Test Data of etching SiO2 with CHF3/CF4-ICP1: Revision history

View logs for this page

Jump to navigation Jump to search

Diff selection: Mark the radio buttons of the revisions to compare and hit enter or the button at the bottom.
Legend: (cur) = difference with latest revision, (prev) = difference with preceding revision, m = minor edit.

curprev 16:5416:54, 12 January 2023‎ Noahdutra talk contribs‎ 6,982 bytes +230‎ No edit summary Tag: Visual edit

curprev 22:0222:02, 16 December 2022‎ Noahdutra talk contribs‎ 6,752 bytes +232‎ No edit summary Tag: Visual edit
curprev 21:5921:59, 16 December 2022‎ Noahdutra talk contribs‎ 6,520 bytes +265‎ No edit summary Tag: Visual edit

curprev 01:2301:23, 22 November 2022‎ Noahdutra talk contribs‎ 6,255 bytes +232‎ No edit summary Tag: Visual edit

curprev 01:0301:03, 15 November 2022‎ Noahdutra talk contribs‎ 6,023 bytes +233‎ No edit summary Tag: Visual edit

curprev 03:5103:51, 22 October 2022‎ Noahdutra talk contribs‎ 5,790 bytes +233‎ No edit summary Tag: Visual edit

curprev 20:2420:24, 14 October 2022‎ Noahdutra talk contribs‎ 5,557 bytes +94‎ No edit summary Tag: Visual edit

curprev 17:2617:26, 10 October 2022‎ Noahdutra talk contribs‎ 5,463 bytes +139‎ No edit summary Tag: Visual edit

curprev 23:2023:20, 7 October 2022‎ Noahdutra talk contribs‎ 5,324 bytes 0‎ No edit summary Tag: Visual edit
curprev 18:3618:36, 7 October 2022‎ Noahdutra talk contribs‎ 5,324 bytes +95‎ No edit summary Tag: Visual edit

curprev 20:3820:38, 3 October 2022‎ Noahdutra talk contribs‎ 5,229 bytes +69‎ No edit summary Tag: Visual edit
curprev 20:3120:31, 3 October 2022‎ Noahdutra talk contribs‎ 5,160 bytes +227‎ No edit summary Tag: Visual edit

curprev 20:4720:47, 30 September 2022‎ Noahdutra talk contribs‎ 4,933 bytes +95‎ No edit summary Tag: Visual edit

curprev 20:2720:27, 26 September 2022‎ Noahdutra talk contribs‎ 4,838 bytes +322‎ No edit summary Tag: Visual edit

curprev 15:2315:23, 13 September 2022‎ Noahdutra talk contribs‎ 4,516 bytes +244‎ No edit summary Tag: Visual edit

curprev 01:1201:12, 2 September 2022‎ Noahdutra talk contribs‎ 4,272 bytes +232‎ No edit summary Tag: Visual edit

curprev 01:5401:54, 23 August 2022‎ Noahdutra talk contribs‎ 4,040 bytes +285‎ No edit summary Tag: Visual edit

curprev 00:0700:07, 20 August 2022‎ Noahdutra talk contribs‎ 3,755 bytes +7‎ No edit summary Tag: Visual edit
curprev 00:0600:06, 20 August 2022‎ Noahdutra talk contribs‎ 3,748 bytes +9‎ No edit summary Tag: Visual edit
curprev 00:0400:04, 20 August 2022‎ Noahdutra talk contribs‎ 3,739 bytes +220‎ No edit summary Tag: Visual edit

curprev 01:1101:11, 30 July 2022‎ Noahdutra talk contribs‎ 3,519 bytes +208‎ added etch data for 7/27 Tag: Visual edit

curprev 17:2417:24, 11 May 2022‎ Pakala talk contribs‎ m 3,311 bytes +227‎ added entry in ICP1 cals, added selectivity Tag: Visual edit

curprev 20:2420:24, 26 April 2022‎ Pakala talk contribs‎ m 3,084 bytes +213‎ added entry to ICP1 cals Tag: Visual edit

curprev 17:5817:58, 21 April 2022‎ Pakala talk contribs‎ m 2,871 bytes +211‎ added entry to ICP1 cals Tag: Visual edit

curprev 17:2617:26, 14 April 2022‎ Pakala talk contribs‎ m 2,660 bytes +215‎ added entry in ICP1 cals Tag: Visual edit

curprev 20:1420:14, 13 April 2022‎ Pakala talk contribs‎ m 2,445 bytes +2‎ made more recent cals on top of table for iCP1 Tag: Visual edit

curprev 17:0917:09, 30 March 2022‎ Pakala talk contribs‎ m 2,443 bytes +12‎ added selectivity to recent ICP1 cals Tag: Visual edit
curprev 17:0317:03, 30 March 2022‎ Pakala talk contribs‎ m 2,431 bytes +212‎ added entry in ICP1 Tag: Visual edit

curprev 17:3917:39, 9 March 2022‎ Pakala talk contribs‎ m 2,219 bytes +212‎ added entry to ICP1 historical data Tag: Visual edit

curprev 19:0519:05, 8 March 2022‎ Pakala talk contribs‎ m 2,007 bytes +212‎ added entry to ICP1 historical data Tag: Visual edit

curprev 20:1920:19, 11 February 2022‎ John d talk contribs‎ 1,795 bytes +504‎ new section :pasted data from CHF3/CF4/O2 etch data

curprev 02:3902:39, 9 January 2021‎ Ningcao talk contribs‎ 1,291 bytes +59‎ add a SEM pic Tag: Visual edit
curprev 00:4400:44, 9 January 2021‎ Ningcao talk contribs‎ 1,232 bytes +36‎ add a data poing Tag: Visual edit

curprev 01:3601:36, 7 April 2020‎ Jcrode talk contribs‎ 1,079 bytes +2‎ Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/"

curprev 19:1819:18, 3 March 2020‎ Ningcao talk contribs‎ 1,077 bytes −1‎ No edit summary Tag: Visual edit
curprev 19:1719:17, 3 March 2020‎ Ningcao talk contribs‎ 1,078 bytes +59‎ add a SEM Tag: Visual edit
curprev 19:1519:15, 3 March 2020‎ Ningcao talk contribs‎ 1,019 bytes +37‎ adda data point Tag: Visual edit

curprev 23:1223:12, 28 February 2020‎ John d talk contribs‎ 982 bytes +130‎ added note about incorrect sidewall profile Tag: Visual edit: Switched
curprev 22:4222:42, 28 February 2020‎ Ningcao talk contribs‎ 852 bytes +62‎ add a pic Tag: Visual edit
curprev 22:4022:40, 28 February 2020‎ Ningcao talk contribs‎ 790 bytes +4‎ No edit summary Tag: Visual edit
curprev 22:3522:35, 28 February 2020‎ Ningcao talk contribs‎ 786 bytes +37‎ add a data point Tag: Visual edit

curprev 01:0001:00, 24 January 2020‎ John d talk contribs‎ 749 bytes +139‎ added row explaining chamber clean. Tag: Visual edit

curprev 22:3722:37, 23 January 2020‎ Ningcao talk contribs‎ 610 bytes +62‎ adding a pic Tag: Visual edit
curprev 22:3622:36, 23 January 2020‎ Ningcao talk contribs‎ 548 bytes +37‎ adding data Tag: Visual edit

curprev 22:5822:58, 17 January 2020‎ Ningcao talk contribs‎ 511 bytes +62‎ adding a pic Tag: Visual edit

Retrieved from "https://wiki.nanofab.ucsb.edu/wiki/Test_Data_of_etching_SiO2_with_CHF3/CF4-ICP1"