E-Beam Evaporation Recipes: Difference between revisions

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Updated tooling factor for Al in E-beam#4.
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Line 20: Line 20:
{| class="wikitable sortable collapsible" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1"
{| class="wikitable sortable collapsible" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1"
|- bgcolor="#D0E7FF"
|- bgcolor="#D0E7FF"
! width="75" align="center" bgcolor="#D0E7FF" |'''Material'''
! width="75" bgcolor="#D0E7FF" align="center" |'''Material'''
! width="75" align="center" bgcolor="#D0E7FF" |'''Position'''
! width="75" bgcolor="#D0E7FF" align="center" |'''Position'''
! width="75" align="center" bgcolor="#D0E7FF" |'''Hearth / Crucible'''
! width="75" bgcolor="#D0E7FF" align="center" |'''Hearth / Crucible'''
! width="85" align="center" bgcolor="#D0E7FF" |'''Film Number'''
! width="75" bgcolor="#D0E7FF" align="center" |'''Density'''
! width="75" align="center" bgcolor="#D0E7FF" |'''Density'''
! width="75" bgcolor="#D0E7FF" align="center" |'''Z Ratio'''
! width="75" align="center" bgcolor="#D0E7FF" |'''Z Ratio'''
! width="75" bgcolor="#D0E7FF" align="center" |'''Tooling'''
! width="75" align="center" bgcolor="#D0E7FF" |'''Tooling'''
! width="500" bgcolor="#D0E7FF" align="center" |'''Comments'''
! width="500" align="center" bgcolor="#D0E7FF" |'''Comments'''
|-
|-
|Ag
|Ag
|7 (6, 7, 8)
|4
|C
|C
|5
|10.5
|10.5
|0.529
|0.529
|140
|110
|
|
|-
|-
|Al
|Al
|2
|1
|C
|C
|6
|2.7
|2.7
|1.080
|1.080
|118
|102
|
|
|-
|-
|Al<sub>2</sub>O<sub>3</sub>
|Al<sub>2</sub>O<sub>3</sub>
|(6, 7, 8)
|1
|C
|C
|6
|3.97
|3.97
|0.336
|0.336
|169
|
|
|
|-
|-
|Au
|Au
|4
|3
|C
|C
|4
|19.3
|19.3
|0.381
|0.381
|138
|92
|Bazookas can be used at 20-30Å/sec.
|Bazookas can be used at 20-30Å/sec.
|-
|-
|AuGe
|AuGe
|(6, 7, 8)
|3
|C
|C
|5
|17.63
|17.63
|0.397
|0.397
|151
|
|Composition unpredictable unless you practically empty the crucible.
|Composition unpredictable unless you practically empty the crucible.
|-
|-
|C
|C
|(6, 7, 8)
|2
|H
|H
|2
|2.250
|2.250
|3.260
|3.260
|150
|
|Carbon. Must sweep beam. 1Å/sec (fluctuating 0.4–0.9Å/sec) at ~1.4–1.6 emission.
|Carbon. Must sweep beam. 1Å/sec (fluctuating 0.4–0.9Å/sec) at ~1.4–1.6 emission.
|-
|-
|Co
|Co
|(6, 7, 8)
|2
|C
|C
|1
|8.9
|8.9
|0.343
|0.343
|150
|
|'''Use only with permission'''
|'''Use only with permission'''
|-
|-
|Fe
|Fe
|(6, 7, 8)
|
|
|
|
|7.86
|7.86
Line 102: Line 93:
|-
|-
|Ge
|Ge
|8 (6, 7, 8)
|3
|C
|C
|6
|5.35
|5.35
|0.516
|0.516
|130
|
|
|
|-
|-
|Gd
|Gd
|(6, 7, 8)
|3
|H
|H
|3
|7.89
|7.89
|0.670
|0.670
|120
|
|'''Use only with permission'''
|'''Use only with permission'''
|
|
|-
|-
|MgO
|MgO
|(6, 7, 8)
|1
|
|
|6
|3.58
|3.58
|0.411
|0.411
Line 130: Line 118:
|-
|-
|Mo
|Mo
|(6, 7, 8)
|
|
|
|
|10.2
|10.2
|0.257
|0.257
|140
|
|
|
|-
|-
|Ni
|Ni
|1
|5
|H
|H
|1
|8.91
|8.91
|0.331
|0.331
|140
|104
|Prone to spitting. Cool down for 15 minutes before venting.
|Prone to spitting. Cool down for 15 minutes before venting.
|-
|-
|NiCr
|NiCr
|(6, 7, 8)
|1
|H
|H
|6
|8.50
|8.50
|0.3258
|0.3258
Line 157: Line 142:
|-
|-
|Nb
|Nb
|(6, 7, 8)
|4
|C
|C
|6
|8.57
|8.57
|0.516 ( should be 0.492)
|0.516 ( should be 0.492)
Line 166: Line 150:
|-
|-
|Pd
|Pd
|6 (6, 7, 8)
|1
|H
|H
|9
|12.0
|12.0
|0.357
|0.357
|140
|112
|
|
|-
|-
|Pt
|Pt
|1
|4
|C
|C
|8
|21.40
|21.40
|0.245
|0.245
|140
|100
|Prone to spitting. Evaporate at 1.5Å/sec or less.
|Prone to spitting. Evaporate at 1.5Å/sec or less.
|-
|-
|Ru
|Ru
|(6, 7, 8)
|1
|C
|C
|6
|12.362
|12.362
|0.182
|0.182
|142
|
|Prone to spitting. Evaporate at 1.0Å/sec or less. Cool down for 20 minutes before venting.
|Prone to spitting. Evaporate at 1.0Å/sec or less. Cool down for 20 minutes before venting.
|-
|-
|Si
|Si
|(6, 7, 8)
|2
|H
|H
|2
|2.32
|2.32
|0.712
|0.712
|150
|
|Cool down very slowly after evaporating lest you crack the source.
|Cool down very slowly after evaporating lest you crack the source.
|-
|-
|SiO
|SiO
|(6, 7, 8)
|
|C
|C
|6
|2.13
|2.13
|0.87
|0.87
|132
|
|'''Use only with permission'''
|'''Use only with permission'''
|-
|-
|SiO<sub>2</sub>
|SiO<sub>2</sub>
|(6, 7, 8)
|1
|C
|C
|6
|2.648
|2.648
|1.00
|1.00
|140
|
|'''Use only with permission.'''
|'''Use only with permission.'''
Please change the crystal and the upper mirror after evaporating oxide. Density 2.2-2.7 according to thin film dep. table.
Please change the crystal and the upper mirror after evaporating oxide. Density 2.2-2.7 according to thin film dep. table.
|-
|-
|SrF<sub>2</sub>
|SrF<sub>2</sub>
|(6, 7, 8)
|1
|C
|C
|6
|4.28
|4.28
|0.727
|0.727
|140
|
|'''Use only with permission'''
|'''Use only with permission'''
|-
|-
|Ta
|Ta
|(6, 7, 8)
|1
|H
|H
|6
|16.6
|16.6
|0.262
|0.262
Line 239: Line 215:
|-
|-
|W
|W
|(6, 7, 8)
|1
|C
|C
|6
|19.3
|19.3
|0.163
|0.163
|138
|
|
|
|-
|-
|Ti
|Ti
|3
|2
|H
|H
|3
|4.50
|4.50
|0.628
|0.628
|139
|109
|
|
|}

