Difference between revisions of "Vacuum Deposition Recipes"
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+ | ===[[Process Group - Process Control Data#Deposition .28Process Control Data.29|<u>Process Control Data</u>]]=== |
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− | This table can be used to help located the needed recipe. |
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+ | <small>''See [[Process Group - Process Control Data#Deposition .28Process Control Data.29|linked page]] for process control data (calibration data over time, such as dep. rate, refractive index, stress etc.) over time, for a selection of highly used tools/films.''</small> |
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+ | ===Deposition Tools/Materials Table=== |
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− | = Table (This heading is temporary) = |
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+ | *<small>'''R''': ''Recipe is available. Clicking this link will take you to the recipe.''</small> |
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− | {| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" class="collapsible wikitable" |
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+ | *<small>'''A''': ''Material is available for use, but no recipes are provided.''</small> |
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− | |- bgcolor="#D0E7FF" |
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+ | |||
− | ! width="1675" height="45" colspan="18" | <div style="font-size: 150%;">Vacuum Deposition Recipes</div> |
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− | | <!-- INTENTIONALLY LEFT BLANK --> <br> |
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+ | ! colspan="16" width="1675" height="45" |<div style="font-size: 150%;">Vacuum Deposition Recipes</div> |
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− | ! bgcolor="#D0E7FF" align="center" colspan="4" | '''[[E-Beam Evaporation Recipes|E-Beam Evaporation]]''' |
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+ | |- bgcolor="#d0e7ff" |
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− | ! bgcolor="#D0E7FF" align="center" colspan="5" | '''[[Sputtering Recipes|Sputtering]]''' |
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+ | |<!-- INTENTIONALLY LEFT BLANK --><br> |
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− | ! bgcolor="#D0E7FF" align="center" colspan="2" | '''[[Thermal Evaporation Recipes|Thermal Evaporation]]''' |
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+ | ! colspan="4" bgcolor="#d0e7ff" align="center" |'''[[E-Beam Evaporation Recipes|E-Beam Evaporation]]''' |
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+ | ! colspan="4" |'''[[Sputtering Recipes|Sputtering]]''' |
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+ | ! colspan="2" bgcolor="#d0e7ff" align="center" |'''[[Thermal Evaporation Recipes|Thermal Evaporation]]''' |
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+ | ! colspan="3" bgcolor="#d0e7ff" align="center" |'''[[PECVD Recipes|Plasma Enhanced Chemical<br>Vapor Deposition (PECVD)]]''' |
+ | ! width="90" bgcolor="#d0e7ff" align="center" |'''[[Atomic Layer Deposition Recipes|Atomic Layer Deposition]]''' |
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+ | ! width="80" bgcolor="#d0e7ff" align="center" |'''[[Molecular Vapor Deposition Recipes|Molecular Vapor Deposition]]''' |
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+ | ! width="20" bgcolor="#d0e7ff" align="center" |'''Material''' |
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+ | | width="65" bgcolor="#daf1ff" |[[E-Beam Evaporation Recipes#E-Beam_1_.28Sharon.29|E-Beam 1 (Sharon)]] |
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+ | | width="65" bgcolor="#daf1ff" |[[E-Beam Evaporation Recipes#E-Beam_2_.28Custom.29|E-Beam 2 (Custom)]] |
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+ | | width="65" bgcolor="#daf1ff" |[[E-Beam Evaporation Recipes#E-Beam_3_.28Temescal.29|E-Beam 3 (Temescal)]] |
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+ | | width="65" bgcolor="#daf1ff" |[[E-Beam Evaporation Recipes#E-Beam_4_.28CHA.29|E-Beam 4 (CHA)]] |
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+ | | width="65" bgcolor="#daf1ff" |[[Sputtering_Recipes#Sputter_3_.28AJA_ATC_2000-F.29|Sputter 3<br>(AJA ATC 2000-F)]] |
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+ | | width="65" bgcolor="#daf1ff" |[[Sputtering_Recipes#Sputter_4_.28AJA_ATC_2200-V.29|Sputter 4<br>(AJA ATC 2200-V)]] |
+ | | width="65" bgcolor="#daf1ff" |[https://wiki.nanotech.ucsb.edu/w/index.php?title=Sputtering_Recipes#Sputter_5_.28AJA_ATC_2200-V.29 Sputter 5 (AJA ATC 2200-V)] |
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− | | width="75" | [[Sputter 3 (ATC 2000-F)|Sputter 3<br>(ATC 2000-F)]] |
