Template:Announcements: Difference between revisions
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===== New Tool Installations ===== |
===== New Tool Installations ===== |
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See the [https://wiki.nanotech.ucsb.edu/w/index.php/Main_Page#mp-trivia-h2 News Feed] for info on two upcoming tool installations! |
See the [https://wiki.nanotech.ucsb.edu/w/index.php/Main_Page#mp-trivia-h2 News Feed] for info on two upcoming tool installations! The [https://www.raith.com/products/velion.html?mobile=0 Raith Velion FIB] is up and running, we are eagerly awaiting Dr. Dan Read's arrival to bring this tool to life. See the [[Focused_Ion-Beam_Lithography_(Raith_Velion)|Velion's Tool page here]]. |
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The [https://heidelberg-instruments.com/en/products/mla150.html Heidelberg MLA150 Maskless Aligner] has been installed, and is in the process of being qualified/characterized. See the [[Maskless_Aligner_(Heidelberg_MLA150)|MLA150's tool page here]]. |
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// [[User:John d|John d]] 17:48, 2 June 2020 (PDT) |
// [[User:John d|John d]] 17:48, 2 June 2020 (PDT) |
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Revision as of 06:14, 28 September 2020
Equipment Status
NanoFab COVID Response
Following guidelines provided by our Office of Research, the UCSB Nanofabrication Facility is open only for limited/authorized use for critical activity at this time.
Contact the Lab Director for more information.
The most recent COVID Protocols can be found at COVID-19_User_Policies.
// John d 15:00, 19 July 2020 (PDT)
New Tool Installations
See the News Feed for info on two upcoming tool installations! The Raith Velion FIB is up and running, we are eagerly awaiting Dr. Dan Read's arrival to bring this tool to life. See the Velion's Tool page here.
The Heidelberg MLA150 Maskless Aligner has been installed, and is in the process of being qualified/characterized. See the MLA150's tool page here.
// John d 17:48, 2 June 2020 (PDT)
Unaxis ICP-PECVD
The ICP-PECVD module is available upon request. Contact Tony Bosch if interested. System is using deuterated Silane for low loss optical films use only.
// Thibeault 14:22, 26 March 2020 (PDT)