=[[E-Beam 2 (Custom)]]=
==Materials Table (E-Beam #2)==
{| class="wikitable sortable collapsible" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1"
|- bgcolor="#D0E7FF"
! width="45" align="center" bgcolor="#D0E7FF" |'''Material'''
! width="45" align="center" bgcolor="#D0E7FF" |'''Density, g/cm3'''
! width="45" align="center" bgcolor="#D0E7FF" |'''Z Ratio'''
! width="45" align="center" bgcolor="#D0E7FF" |'''Tooling factor, %'''
! width="100" align="center" bgcolor="#D0E7FF" |'''Comments'''
|-
|-
|Zr
|Al<sub>2</sub>O<sub>3</sub>
|(6, 7, 8)
|3.97
|C
|0.336
|140.0
|6.49
|0.600
|Tony could you please check this?
|-
|150
|CeO<sub>2</sub>
|7.13
|1.000
|252.0
|Deposition at room temperature (see the details in the following file)
|-
|CeO<sub>2</sub>
|7.13
|1.000
|117.0
|Deposition at 200 C (see the details in the following file)
|-
|CeO<sub>2</sub>
|7.13
|1.000
|99.7
|Deposition at 250 C (see the details in the following file)
|-
|GeO<sub>2</sub>
|6.24
|1.000
|139.0
|
|-
|ITO
|6.43-7.14
|1.000
|139.0
|z ratio unknown
|-
|MgO
|3.58
|0.411
|157.6
|OK
|-
|Si
|2.32
|0.712
|150.0
|
|-
|SiO<sub>2</sub>
|2.648
|1.000
|157.6
|Density 2.2-2.7 according to thin film deposition tables
|-
|SiO<sub>x</sub>
|2.13
|0.87
|130.0
|
|-
|SrF<sub>2</sub>
|4.28
|0.727
|140.0
|
|-
|Ta<sub>2</sub>O<sub>5</sub>
|8.2
|0.30
|157.6
|
|-
|TiO<sub>2</sub>
|4.26
|0.400
|139.0
|
|
|-
|-
|}
|}