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+ | | width="55" bgcolor="#daf1ff" |[[Sputtering_Recipes#Ion_Beam_Deposition_.28Veeco_NEXUS.29|Ion Beam<br>Deposition (Veeco Nexus)]] |
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− | | width="75" | [[Sputter 4 (ATC 2200-V)|Sputter 4<br>(ATC 2200-V)]] |
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+ | | width="45" bgcolor="#daf1ff" |[[Thermal Evaporation Recipes#Thermal_Evap_1|Thermal<br>Evap 1]] |
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− | | width="85" | [[Sputter 5 (Lesker AXXIS)]] |
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+ | | width="65" bgcolor="#daf1ff" |[[Thermal Evaporation Recipes#Thermal_Evap_2_.28Solder.29|Thermal Evap 2 (Solder)]] |
+ | | width="65" bgcolor="#daf1ff" |[[PECVD Recipes#PECVD_1_.28PlasmaTherm_790.29|PECVD 1<br>(PlasmaTherm 790)]] |
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− | | width="65" | [[Thermal Evap 2 (Solder)]] |
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+ | | width="65" bgcolor="#daf1ff" |[[PECVD Recipes#PECVD_2_.28Advanced_Vacuum.29|PECVD 2<br>(Advanced Vacuum)]] |
+ | | width="65" bgcolor="#daf1ff" |[[PECVD_Recipes#ICP-PECVD_.28Unaxis_VLR.29|Unaxis VLR ICP-PECVD]] |
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− | | width="115" | [[PECVD 2 (Advanced Vacuum)|PECVD 2<br>(Advanced Vacuum)]] |
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+ | | width="65" bgcolor="#daf1ff" |[[Atomic_Layer_Deposition_Recipes|Atomic Layer Deposition (Oxford FlexAL)]] |
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− | | width="75" | [[Unaxis VLR ICP-PECVD]] |
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+ | | width="65" bgcolor="#daf1ff" |[[Molecular Vapor Deposition|Molecular Vapor Deposition (Tool)]] |
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+ | |[[Sputtering Recipes|A]] |
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+ | |<br> |
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+ | |<br> |
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+ | |{{rl|Atomic Layer Deposition Recipes|HfO2 deposition (ALD CHAMBER 3)}} |
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+ | | bgcolor="#eeffff" |[[Thermal Evaporation Recipes|A]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |{{rl|E-Beam Evaporation Recipes|E-Beam 2 (Custom)|ITO deposition (E-Beam 2)}} |
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+ | | bgcolor="#eeffff" |[[Sputtering_Recipes#Ion_Beam_Deposition_.28Veeco_NEXUS.29|A]] |
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+ | | bgcolor="#eeffff" |{{Al/E1}} |
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+ | | bgcolor="#eeffff" |<br> |
− | | bgcolor=" |
+ | | bgcolor="#eeffff" |<br> |
− | | bgcolor=" |
+ | | bgcolor="#eeffff" |<br> |
− | | bgcolor=" |
+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R]] |
− | | bgcolor=" |
+ | | bgcolor="#eeffff" |[[Sputtering Recipes|A]] |
− | | bgcolor=" |
+ | | bgcolor="#eeffff" |<br> |
− | | bgcolor=" |
+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | ! bgcolor="#d0e7ff" align="center" |Nb |
+ | |{{Al/E1}} |
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+ | |[[Sputtering Recipes|R]] |
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− | | [[Vacuum Deposition Recipes#SiN_deposition_.28PECVD_.231.29|Y]] |
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+ | |<br> |
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− | | [[Vacuum Deposition Recipes#SiN deposition (PECVD #2)|Y]] |
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+ | | |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |[[Sputtering Recipes|A]] |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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− | | bgcolor="EEFFFF" | [[Vacuum Deposition Recipes#SiO2 deposition (PECVD #1)|Y]] |
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+ | |<br> |
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− | | bgcolor="EEFFFF" | [[Vacuum Deposition Recipes#SiO2 deposition (PECVD #2)|Y]] |
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+ | |<br> |
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|- |
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+ | | bgcolor="#eeffff" |{{Al/E1}} |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |{{Al/E3}} |
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+ | | bgcolor="#eeffff" |{{Al/E4}} |
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+ | | bgcolor="#eeffff" |{{rl|Sputtering Recipes|Sputter 3 (AJA ATC 2000-F)}} |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[Thermal Evaporation Recipes|A]] |
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+ | | bgcolor="#eeffff" |[[Thermal Evaporation Recipes|A]] |
