Surface Analysis (KLA/Tencor Surfscan): Difference between revisions

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|location=Bay 5
|location=Bay 5
|description = Surface Analysis
|description = Surface Analysis
KLA/Tencor Surfscan
|manufacturer = KLA/Tencor
|manufacturer = Tencor
|materials =
|materials =
|toolid=
|toolid=
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*[https://wiki.nanofab.ucsb.edu/w/images/2/29/Wafer_Particle_Count-Process_Traveler.pdf Wafer Scanning Instructions]
*[https://wiki.nanofab.ucsb.edu/w/images/2/29/Wafer_Particle_Count-Process_Traveler.pdf Wafer Scanning Instructions]
**''This is the procedure Staff uses to calibrate particle counts on our deposition tools. After the scan is complete you need to press ENTER on a small laptop. The Data will be saved on: Desktop/Local Disk(C)/Users/Public/Public Documentation] The data will be saved as a photo.
**''This is the procedure Staff uses to calibrate particle counts on our deposition tools. After the scan is complete you need to press ENTER on a small laptop. The Data will be saved on: Desktop/Local Disk(C)/Users/Public/Public Documentation] The data will be saved as a photo.''
''


*[[Surfscan SOP for small substrates]] (''You must water-mount your small sample or wafer (2inch or 3 inch) to a carrier wafer)''
* Surfscan instructions [wafers different size, and pieces]:


*[[Surfscan SOP for 4inch wafers]]
*[https://drive.google.com/drive/folders/1KfYJ4UcgIIlJof6tpLLz5wstzI7ureKx 8inch wafers]
*[https://drive.google.com/drive/folders/1A-EOaVv7BZ7LqBU-ootweDXzz8KXIF3s 6inch wafers]
*[https://drive.google.com/drive/folders/1EUoxJusqM7We6EMnK64aG08ijyCjwt3U 4inch wafers]


*[[Surfscan SOP for 6inch wafers]]
*[https://drive.google.com/drive/folders/1EUoxJusqM7We6EMnK64aG08ijyCjwt3U 4inch wafers]

*[https://drive.google.com/drive/folders/1ypVvJM5PEay0fwscYaWHG53XlYlmpJUF All kind of small substrates]
*[[Surfscan SOP for 8inch wafers]]
**''You must water-mount your small sample or wafer(2inch or 3 inch) to a 4-inch wafer.''

*[[Wafer scanning process traveler|Wafer Particle Count - Process Traveler]]- Very detailed instructions
* [[Wafer scanning process traveler|Wafer Particle Count - Process Traveler]]
**'' Very detailed instructions


===Other Documentation===
===Other Documentation===

Latest revision as of 23:04, 20 November 2024

Surface Analysis (KLA/Tencor Surfscan)
KLA.jpg
Location Bay 5
Tool Type Inspection, Test and Characterization
Manufacturer KLA/Tencor
Description Surface Analysis

Primary Supervisor Biljana Stamenic
(805) 893-4002
biljana@ece.ucsb.edu

Secondary Supervisor

Don Freeborn


Recipes


About

This system uses a laser-based scattering method to count size and distribution of particles (or other scattering defects) on a flat wafer surface.

It can scan wafers in size from 4 to 8 inches. Piece-parts are more difficult but can be scanned with a custom recipe.

4-inch wafers are the most standard size to measure.

For measuring very low particle counts accurately, purchase "low particle count" (LPC) wafers from a Silicon wafer vendor, and keep the wafers in the case and clean at all times until use.

Documentation

Operating Procedures

  • Wafer Scanning Instructions
    • This is the procedure Staff uses to calibrate particle counts on our deposition tools. After the scan is complete you need to press ENTER on a small laptop. The Data will be saved on: Desktop/Local Disk(C)/Users/Public/Public Documentation] The data will be saved as a photo.

Other Documentation

  • Operations Manual
    • For detailed measurement info, it is highly recommended that you read the manual.

Examples

A low-particle 4-inch wafer example:
Gain 4: Small Particles

(0.160µm – 1.60µm)

Gain 2: Large Particles

(1.60µm – 28.0µm)

Surfscan Low-Particle Example - G4.png Surfscan Low-Particle Example - G2.png
A high-particle 4-inch wafer example:
Gain 4: Small Particles

(0.160µm – 1.60µm)

Gain 2: Large Particles

(1.60µm – 28.0µm)

Surfscan - 230113A7 Gain4 high particles.jpg Surfscan 230113A7G2 after low particles.jpg