=[[E-Beam 2 (Custom)]]=
==Materials Table (E-Beam #2)==
[[File:EB2 Materials Table.png|none|thumb|738x738px]]


==ITO deposition (E-Beam 2)==
==ITO deposition (E-Beam 2)==
Line 362: Line 259:
|-
|-
|- bgcolor="#D0E7FF"
|- bgcolor="#D0E7FF"
! width="45" align="center" bgcolor="#D0E7FF" |'''Material'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Material'''
! width="45" align="center" bgcolor="#D0E7FF" |'''Gun'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Gun'''
! width="45" align="center" bgcolor="#D0E7FF" |'''Hearth /Crucible'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Hearth /Crucible'''
! width="45" align="center" bgcolor="#D0E7FF" |'''Process Gain, A/sec/%pwr'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Process Gain, A/sec/%pwr'''
! width="45" align="center" bgcolor="#D0E7FF" |'''Film Number'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Film Number'''
! width="45" align="center" bgcolor="#D0E7FF" |'''Density, g/cm3'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Density, g/cm3'''
! width="45" align="center" bgcolor="#D0E7FF" |'''Z Ratio'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Z Ratio'''
! width="45" align="center" bgcolor="#D0E7FF" |'''Tooling, %'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Tooling, %'''
! width="100" align="center" bgcolor="#D0E7FF" |'''Comments'''
! width="100" bgcolor="#D0E7FF" align="center" |'''Comments'''
|-
|-
|Au
|Au
Line 458: Line 355:
{| class="wikitable sortable collapsible" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1"
{| class="wikitable sortable collapsible" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1"
|- bgcolor="#D0E7FF"
|- bgcolor="#D0E7FF"
! width="45" align="center" bgcolor="#D0E7FF" |'''Material'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Material'''
! width="45" align="center" bgcolor="#D0E7FF" |'''Density, g/cm3'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Density, g/cm3'''
! width="45" align="center" bgcolor="#D0E7FF" |'''Z Ratio'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Z Ratio'''
! width="45" align="center" bgcolor="#D0E7FF" |'''Master tooling, %'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Master tooling, %'''
! width="45" align="center" bgcolor="#D0E7FF" |'''Process Gain, A/sec/%pwr'''
! width="45" bgcolor="#D0E7FF" align="center" |'''Process Gain, A/sec/%pwr'''
! width="100" align="center" bgcolor="#D0E7FF" |'''Comments'''
! width="100" bgcolor="#D0E7FF" align="center" |'''Comments'''
|-
|Ag
|10.50
|0.529
|110
|10.0
|
|-
|Al
|2.70
|1.080
|110
|6.0
|updated 9/1/2021
|-
|-
|Au
|Au
|Front
|C
|2.0
|3
|19.30
|19.30
|0.381
|0.381
|120
|56
|10.0
|
|
|-
|-
|Co
|Ni
|Front
|8.90
|C
|0.343
|150
|0.5
|5.0
|2
|8.91
|0.331
|67
|
|
|-
|-
|Cr
|Pt
|Front
|7.20
|C
|0.305
|140
|0.4
|1
|10.0
|21.40
|0.245
|67
|
|
|-
|-
|Fe
|Ti
|Front
|7.86
|C
|0.349
|165
|5.0
|4
|10.0
|4.50
|0.628
|67
|
|
|-
|-
|Ge
|Ag
|Rear
|5.35
|C
|0.516
|126
|10.0
|10.0
|2
|10.50
|0.529
|67
|
|
|-
|-
|Hf
|Al
|Rear
|13.09
|C
|0.360
|150
|10.0
|10.0
|1
|2.70
|1.080
|53
|
|
|-
|-
|Ir
|Ge
|Rear
|22.40
|C
|0.129
|130
|10.0
|
|-
|Ni
|8.91
|0.331
|150
|5.0
|
|-
|NiCr
|8.50
|0.3258
|140
|10.0
|density and z ratio for Nichrome IV
|-
|NiFe
|8.70
|1.000
|100
|10.0
|10.0
|3
|5.35
|0.516
|80
|
|
|-
|-
|Pd
|Pd
|Rear
|C
|0.9
|4
|12.038
|12.038
|0.357
|0.357
|112
|48
|10.0
|
|-
|Pt
|21.40
|0.245
|130
|10.0
|
|-
|Ru
|12.362
|0.182
|100
|10.0
|
|-
|Ti
|4.50
|0.628
|183
|10.0
|
|-
|Zr
|6.49
|0.600
|150
|10.0
|
|
|-
|-

Latest revision as of 15:02, 21 January 2026

Back to Vacuum Deposition Recipes.

