Template:Announcements: Difference between revisions

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=====ASML Maintenance: Jan 29th-31st=====
=====Velion FIB Tool DOWN=====
Raith service are investigating an anomalously low beam current. The Velion FIB column is not available to users at present.
The ASML will be down for periodic preventative maintenance on Jan 29th-Jan31st, please plan your process accordingly.
// [[User:John_d|Demis D. John]] 17:00, 11 January 2024 (PST)


//[[User:Mehalana v|Vraj Mehalana]] 16:18, 23 April 2024 (PDT)
=====Gowning Refresh=====
=====Multipal Tool DOWN!!! 4/24/2024 from 6am to 10 am=====
Beginning Tuesday January 23rd, we will be pulling gowns and booties for refresh. Please remove all personal items from your suits prior to the week your section will be cleared.
Below Mention Tools are down From 6am to 10am for maintenance in the chase. I will send an email once I have completed the maintenance. Please plan accordingly.-Mike Day
// [[User:John_d|Demis D. John]] 07:28, 11 January 2024 (PST)


-PECVD # 1
=====EBeam#1: Down=====
EBeam1 will remain down until further notice. I found what may be the root cause of the PLC issues, which is the close/pump momentary button was bad and causing a constant signal to the PLC controller.
// [[User:John_d|Demis D. John]] 07:49, 11 January 2024 (PST)


-PECVD # 2
=====ASML Stepper #3: UP=====
We ran 400 wafers successfully, and focus and alignment is in-spec. System is up.
// [[User:John_d|Demis D. John]] 07:28, 11 January 2024 (PST)


-Fluorine ICP
=====DUV Flood: UP with new procedure=====
The new parts have been installed and the tool has been tested.


//[[User:Mehalana v|Vraj Mehalana]] 17:48, 19 April 2024 (PDT)
We have added a timer that interlocks the lamp power supply since some users seem to have a problem remembering to turn the tool off when finished with it. The minimum time it can be set for is 30 minutes and the max is 4 hours. You will no longer be operating the main breaker on the front of the power supply. I have updated the SOP to reflect the changes, there is a copy at the tool and on [https://wiki.nanofab.ucsb.edu/wiki/DUV_Flood_Expose#Documentation:~:text=Exposure%20System%20Spectra-,Documentation,-%5Bedit%20%7C its Wiki page].


=====Stepper #3 (ASML DUV) - PM Moved to 5/6 – 5/10=====
// [[User:John_d|Demis D. John]] 17:18, 4 January 2024 (PST)
We are postponing the Maintenance date to May 6th – 10th.
On the week of May 6th, ASML Engineers will be performing preventative maintenance, please plan your work around the tool being down at that time.


//[[User:Mehalana v|Vraj Mehalana]] 09:42, 5 April 2024 (PDT)
=====Stepper #1 (GCA 6300) - Scheduled Maintenance=====
The tool will be undergoing maintenance and be unavailable the following dates and times:


=====ICP1 Down=====
1-18-24 at 8:00am to 1-18-24 at 6:00pm
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.

//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)
Please plan your processing activities accordingly.

Bill Millerski

//[[User:Mehalana v|Vraj Mehalana]] 21:49, 21 December 2023 (PST)

===== Stepper #2 (GCA Autostep 200) - Scheduled Maintenance=====
The tool will be undergoing maintenance and be unavailable the following dates and times:

1-15-24 at 8:00am to 1-17-24 at 6:00pm

Please plan your processing activities accordingly.

//[[User:Mehalana v|Vraj Mehalana]] 21:49, 21 December 2023 (PST)


=====Job Opening: Process Engineer=====
=====Job Opening: Process Engineer=====
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=====Lab Access Changes: Symmetry App=====
=====Lab Access Changes: Symmetry App=====
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''.
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''.

// [[User:John d|John d]] 13:49, 7 November 2023 (PST)
// [[User:John d|John d]] 13:49, 7 November 2023 (PST)


=====Wafer Bonder, (Suss SB6-8E)=====
=====Wafer Bonder, (Suss SB6-8E)=====
SUSS now aims to be on site in early February. I’ll will send out an email once I get confirmation for a specific date.
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date.
//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST)
//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST)



Revision as of 23:18, 23 April 2024

Velion FIB Tool DOWN

Raith service are investigating an anomalously low beam current. The Velion FIB column is not available to users at present.

//Vraj Mehalana 16:18, 23 April 2024 (PDT)

Multipal Tool DOWN!!! 4/24/2024 from 6am to 10 am

Below Mention Tools are down From 6am to 10am for maintenance in the chase. I will send an email once I have completed the maintenance. Please plan accordingly.-Mike Day

-PECVD # 1

-PECVD # 2

-Fluorine ICP

//Vraj Mehalana 17:48, 19 April 2024 (PDT)

Stepper #3 (ASML DUV) - PM Moved to 5/6 – 5/10

We are postponing the Maintenance date to May 6th – 10th. On the week of May 6th, ASML Engineers will be performing preventative maintenance, please plan your work around the tool being down at that time.

//Vraj Mehalana 09:42, 5 April 2024 (PDT)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

Job Opening: Process Engineer

The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the NanoFab Job Openings page for details.

//Demis D. John 14:52, 30 October 2023 (PDT)

Lab Access Changes: Symmetry App

Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. IMPORTANT: check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled "Invitation to Access Symmetry App". // John d 13:49, 7 November 2023 (PST)

Wafer Bonder, (Suss SB6-8E)

SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)