Don Freeborn: Difference between revisions
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*[[PECVD 1 (PlasmaTherm 790)]] |
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* |
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*[[PECVD 2 (Advanced Vacuum)]] |
*[[PECVD 2 (Advanced Vacuum)]] |
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*[[Wafer Bonder (SUSS SB6-8E)]] |
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*[[E-Beam 3 (Temescal)]] |
*[[E-Beam 3 (Temescal)]] |
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*[[E-Beam 4 (CHA)]] |
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*[[Surface Analysis (KLA/Tencor Surfscan)]] |
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*[[Thermal Evap 1]] |
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*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)|Plasma-Therm SLR: Fluorine ICP]] |
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*[[ |
*[[Thermal Evap 2 (Solder)]] |
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*[[XeF2 Etch (Xetch)|XeF<sub>2</sub> Etch (Xetch)]] |
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*[[Spin Rinse Dryer (SemiTool)]] |
*[[Spin Rinse Dryer (SemiTool)]] |
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*[[Vacuum Sealer]] |
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*[[Chemical-Mechanical Polisher (Logitech)]] |
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*[[SEM Sample Coater (Hummer)]] |
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Latest revision as of 16:48, 28 October 2021
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About
.
Current Work
.
Tools
Don Freeborn is in charge of the following tools: