Dry Etching Recipes: Difference between revisions

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! width="65" bgcolor="#D0E7FF" align="center" | '''Material'''
! width="65" bgcolor="#D0E7FF" align="center" | '''Material'''
| width="65" bgcolor="#DAF1FF" | [[RIE 1 (Retired)|RIE 1<br>(Custom)]]
| width="65" bgcolor="#DAF1FF" | [[RIE 1 (Custom)|RIE 1<br>(Retired)]]
| width="65" bgcolor="#DAF1FF" | [[RIE 2 (MRC)|RIE 2<br> (MRC)]]
| width="65" bgcolor="#DAF1FF" | [[RIE 2 (MRC)|RIE 2<br> (MRC)]]
| width="65" bgcolor="#DAF1FF" | [[RIE 3 (MRC)|RIE 3<br> (MRC)]]
| width="65" bgcolor="#DAF1FF" | [[RIE 3 (MRC)|RIE 3<br> (MRC)]]
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! bgcolor="#D0E7FF" align="center" | '''Material'''
! bgcolor="#D0E7FF" align="center" | '''Material'''
| bgcolor="#DAF1FF" | [[RIE 1 (Retired)|RIE 1<br>(Custom)]]
| bgcolor="#DAF1FF" | [[RIE 1 (Custom)|RIE 1<br>(Retired)]]
| bgcolor="#DAF1FF" | [[RIE 2 (MRC)|RIE 2<br> (MRC)]]
| bgcolor="#DAF1FF" | [[RIE 2 (MRC)|RIE 2<br> (MRC)]]
| bgcolor="#DAF1FF" | [[RIE 3 (MRC)|RIE 3<br> (MRC)]]
| bgcolor="#DAF1FF" | [[RIE 3 (MRC)|RIE 3<br> (MRC)]]

Revision as of 22:14, 16 December 2015