Vacuum Deposition Recipes

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• A = Material is available for use, but no recipes are provided.

Vacuum Deposition Recipes
	E-Beam Evaporation				Sputtering						Thermal Evaporation		Plasma Enhanced Chemical Vapor Deposition (PECVD)			Atomic Layer Deposition	Molecular Vapor Deposition
Material	E-Beam 1 (Sharon)	E-Beam 2 (Custom)	E-Beam 3 (Temescal)	E-Beam 4 (CHA)	Sputter 1 (Custom)	Sputter 2 (SFI Endeavor)	Sputter 3 (ATC 2000-F)	Sputter 4 (ATC 2200-V)	Sputter 5 (Lesker AXXIS)	Ion Beam Deposition (Tool)	Thermal Evap 1	Thermal Evap 2 (Solder)	PECVD 1 (PlasmaTherm 790)	PECVD 2 (Advanced Vacuum)	Unaxis VLR ICP-PECVD	Atomic Layer Deposition (Tool)	Molecular Vapor Deposition (Tool)
Ag	A		A	A			A	A
Al	A		A	A		R1	A	R			A	A
Al2O3	A	A								A						R1
AlN						R1				A						R1
Au	A		A	A		R1	A	R1			A	A
B
Co	A			A			A
Cr	A			A							A	A
Cu	A
Fe	A			A			A
Ge	A		A	A
GeO2		A
Gd	A			A
Hf	A
HfO2																R1
In												A
Ir	A
ITO		A								A
MgO		A
Mo	A
Nb	A							R
Ni	A		A	A			R1				A	A
NiCr	A			A
NiFe	A			A			A
Pd	A		A	A							A	A
Pt	A		A	A			A	R
Ru	A			A
Si		A												R1	R1
SiN							R1	A		R1			R1	R1	R1
SiO2	A	A					R1	A		R1			R1	R1	R1	R1
SiOxNy										R			R
Sn												A
SrF2		A
Ta	A						R1
Ta2O5				A						R1
Ti	A		A	A			A	R1
TiN						A		R		A
TiW	A							R1
TiO2		A				R1				R1						R1
V
W	A							R1
Zn											A	A
ZnO2
Zr	A			A
ZrO2																R1
Material	E-Beam 1 (Sharon)	E-Beam 2 (Custom)	E-Beam 3 (Temescal)	E-Beam 4 (CHA)	Sputter 1 (Custom)	Sputter 2 (SFI Endeavor)	Sputter 3 (ATC 2000-F)	Sputter 4 (ATC 2200-V)	Sputter 5 (Lesker AXXIS)	Ion Beam Deposition (Tool)	Thermal Evap 1	Thermal Evap 2 (Solder)	PECVD 1 (PlasmaTherm 790)	PECVD 2 (Advanced Vacuum)	Unaxis VLR ICP-PECVD	Atomic Layer Deposition (Tool)	Molecular Vapor Deposition (Tool)