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+ | ! bgcolor="#d0e7ff" align="center" |NiCr |
+ | |{{Al/E1}} |
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|- |
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+ | | bgcolor="#eeffff" |{{Al/E1}} |
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+ | | bgcolor="#eeffff" |{{Al/E4}} |
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+ | ! bgcolor="#d0e7ff" align="center" |Pd |
+ | |{{Al/E1}} |
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+ | |<br> |
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+ | |{{Al/E3}} |
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+ | |{{Al/E4}} |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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− | | bgcolor="EEFFFF" | |
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+ | |<br> |
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− | | bgcolor="EEFFFF" | |
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+ | |[[Thermal Evaporation Recipes|A]] |
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− | | bgcolor="EEFFFF" | |
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+ | |[[Thermal Evaporation Recipes|A]] |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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− | | bgcolor="EEFFFF" | |
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|- |
|- |
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− | ! |
+ | ! bgcolor="#d0e7ff" align="center" |Pt |
+ | | bgcolor="#eeffff" |{{Al/E1}} |
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− | | |
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+ | | bgcolor="#eeffff" |<br> |
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− | | |
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+ | | bgcolor="#eeffff" |{{Al/E3}} |
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+ | | bgcolor="#eeffff" |{{Al/E4}} |
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− | | |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|A]] |
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+ | | bgcolor="#eeffff" |{{rl|Sputtering Recipes|Sputter 4 (AJA ATC 2200-V)}} |
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+ | | bcolor="EEFFFF" |{{rl|Sputtering Recipes|Sputter 5 (AJA ATC 2200-V)}} |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |{{rl|Atomic Layer Deposition Recipes|Pt deposition (ALD CHAMBER 1)}} |
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+ | | bgcolor="#eeffff" |<br> |
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+ | ! bgcolor="#d0e7ff" align="center" |Ru |
+ | |{{Al/E1}} |
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+ | |<br> |
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− | | bgcolor="EEFFFF" | |
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+ | |<br> |
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+ | |{{Al/E4}} |
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− | | bgcolor="EEFFFF" | |
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+ | |<br> |
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− | | bgcolor="EEFFFF" | |
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+ | |[[Sputtering Recipes#Ru Deposition .28Sputter 4.29|R]] |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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− | | bgcolor="EEFFFF" | |
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+ | |<br> |
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− | | bgcolor="EEFFFF" | |
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+ | |{{rl|Atomic Layer Deposition Recipes|Ru deposition (ALD CHAMBER 1)}} |
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− | | bgcolor="EEFFFF" | |
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+ | |<br> |
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− | | bgcolor="EEFFFF" | |
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− | | bgcolor="EEFFFF" | |
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− | | bgcolor="EEFFFF" | |
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|- |
|- |
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− | ! |
+ | ! bgcolor="#d0e7ff" align="center" |Si |
+ | | bgcolor="#eeffff" |<br> |
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− | | |
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+ | | bgcolor="#eeffff" |{{Al/E2}} |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R]] |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|A]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br>[[Sputtering_Recipes#Ion_Beam_Deposition_.28Veeco_NEXUS.29|A]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[https://wiki.nanotech.ucsb.edu/w/index.php?title=PECVD_Recipes#Amorphous-Si_deposition_.28PECVD_.232.29 R] |
