Dicing Saw (ADT): Difference between revisions

From UCSB Nanofab Wiki
Jump to navigation Jump to search
(moved initialization instructions into own page)
(→‎About: added Recipes > Example dicing Instructions for remote work)
 
(28 intermediate revisions by 4 users not shown)
Line 1: Line 1:
{{tool|{{PAGENAME}}
{{tool2|{{PAGENAME}}
|picture=ADT.jpg
|picture=ADT.jpg
|type = Packaging
|type = Packaging
|super= Aidan Hopkins
|super= Lee Sawyer
|super2= Aidan Hopkins
|phone= 805-893-3918x208
|location=Dicing Saw Room
|location=Backend Lab: ESB 1111
|email=hopkins@ece.ucsb.edu
|description = ADT Dicing Saw
|description = ADT Dicing Saw
|model = ADT 7100
|manufacturer = Advanced Dicing Technologies Ltd.
|manufacturer = Advanced Dicing Technologies Ltd.
|materials =
|materials =
|toolid=49
|toolid=49
}}
}}
== About ==
==About==
The Model 7100 Series is a semi-automatic dicing saw. Semiconductor, glass, and plastic substrates of all types can be automatically or manually cut. This dicing Saw is optimized for multi-angle dicing of tight tolerance substrates up to 200 mm diameter in size.
The ADT 7100 Dicing Saw is optimized for multi-angle dicing of thin, tight tolerance products up to 200 mm x 200 mm. It is currently setup for dicing up to 8” diameter wafers. Check the Dicing Saw Recipes page for the blades we currently stock.


⚫
Check the [https://wiki.nanotech.ucsb.edu/w/index.php?title=Packaging_Recipes#Dicing_Saw_Recipes_.28ADT_7100.29 Dicing Saw Recipes page] for the blades we currently stock.
⚫
== Detailed Specifications ==


An ADT WM-966 tape applicator is used to mount samples to UV-release tape for dicing and an Ultron Systems UH104-8 UV lamp system is used to release samples from the tape after dicing.
⚫
== Operating Procedures ==
* [[ADT 7100 - Standard Dicing Procedure - Programmed Cut Map|Standard Dicing Procedure - Programmed Cut Map]]
* [[ADT 7100 - Standard Dicing Procedure - Single Cuts|Standard Dicing Procedure - Single Cuts]]


Contact Staff for blades and dicing frames for your group.
==== [[Recipe Recovery Procedure]] ====
# [[File:Image.png]]Click on the Programming Workspace
# Go to any recipe
# Click 'Recipe Import'[[File:Recipe import.png]]
# Select 'd: [New Volume]' from 'Folder List'[[File:Volume d.jpg|533x533px]]
# Open folder 'ADT'. Open Folder 'ADT-7100-8544150816'. Open folder 'db'. Open folder 'exports'
# Find you recipe in the box to the right and double click on it
# Verify group name is correct under 'Recipe Info'
# Click 'OK'
# Click 'Replace'
# Repeat for additional recipes


⚫
==Detailed Specifications==
⚫
== Recipes ==

⚫
* Packaging Recipes > [https://www.nanotech.ucsb.edu/wiki/index.php/Packaging_Recipes?venotify=created#Dicing_Saw_Recipes_.28ADT_7100.29 Dicing Saw Recipes (ADT 7100)]
*Maximum Wafer Size: 8"
⚫
Be sure to also see the methods for protecting your sample from dicing dust, and mounting/unmounting.
*Parts mounted to UV-release tape for dicing
*Automated cut maps at multiple angles (0° and 90° typical)
**"Polygon" cutting to approximate Coring wafers is possible.
*~Few micron alignment to on-wafer features.
*Thermocarbon Resnoid dicing blades provided by Staff

⚫
==Operating Procedures==

*[https://wiki.nanofab.ucsb.edu/w/images/5/54/ADT_SOP_Rev_J.pdf ADT Dicing Saw Standard Operating Procedure]
*[https://wiki.nanofab.ucsb.edu/w/images/5/5c/Post_Dicing_Tape_Expansion_SOP.pdf Post Dicing Tape Expansion]
*[https://wiki.nanofab.ucsb.edu/w/images/5/5a/Ultron_1042R_Film_specs.pdf Ultron Systems, Inc. 1042R Anti-Static Ultraviolet Film TDS]
*[https://wiki.nanofab.ucsb.edu/w/images/5/59/Recipe_Importing_New_Software.pdf Recovering an Old Recipe (2023)]
⚫
==Recipes==

*Recipes > Packaging > '''[[Packaging Recipes#Dicing Saw Recipes .28ADT 7100.29|Dicing Saw Recipes (ADT 7100)]]'''

⚫
Be sure to also see the recipes for protecting your sample from dicing dust, and mounting/unmounting.

==== Dicing Processing Parameters ====
If you are not familiar with dicing, the following document lists the important parameters you need to document before starting your job:

* [[Media:Dicing - Example Dicing Instructions for UC Santa Barbara v2.pptx|Example Dicing Instructions for UC Santa Barbara v2.pptx]] ''- by Demis D. John''

Latest revision as of 21:29, 9 December 2024

Dicing Saw (ADT)
ADT.jpg
Location Backend Lab: ESB 1111
Tool Type Packaging
Manufacturer Advanced Dicing Technologies Ltd.
Model ADT 7100
Description ADT Dicing Saw
Primary Supervisor Lee Sawyer
(805) 893-2123
lee_sawyer@ucsb.edu

Secondary Supervisor

Aidan Hopkins

Recipes
SignupMonkey: Sign up for this tool


About

The Model 7100 Series is a semi-automatic dicing saw. Semiconductor, glass, and plastic substrates of all types can be automatically or manually cut. This dicing Saw is optimized for multi-angle dicing of tight tolerance substrates up to 200 mm diameter in size.

Check the Dicing Saw Recipes page for the blades we currently stock.

An ADT WM-966 tape applicator is used to mount samples to UV-release tape for dicing and an Ultron Systems UH104-8 UV lamp system is used to release samples from the tape after dicing.

Contact Staff for blades and dicing frames for your group.

Detailed Specifications

  • Maximum Wafer Size: 8"
  • Parts mounted to UV-release tape for dicing
  • Automated cut maps at multiple angles (0° and 90° typical)
    • "Polygon" cutting to approximate Coring wafers is possible.
  • ~Few micron alignment to on-wafer features.
  • Thermocarbon Resnoid dicing blades provided by Staff

Operating Procedures

Recipes

Be sure to also see the recipes for protecting your sample from dicing dust, and mounting/unmounting.

Dicing Processing Parameters

If you are not familiar with dicing, the following document lists the important parameters you need to document before starting your job:

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Dicing_Saw_(ADT)&oldid=162665"