PECVD1 Wafer Coating Process: Difference between revisions

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There are two standard recipes for SiN and SiO2 deposition at 250C in PECVD#1. Instructions bellow explain how to run process (seasoning, deposition, cleaning).
=== PECVD#1 deposition - 300nm SiN film @250°C ===
The wafers are ordered from SVM. These are low particle count 4" Si wafer where particle count is very low <100.


=== Standard Si3N4 (Silicon-Nitride) Deposition ===
⚫
a)Log in to PECVD #1 (Staff account)


==== SiN Deposition ====
b)Edit standard recipes (for seasoning, deposition, and cleaning). You can '''ONLY''' change the time in recipes.
⚫
# Log in to PECVD #1
* •Seasoning recipe name:
# Seasoning
* •Deposition recipe name:
⚫
#* Load the seasoning recipe (SiN seasoning), and run it. The goal of this step is to coat chamber walls and prepare it for deposition.
* •Cleaning recipe name:
# Deposition
⚫
c)Load the recipe for seasoning, and run it. The goal of this step is to coat chamber walls and prepare it for deposition.
⚫
#* Vent the chamber and load the substrate (place it in the center of platen). You can place small pieces around the wafer to protect it from moving.
#* Pump down.
#* Load the deposition recipe (SiN@250C), and run it. Deposition time is variable. Get the rate from [https://wiki.nanotech.ucsb.edu/wiki/PECVD_Recipes#PECVD_1_.28PlasmaTherm_790.29 historical data].
#* Unload the wafer.
# Cleaning
⚫
#* Wipe sidewall first with DI water, followed by IPA.
⚫
#* Load the cleaning recipe (CH4/O2 clean). Edit the recipe and enter required time for cleaning.
#* Log out


=== Standard Oxide, SiO2 (Silicon Dioxide) Deposition ===
⚫
d)Vent the chamber and load 4"Si wafer (place in in the center of platen). You can place small pieces around, to protect wafer from moving


==== SiO2 Deposition ====
e)Pump down and load the recipe for deposition.
#Log in to PECVD #1

# Seasoning
f) Edit the recipe for deposition, change the time ONLY.
#* Load the seasoning recipe( SiO2 seasoning), and run it. The goal of this step is to coat chamber walls and prepare it for deposition.

# Deposition
g) Run deposition
#* Vent the chamber and load the substarte (place it in the center of platen). You can place small pieces around the wafer to protect it from moving.

#* Pump down.
h) Wait for deposition to be finished. Unload the wafer
#* Load the deposition recipe( SiO2@250C), and run it. Deposition time is variable. Get the rate from [[PECVD Recipes#PECVD 1 .28PlasmaTherm 790.29|historical data]].

#* Unload the wafer.
⚫
i) Wipe sidewall first with water then with IPA.
# Cleaning

#* Wipe sidewall first with DI water, followed by IPA.
⚫
j) Load recipe for cleaning. Edit the recipe and enter required time for cleaning.
#* Load for cleaning recipe (CF4/O2). Edit the recipe and enter required time for cleaning.
#* Log out

Latest revision as of 20:16, 10 December 2020

There are two standard recipes for SiN and SiO2 deposition at 250C in PECVD#1. Instructions bellow explain how to run process (seasoning, deposition, cleaning).

Standard Si3N4 (Silicon-Nitride) Deposition

SiN Deposition

  1. Log in to PECVD #1
  2. Seasoning
    • Load the seasoning recipe (SiN seasoning), and run it. The goal of this step is to coat chamber walls and prepare it for deposition.
  3. Deposition
    • Vent the chamber and load the substrate (place it in the center of platen). You can place small pieces around the wafer to protect it from moving.
    • Pump down.
    • Load the deposition recipe (SiN@250C), and run it. Deposition time is variable. Get the rate from historical data.
    • Unload the wafer.
  4. Cleaning
    • Wipe sidewall first with DI water, followed by IPA.
    • Load the cleaning recipe (CH4/O2 clean). Edit the recipe and enter required time for cleaning.
    • Log out

Standard Oxide, SiO2 (Silicon Dioxide) Deposition

SiO2 Deposition

  1. Log in to PECVD #1
  2. Seasoning
    • Load the seasoning recipe( SiO2 seasoning), and run it. The goal of this step is to coat chamber walls and prepare it for deposition.
  3. Deposition
    • Vent the chamber and load the substarte (place it in the center of platen). You can place small pieces around the wafer to protect it from moving.
    • Pump down.
    • Load the deposition recipe( SiO2@250C), and run it. Deposition time is variable. Get the rate from historical data.
    • Unload the wafer.
  4. Cleaning
    • Wipe sidewall first with DI water, followed by IPA.
    • Load for cleaning recipe (CF4/O2). Edit the recipe and enter required time for cleaning.
    • Log out
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