Field Emission SEM 2 (JEOL IT800SHL): Difference between revisions
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|type = Inspection, Test and Characterization |
|type = Inspection, Test and Characterization |
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|super= |
|super= Aidan Hopkins |
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|super2= Bill Mitchell |
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|phone= (805)893-4974 |
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|location=Bay 1 |
|location=Bay 1 |
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|email=mitchell@ece.ucsb.edu |
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|description = JEOL 7600F FESEM |
|description = JEOL 7600F FESEM |
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|manufacturer = [http://www.jeolusa.com/PRODUCTS/ElectronOptics/ScanningElectronMicroscopesSEM/FESEM/JSM7600F/tabid/544/Default.aspx JEOL USA Inc] |
|manufacturer = [http://www.jeolusa.com/PRODUCTS/ElectronOptics/ScanningElectronMicroscopesSEM/FESEM/JSM7600F/tabid/544/Default.aspx JEOL USA Inc] |
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==About== |
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The JEOL IT800HSL Field Emission Scanning Electron Microscope is used for imaging a variety of samples made in the facility. |
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The JEOL JSM-7600F FESEM is used for imaging a variety of samples made in the facility. For general specifications, see the link to the system above. Our system is equipped with a gentle-beam mode of operation where bias is put on the stage, allowing for high resolution imaging at low electron energies impinging the surface. This is especially useful for imaging low conductivity and insulating materials without the need for conductive layer coatings. The system can accept a 4” wafer, but only 50mm of the wafer is accessible with the stage movement. A retractable LABE detector is also installed for high resolution back-scattered electron imaging. |
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Identical to [https://wiki.nanofab.ucsb.edu/wiki/SEM_1_(JEOL_IT800SHL) SEM#1], but with EDAX module added. |
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'''Please see the [https://wiki.nanofab.ucsb.edu/wiki/SEM_1_(JEOL_IT800SHL) SEM#1 page] for main tool details & procedures.''' |
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==EDS Elemental Analysis== |
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*[https://wiki.nanofab.ucsb.edu/w/images/3/3a/EDS_SOP.jpg EDS Operating Procedure] |
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Latest revision as of 04:08, 1 March 2024
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About
The JEOL IT800HSL Field Emission Scanning Electron Microscope is used for imaging a variety of samples made in the facility.
Identical to SEM#1, but with EDAX module added.
Please see the SEM#1 page for main tool details & procedures.