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+ | |{{rl|PECVD Recipes|SiN deposition (PECVD #2)}} |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|A]] |
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+ | | bgcolor="#eeffff" |{{rl|PECVD Recipes|SiO2 deposition (PECVD #2)}} |
+ | | bgcolor="#eeffff" |{{rl|PECVD Recipes|SiO2 LDR 250C Deposition (Unaxis VLR)}} |
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+ | | bgcolor="#eeffff" |{{rl|Atomic Layer Deposition Recipes|SiO2 deposition (ALD CHAMBER 3)}} |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|A]] |
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+ | | bgcolor="#eeffff" |<br> |
+ | | bgcolor="#eeffff" |<br>[[Sputtering_Recipes#Ion_Beam_Deposition_.28Veeco_NEXUS.29|A]] |
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+ | ! bgcolor="#d0e7ff" align="center" |Ta<sub>2</sub>O<sub>5</sub> |
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− | | width="65" | [[E-Beam 1 (Sharon)]] |
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+ | |[[Sputtering_Recipes#Ta2O5_deposition_.28IBD.29|R]] |
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− | | width="115" | [[PECVD 2 (Advanced Vacuum)|PECVD 2<br>(Advanced Vacuum)]] |
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+ | |<br> |
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− | | width="75" | [[Unaxis VLR ICP-PECVD]] |
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+ | |<br> |
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− | | [[Atomic Layer Deposision (Oxford FlexAL)|Atomic Layer Deposision]] |
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− | | [[Ion Beam Deposition (Veeco NEXUS)|Ion Beam Deposition]] |
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− | | [[Molecular Vapor Deposition]] |
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+ | ! bgcolor="#d0e7ff" align="center" |Ti |
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+ | | bgcolor="#eeffff" |{{Al/E4}} |
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+ | | bgcolor="#eeffff" |{{rl|Sputtering Recipes|Sputter 3 (AJA ATC 2000-F)}} |
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+ | | bgcolor="#eeffff" |{{rl|Sputtering Recipes|Ti-Au Deposition (Sputter 4)}} |
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+ | | bgcolor="#eeffff" |{{rl|Sputtering Recipes|Sputter 5 (AJA ATC 2200-V)}} |
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+ | | bgcolor="#eeffff" |<br>[[Sputtering_Recipes#Ion_Beam_Deposition_.28Veeco_NEXUS.29|A]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | |- |
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+ | ! bgcolor="#d0e7ff" align="center" |TiN |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |[https://wiki.nanotech.ucsb.edu/w/index.php?title=Sputtering_Recipes#Sputter_4_.28AJA_ATC_2200-V.29 R] |
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+ | |<br> |
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+ | |[[Sputtering_Recipes#Ion_Beam_Deposition_.28Veeco_NEXUS.29|A]] |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |{{rl|Atomic Layer Deposition Recipes|TiN deposition (ALD CHAMBER 3)}} |
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+ | |<br> |
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+ | |- |
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+ | ! bgcolor="#d0e7ff" align="center" |TiW |
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+ | | bgcolor="#eeffff" |{{Al/E1}} |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|A]] |
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+ | | bgcolor="#eeffff" |{{rl|Sputtering Recipes|W-TiW Deposition (Sputter 4)}} |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | |- |
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+ | ! bgcolor="#d0e7ff" align="center" |TiO<sub>2</sub> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|A]] |
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+ | | bgcolor="#eeffff" |{{rl|Sputtering Recipes|Sputter 4 (AJA ATC 2200-V)}} |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[Sputtering_Recipes#TiO2_deposition_.28IBD.29|R]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |{{rl|Atomic Layer Deposition Recipes|TiO2 deposition (ALD CHAMBER 3)}} |
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+ | | bgcolor="#eeffff" |<br> |
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+ | ! bgcolor="#d0e7ff" align="center" |V |
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+ | |<br> |
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+ | |[[Sputtering Recipes|A]] |
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+ | |[[Sputtering Recipes|A]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|A]] |
