Template:News: Difference between revisions
m (minor comment update) |
(ALD metals) |
||
| Line 16: | Line 16: | ||
<!----------------------------------------------> |
<!----------------------------------------------> |
||
<!-------- NEWS ITEMS: newest on top --------> |
<!-------- NEWS ITEMS: newest on top --------> |
||
=== Metal Processes on the Atomic Layer Deposition === |
|||
We now have Ruthenium (Ru) and Platinum (Pt) metal depositions developed on the [[Atomic_Layer_Deposition_(Oxford_FlexAL)|Oxford FlexAL ALD]] tool. See the [[Atomic_Layer_Deposition_Recipes|Atomic Layer Deposition: Recipes]] page for more info, or contact [[Bill_Mitchell|Bill Mitchell]] for more information. |
|||
=== New Deep Silicon Etcher Online === |
=== New Deep Silicon Etcher Online === |
||
A new [[DSEIII_(PlasmaTherm/Deep_Silicon_Etcher)|Plasma-Therm Versaline DSE III DRIE etcher]] has been qualified for bosch etch and single-step etches, and is available for use. The new tool features much higher silicon etch rates, improved uniformity, and allows for photoresist up to the edges of the wafer. |
A new [[DSEIII_(PlasmaTherm/Deep_Silicon_Etcher)|Plasma-Therm Versaline DSE III DRIE etcher]] has been qualified for bosch etch and single-step etches, and is available for use. The new tool features much higher silicon etch rates, improved uniformity, and allows for photoresist up to the edges of the wafer. |
||
Revision as of 17:43, 14 December 2017
News from the U.C. Santa Barbara Nanofabrication Facility.
Metal Processes on the Atomic Layer Deposition
We now have Ruthenium (Ru) and Platinum (Pt) metal depositions developed on the Oxford FlexAL ALD tool. See the Atomic Layer Deposition: Recipes page for more info, or contact Bill Mitchell for more information.
New Deep Silicon Etcher Online
A new Plasma-Therm Versaline DSE III DRIE etcher has been qualified for bosch etch and single-step etches, and is available for use. The new tool features much higher silicon etch rates, improved uniformity, and allows for photoresist up to the edges of the wafer.
-- 22:16, 27 November 2017 (PST)
2016 Survey Results
See the May 2016 User Survey Results.
-- 12:00, 01 May 2016 (PST)
CAIBE Ion Mill Available
The CAIBE (Oxford Ion Mill) is up and running! Contact Brian Lingg for more information.
-- 12:00, 01 July 2015 (PST)
NanoFiles SFTP Online
Files generated with Nanofab tools (SEM images, AFM profiles, etc.) are now available on the nanofab SFTP server. Please check SignupMonkey for details.
-- 12:00, 07 July 2013 (PST)