Vapor Pressure Chart and Materials Deposition Table

Aluminum Deposition

E-Beam 1 (Sharon)

Ar-Ion Beam Source

Materials Table (E-Beam #1)

There are four hearth "positions" able to be loaded at any one time, meaning only up to 4 materials can be evaporated without breaking vacuum. Now able to handle Four-4" wafers in one run.

Material Position Hearth / Crucible Density Z Ratio Tooling Comments
Ag 7 (6, 7, 8) C 10.5 0.529 110
Al 1 C 2.7 1.080 102
Al2O3 (6, 7, 8) C 3.97 0.336
Au 3 C 19.3 0.381 92 Bazookas can be used at 20-30Å/sec.
AuGe (6, 7, 8) C 17.63 0.397 Composition unpredictable unless you practically empty the crucible.
C (6, 7, 8) H 2.250 3.260 Carbon. Must sweep beam. 1Å/sec (fluctuating 0.4–0.9Å/sec) at ~1.4–1.6 emission.
Co (6, 7, 8) C 8.9 0.343 Use only with permission
Fe (6, 7, 8) 7.86 0.349
Ge 8 (6, 7, 8) C 5.35 0.516
Gd (6, 7, 8) H 7.89 0.670 Use only with permission
MgO (6, 7, 8) 3.58 0.411 Use only with permission
Mo (6, 7, 8) 10.2 0.257
Ni 5 H 8.91 0.331 104 Prone to spitting. Cool down for 15 minutes before venting.
NiCr (6, 7, 8) H 8.50 0.3258 Density and z-ratio for Nichrome IV
Nb (6, 7, 8) C 8.57 0.516 ( should be 0.492) Cool down for at least 35 minutes before venting.
Pd 6 (6, 7, 8) H 12.0 0.357 112
Pt 4 C 21.40 0.245 100 Prone to spitting. Evaporate at 1.5Å/sec or less.
Ru (6, 7, 8) C 12.362 0.182 Prone to spitting. Evaporate at 1.0Å/sec or less. Cool down for 20 minutes before venting.
Si (6, 7, 8) H 2.32 0.712 Cool down very slowly after evaporating lest you crack the source.
SiO (6, 7, 8) C 2.13 0.87 Use only with permission
SiO2 (6, 7, 8) C 2.648 1.00 Use only with permission.

Please change the crystal and the upper mirror after evaporating oxide. Density 2.2-2.7 according to thin film dep. table.

SrF2 (6, 7, 8) C 4.28 0.727 Use only with permission
Ta (6, 7, 8) H 16.6 0.262 Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call maintainer before you try Ta.
W (6, 7, 8) C 19.3 0.163
Ti 2 H 4.50 0.628 109
Zr (6, 7, 8) C 6.49 0.600 150

E-Beam 2 (Custom)

Materials Table (E-Beam #2)

ITO deposition (E-Beam 2)

CeO2 deposition (E-Beam 2)

E-Beam 3 (Temescal)

Materials Table (E-Beam #3)

The following materials are always installed in the evaporator. There are 4 materials available on each gun (front/rear guns), allowing for co-deposition by running both guns simultaneously.

Material Gun Hearth /Crucible Process Gain, A/sec/%pwr Film Number Density, g/cm3 Z Ratio Tooling, % Comments
Au Front C 2.0 3 19.30 0.381 56
Ni Front C 0.5 2 8.91 0.331 67
Pt Front C 0.4 1 21.40 0.245 67
Ti Front C 5.0 4 4.50 0.628 67
Ag Rear C 10.0 2 10.50 0.529 67
Al Rear C 10.0 1 2.70 1.080 53
Ge Rear C 10.0 3 5.35 0.516 80
Pd Rear C 0.9 4 12.038 0.357 48

E-Beam 4 (CHA)

Materials Table (E-Beam #4)

Material Density, g/cm3 Z Ratio Master tooling, % Process Gain, A/sec/%pwr Comments
Au Front C 2.0 3 19.30 0.381 56
Ni Front C 0.5 2 8.91 0.331 67
Pt Front C 0.4 1 21.40 0.245 67
Ti Front C 5.0 4 4.50 0.628 67
Ag Rear C 10.0 2 10.50 0.529 67
Al Rear C 10.0 1 2.70 1.080 53
Ge Rear C 10.0 3 5.35 0.516 80
Pd Rear C 0.9 4 12.038 0.357 48
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