PECVD1 Wafer Coating Process: Difference between revisions

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There are two standard recipes for SiN and SiO2 deposition at 250C in PECVD#1. Instructions bellow explain how to run process (seasoning, deposition, cleaning).
The wafers used for process calibration are ordered from SVM. These are low particle count 4" Si wafers (particle count<100). The wafers are scanned before and after deposition. They are not re-used. Handling the wafers is important and each step could contribute in adding new particles.


=== Standard Si3N4 (Silicon-Nitride) Deposition ===
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=== SiN @250C ===
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# Log in to PECVD #1 (Staff account).
# Edit standard recipes (for seasoning, deposition, and cleaning). You can ONLY change the time in recipes.
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#* Seasoning recipe name
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#* Deposition recipe name
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#* Cleaning recipe name:
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# Load the seasoning recipe, and run it. The goal of this step is to coat chamber walls and prepare it for deposition.
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# Vent the chamber and load a 4"Si wafer (place it in the center of platen). You can place small pieces around the wafer to protect it from moving.
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# Pump down.
# Load the deposition recipe, and run it.
# Wait for deposition to be finished. Unload the wafer.
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# Wipe sidewall first with DI water, followed by IPA.
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# Load recipe for cleaning. Edit the recipe and enter required time for cleaning.
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a) Log in to PECVD #1 (Staff account)


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==== SiN Deposition ====
b) Edit standard recipes (for seasoning, deposition, and cleaning). You can ONLY change the time in recipes.
⚫
# Log in to PECVD #1
⚫
* Seasoning recipe name:
⚫
# Seasoning
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* Deposition recipe name:
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#* Load the seasoning recipe (SiN seasoning), and run it. The goal of this step is to coat chamber walls and prepare it for deposition.
* Cleaning recipe name:
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# Deposition
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c) Load the recipe for seasoning, and run it. The goal of this step is to coat chamber walls and prepare it for deposition.
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#* Vent the chamber and load the substrate (place it in the center of platen). You can place small pieces around the wafer to protect it from moving.
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#* Pump down.
#* Load the deposition recipe (SiN@250C), and run it. Deposition time is variable. Get the rate from [https://wiki.nanotech.ucsb.edu/wiki/PECVD_Recipes#PECVD_1_.28PlasmaTherm_790.29 historical data].
#* Unload the wafer.
⚫
# Cleaning
#* Wipe sidewall first with DI water, followed by IPA.
#* Load the cleaning recipe (CH4/O2 clean). Edit the recipe and enter required time for cleaning.
#* Log out


=== Standard Oxide, SiO2 (Silicon Dioxide) Deposition ===
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d) Vent the chamber and load 4"Si wafer (place in in the center of platen). You can place small pieces around, to protect wafer from moving


==== SiO2 Deposition ====
e) Pump down and load the recipe for deposition.
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#Log in to PECVD #1

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# Seasoning
f) Edit the recipe for deposition, change the time ONLY.
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#* Load the seasoning recipe( SiO2 seasoning), and run it. The goal of this step is to coat chamber walls and prepare it for deposition.

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# Deposition
g) Run deposition
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#* Vent the chamber and load the substarte (place it in the center of platen). You can place small pieces around the wafer to protect it from moving.

#* Pump down.
h) Wait for deposition to be finished. Unload the wafer
#* Load the deposition recipe( SiO2@250C), and run it. Deposition time is variable. Get the rate from [[PECVD Recipes#PECVD 1 .28PlasmaTherm 790.29|historical data]].

#* Unload the wafer.
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i) Wipe sidewall first with water then with IPA.
# Cleaning

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#* Wipe sidewall first with DI water, followed by IPA.
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j) Load recipe for cleaning. Edit the recipe and enter required time for cleaning.
⚫
#* Load for cleaning recipe (CF4/O2). Edit the recipe and enter required time for cleaning.
#* Log out

Latest revision as of 20:16, 10 December 2020

There are two standard recipes for SiN and SiO2 deposition at 250C in PECVD#1. Instructions bellow explain how to run process (seasoning, deposition, cleaning).

Standard Si3N4 (Silicon-Nitride) Deposition

SiN Deposition

  1. Log in to PECVD #1
  2. Seasoning
    • Load the seasoning recipe (SiN seasoning), and run it. The goal of this step is to coat chamber walls and prepare it for deposition.
  3. Deposition
    • Vent the chamber and load the substrate (place it in the center of platen). You can place small pieces around the wafer to protect it from moving.
    • Pump down.
    • Load the deposition recipe (SiN@250C), and run it. Deposition time is variable. Get the rate from historical data.
    • Unload the wafer.
  4. Cleaning
    • Wipe sidewall first with DI water, followed by IPA.
    • Load the cleaning recipe (CH4/O2 clean). Edit the recipe and enter required time for cleaning.
    • Log out

Standard Oxide, SiO2 (Silicon Dioxide) Deposition

SiO2 Deposition

  1. Log in to PECVD #1
  2. Seasoning
    • Load the seasoning recipe( SiO2 seasoning), and run it. The goal of this step is to coat chamber walls and prepare it for deposition.
  3. Deposition
    • Vent the chamber and load the substarte (place it in the center of platen). You can place small pieces around the wafer to protect it from moving.
    • Pump down.
    • Load the deposition recipe( SiO2@250C), and run it. Deposition time is variable. Get the rate from historical data.
    • Unload the wafer.
  4. Cleaning
    • Wipe sidewall first with DI water, followed by IPA.
    • Load for cleaning recipe (CF4/O2). Edit the recipe and enter required time for cleaning.
    • Log out
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