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+ | | bgcolor="#eeffff" |{{rl|Sputtering Recipes|W deposition (Sputter 4)}} |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |[[Thermal Evaporation Recipes|A]] |
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+ | |[[Thermal Evaporation Recipes|A]] |
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+ | |<br> |
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+ | |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |{{rl|Atomic Layer Deposition Recipes|ZnO:Al deposition (ALD CHAMBER 1)}} |
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+ | | bgcolor="#eeffff" |<br> |
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+ | |- |
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+ | ! bgcolor="#d0e7ff" align="center" |Zr |
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+ | |{{Al/E1}} |
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+ | |<br> |
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+ | |<br> |
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+ | |{{Al/E4}} |
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+ | |[[Sputtering Recipes|A]] |
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+ | |[[Sputtering Recipes|A]] |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |- |
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+ | ! bgcolor="#d0e7ff" align="center" |ZrO<sub>2</sub> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |{{rl|Atomic Layer Deposition Recipes|ZrO2 deposition (ALD CHAMBER 3)}} |
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+ | | bgcolor="#eeffff" |<br> |
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+ | |- |
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+ | ! width="20" bgcolor="#d0e7ff" align="center" |'''Material''' |
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+ | | width="65" bgcolor="#daf1ff" |[[E-Beam Evaporation Recipes#E-Beam_1_.28Sharon.29|E-Beam 1 (Sharon)]] |
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+ | | width="65" bgcolor="#daf1ff" |[[E-Beam Evaporation Recipes#E-Beam_2_.28Custom.29|E-Beam 2 (Custom)]] |
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+ | | width="65" bgcolor="#daf1ff" |[[E-Beam Evaporation Recipes#E-Beam_3_.28Temescal.29|E-Beam 3 (Temescal)]] |
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+ | | width="65" bgcolor="#daf1ff" |[[E-Beam Evaporation Recipes#E-Beam_4_.28CHA.29|E-Beam 4 (CHA)]] |
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+ | | width="65" bgcolor="#daf1ff" |[[Sputtering Recipes#Sputter_3_.28ATC_2000-F.29|Sputter 3<br>(ATC 2000-F)]] |
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+ | | width="65" bgcolor="#daf1ff" |[[Sputtering_Recipes#Sputter_4_.28AJA_ATC_2200-V.29|Sputter 4<br>(ATC 2200-V)]] |
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+ | | width="65" bgcolor="#daf1ff" |[[Sputtering Recipes|Sputter 5 (ATC 2200-V)]] |
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+ | | width="55" bgcolor="#daf1ff" |[[Sputtering_Recipes#Ion_Beam_Deposition_.28Veeco_NEXUS.29|Ion Beam<br>Deposition (Veeco Nexus)]] |
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+ | | width="45" bgcolor="#daf1ff" |[[Thermal Evaporation Recipes#Thermal_Evap_1|Thermal<br>Evap 1]] |
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+ | | width="65" bgcolor="#daf1ff" |[[Thermal Evaporation Recipes#Thermal_Evap_2_.28Solder.29|Thermal Evap 2 (Solder)]] |
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+ | | width="65" bgcolor="#daf1ff" |[[PECVD Recipes#PECVD_1_.28PlasmaTherm_790.29|PECVD 1<br>(PlasmaTherm 790)]] |
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+ | | width="65" bgcolor="#daf1ff" |[[PECVD Recipes#PECVD_2_.28Advanced_Vacuum.29|PECVD 2<br>(Advanced Vacuum)]] |
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+ | | width="65" bgcolor="#daf1ff" |[[PECVD_Recipes#ICP-PECVD_.28Unaxis_VLR.29|Unaxis VLR ICP-PECVD]] |
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+ | | width="65" bgcolor="#daf1ff" |[[Atomic_Layer_Deposition_Recipes|Atomic Layer Deposition (Oxford FlexAl)]] |
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+ | | width="65" bgcolor="#daf1ff" |[[Molecular Vapor Deposition|Molecular Vapor Deposition (Tool)]] |
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+ | |||
+ | [[Category:Processing]] |
Revision as of 15:44, 7 July 2022
Process Control Data
See linked page for process control data (calibration data over time, such as dep. rate, refractive index, stress etc.) over time, for a selection of highly used tools/films.
Deposition Tools/Materials Table
- R: Recipe is available. Clicking this link will take you to the recipe.
- A: Material is available for use, but no recipes are provided.