprev 00:5300:53, 2 August 2022‎ Noahdutra talk contribs‎ 3,917 bytes +9‎ No edit summary Tag: Visual edit

curprev 01:1901:19, 30 July 2022‎ Noahdutra talk contribs‎ 3,908 bytes +208‎ added etch data for 7/29 Tag: Visual edit

curprev 23:5023:50, 18 July 2022‎ Noahdutra talk contribs‎ 3,700 bytes +90‎ Added CS Tag: Visual edit
curprev 23:4823:48, 18 July 2022‎ Noahdutra talk contribs‎ 3,610 bytes +139‎ added 45d picture 7/15/22 Tag: Visual edit

curprev 22:4322:43, 20 May 2022‎ John d talk contribs‎ m 3,471 bytes +6‎ set header row Tag: Visual edit

curprev 17:3617:36, 11 May 2022‎ Pakala talk contribs‎ m 3,465 bytes +16‎ added selectivity to ICP2 cals Tag: Visual edit

curprev 15:5815:58, 10 May 2022‎ Pakala talk contribs‎ m 3,449 bytes 0‎ fixed typo on icp2 cals Tag: Visual edit

curprev 19:1719:17, 5 May 2022‎ John d talk contribs‎ 3,449 bytes +24‎ updated temperature reduction comment Tag: Visual edit
curprev 18:5318:53, 5 May 2022‎ Pakala talk contribs‎ 3,425 bytes +264‎ Added new entry to ICP2 cals -- after chuck temperature was lowered Tag: Visual edit

curprev 20:2720:27, 26 April 2022‎ Pakala talk contribs‎ m 3,161 bytes +215‎ added new entry to ICP2 cals Tag: Visual edit

curprev 18:0218:02, 21 April 2022‎ Pakala talk contribs‎ m 2,946 bytes +210‎ added new entry to ICP2 cals Tag: Visual edit

curprev 17:3217:32, 14 April 2022‎ Pakala talk contribs‎ m 2,736 bytes +216‎ added entry to ICP2 cals Tag: Visual edit

curprev 20:1620:16, 13 April 2022‎ Pakala talk contribs‎ m 2,520 bytes 0‎ made more recent cals on top of table for ICP2 Tag: Visual edit

curprev 17:1617:16, 30 March 2022‎ Pakala talk contribs‎ m 2,520 bytes +223‎ added entry to ICP2, added selectivity for recent cals Tag: Visual edit

curprev 17:4217:42, 9 March 2022‎ Pakala talk contribs‎ m 2,297 bytes +210‎ added entry to ICP2 historical data Tag: Visual edit

curprev 19:0919:09, 8 March 2022‎ Pakala talk contribs‎ m 2,087 bytes +212‎ added entry to ICP2 historical data Tag: Visual edit

curprev 20:2420:24, 11 February 2022‎ John d talk contribs‎ 1,875 bytes +31‎ minor update to diamond experiemnt comment. Tag: Visual edit

curprev 18:1318:13, 4 January 2022‎ John d talk contribs‎ 1,844 bytes +79‎ →‎Alternate Data (not updated since 2019) Tag: Visual edit
curprev 18:1218:12, 4 January 2022‎ John d talk contribs‎ 1,765 bytes +209‎ pasted link to alternate etch data Tag: Visual edit

curprev 01:4601:46, 11 August 2021‎ Ningcao talk contribs‎ 1,556 bytes +59‎ add a SEM pic Tag: Visual edit
curprev 01:4001:40, 11 August 2021‎ Ningcao talk contribs‎ 1,497 bytes +89‎ add a data poing Tag: Visual edit

curprev 02:3002:30, 10 August 2021‎ Ningcao talk contribs‎ 1,408 bytes +59‎ add a SEM Tag: Visual edit
curprev 02:2802:28, 10 August 2021‎ Ningcao talk contribs‎ 1,349 bytes +2‎ No edit summary Tag: Visual edit
curprev 02:1902:19, 10 August 2021‎ Ningcao talk contribs‎ 1,347 bytes +86‎ save a data point Tag: Visual edit

curprev 16:5016:50, 3 August 2021‎ John d talk contribs‎ 1,261 bytes +38‎ Comment on 7/22 check. Tag: Visual edit

curprev 01:2801:28, 23 July 2021‎ Ningcao talk contribs‎ 1,223 bytes +59‎ adding a SEM pic Tag: Visual edit
curprev 01:2101:21, 23 July 2021‎ Ningcao talk contribs‎ 1,164 bytes +37‎ adding a data point Tag: Visual edit

curprev 02:3002:30, 20 May 2021‎ Ningcao talk contribs‎ 1,127 bytes +17‎ add a data point Tag: Visual edit
curprev 02:0802:08, 20 May 2021‎ Ningcao talk contribs‎ 1,110 bytes +59‎ add a SEM Tag: Visual edit
curprev 02:0502:05, 20 May 2021‎ Ningcao talk contribs‎ 1,051 bytes +37‎ add a new data point Tag: Visual edit

curprev 02:4202:42, 9 January 2021‎ Ningcao talk contribs‎ 1,014 bytes +59‎ add a SEM pic Tag: Visual edit
curprev 00:4500:45, 9 January 2021‎ Ningcao talk contribs‎ 955 bytes +36‎ adding a data point Tag: Visual edit

curprev 00:2100:21, 11 August 2020‎ Ningcao talk contribs‎ 919 bytes +10‎ No edit summary Tag: Visual edit
curprev 00:2100:21, 11 August 2020‎ Ningcao talk contribs‎ 909 bytes +27‎ a comment added Tag: Visual edit

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