Dicing Saw (ADT): Difference between revisions
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Check the [https://wiki.nanotech.ucsb.edu/w/index.php?title=Packaging_Recipes#Dicing_Saw_Recipes_.28ADT_7100.29 Dicing Saw Recipes page] for the blades we currently stock. |
Check the [https://wiki.nanotech.ucsb.edu/w/index.php?title=Packaging_Recipes#Dicing_Saw_Recipes_.28ADT_7100.29 Dicing Saw Recipes page] for the blades we currently stock. |
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An ADT WM-966 tape applicator is used to mount samples to UV-release tape for dicing and an Ultron Systems UH104-8 UV lamp system is used to release samples |
An ADT WM-966 tape applicator is used to mount samples to UV-release tape for dicing and an Ultron Systems UH104-8 UV lamp system is used to release samples from the tape after dicing. |
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Contact Staff for blades and dicing frames for your group. |
Contact Staff for blades and dicing frames for your group. |
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*Parts mounted to UV-release tape for dicing |
*Parts mounted to UV-release tape for dicing |
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*Automated cut maps at multiple angles (0° and 90° typical) |
*Automated cut maps at multiple angles (0° and 90° typical) |
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**"Polygon" cutting to approximate Coring wafers is possible. |
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*~Few micron alignment to on-wafer features. |
*~Few micron alignment to on-wafer features. |
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*Thermocarbon Resnoid dicing blades provided by Staff |
*Thermocarbon Resnoid dicing blades provided by Staff |
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*[https://wiki.nanofab.ucsb.edu/w/images/5/5c/Post_Dicing_Tape_Expansion_SOP.pdf Post Dicing Tape Expansion] |
*[https://wiki.nanofab.ucsb.edu/w/images/5/5c/Post_Dicing_Tape_Expansion_SOP.pdf Post Dicing Tape Expansion] |
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*[https://wiki.nanofab.ucsb.edu/w/images/5/5a/Ultron_1042R_Film_specs.pdf Ultron Systems, Inc. 1042R Anti-Static Ultraviolet Film TDS] |
*[https://wiki.nanofab.ucsb.edu/w/images/5/5a/Ultron_1042R_Film_specs.pdf Ultron Systems, Inc. 1042R Anti-Static Ultraviolet Film TDS] |
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*[ |
*[https://wiki.nanofab.ucsb.edu/w/images/5/59/Recipe_Importing_New_Software.pdf Recovering an Old Recipe (2023)] |
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==Recipes== |
==Recipes== |
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Be sure to also see the recipes for protecting your sample from dicing dust, and mounting/unmounting. |
Be sure to also see the recipes for protecting your sample from dicing dust, and mounting/unmounting. |
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==== Dicing Processing Parameters ==== |
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If you are not familiar with dicing, the following document lists the important parameters you need to document before starting your job: |
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* [[Media:Dicing - Example Dicing Instructions for UC Santa Barbara v2.pptx|Example Dicing Instructions for UC Santa Barbara v2.pptx]] ''- by Demis D. John'' |
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Latest revision as of 21:29, 9 December 2024
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About
The Model 7100 Series is a semi-automatic dicing saw. Semiconductor, glass, and plastic substrates of all types can be automatically or manually cut. This dicing Saw is optimized for multi-angle dicing of tight tolerance substrates up to 200 mm diameter in size.
Check the Dicing Saw Recipes page for the blades we currently stock.
An ADT WM-966 tape applicator is used to mount samples to UV-release tape for dicing and an Ultron Systems UH104-8 UV lamp system is used to release samples from the tape after dicing.
Contact Staff for blades and dicing frames for your group.
Detailed Specifications
- Maximum Wafer Size: 8"
- Parts mounted to UV-release tape for dicing
- Automated cut maps at multiple angles (0° and 90° typical)
- "Polygon" cutting to approximate Coring wafers is possible.
- ~Few micron alignment to on-wafer features.
- Thermocarbon Resnoid dicing blades provided by Staff
Operating Procedures
- ADT Dicing Saw Standard Operating Procedure
- Post Dicing Tape Expansion
- Ultron Systems, Inc. 1042R Anti-Static Ultraviolet Film TDS
- Recovering an Old Recipe (2023)
Recipes
- Recipes > Packaging > Dicing Saw Recipes (ADT 7100)
Be sure to also see the recipes for protecting your sample from dicing dust, and mounting/unmounting.
Dicing Processing Parameters
If you are not familiar with dicing, the following document lists the important parameters you need to document before starting your job:
- Example Dicing Instructions for UC Santa Barbara v2.pptx - by Demis D. John