Difference between revisions of "Vacuum Deposition Recipes"
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+ | ===[[Process Group - Process Control Data#Deposition .28Process Control Data.29|<u>Process Control Data</u>]]=== |
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− | {{Recipe Table Explanation}} |
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+ | <small>''See [[Process Group - Process Control Data#Deposition .28Process Control Data.29|linked page]] for process control data (calibration data over time, such as dep. rate, refractive index, stress etc.) over time, for a selection of highly used tools/films.''</small> |
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+ | ===Deposition Tools/Materials Table=== |
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− | ! width="1675" height="45" colspan="18" | <div style="font-size: 150%;">Vacuum Deposition Recipes</div> |
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+ | ''The Key/Legend for this table's <code>A...R6</code> values is at the [[Vacuum Deposition Recipes#Process Ranking Table|<u>bottom of the page</u>]].'' |
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+ | {| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" border="1" |
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− | | <!-- INTENTIONALLY LEFT BLANK --> <br> |
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+ | |- bgcolor="#d0e7ff" |
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− | ! bgcolor="#D0E7FF" align="center" colspan="4" | '''[[E-Beam Evaporation Recipes|E-Beam Evaporation]]''' |
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+ | ! colspan="16" width="1675" height="45" |<div style="font-size: 150%;">Vacuum Deposition Recipes</div> |
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− | ! bgcolor="#D0E7FF" align="center" colspan="6" | '''[[Sputtering Recipes|Sputtering]]''' |
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+ | |- bgcolor="#d0e7ff" |
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− | ! bgcolor="#D0E7FF" align="center" colspan="2" | '''[[Thermal Evaporation Recipes|Thermal Evaporation]]''' |
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+ | |<!-- INTENTIONALLY LEFT BLANK --><br> |
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− | ! bgcolor="#D0E7FF" align="center" colspan="3" | '''[[PECVD Recipes|Plasma Enhanced Chemical<br>Vapor Deposition (PECVD)]]''' |
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− | ! |
+ | ! colspan="4" bgcolor="#d0e7ff" align="center" |'''[[E-Beam Evaporation Recipes|E-Beam Evaporation]]''' |
− | ! |
+ | ! colspan="4" |'''[[Sputtering Recipes|Sputtering]]''' |
+ | ! colspan="2" bgcolor="#d0e7ff" align="center" |'''[[Thermal Evaporation Recipes|Thermal Evaporation]]''' |
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+ | ! colspan="3" bgcolor="#d0e7ff" align="center" |'''[[PECVD Recipes|Plasma Enhanced Chemical<br>Vapor Deposition (PECVD)]]''' |
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+ | ! width="90" bgcolor="#d0e7ff" align="center" |'''[[Atomic Layer Deposition Recipes|Atomic Layer Deposition]]''' |
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+ | ! width="80" bgcolor="#d0e7ff" align="center" |'''[[Molecular Vapor Deposition Recipes|Molecular Vapor Deposition]]''' |
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− | ! width="20" bgcolor="# |
+ | ! width="20" bgcolor="#d0e7ff" align="center" |'''Material''' |
− | | width="65" bgcolor="# |
+ | | width="65" bgcolor="#daf1ff" |[[E-Beam Evaporation Recipes#E-Beam_1_.28Sharon.29|E-Beam 1 (Sharon)]] |
− | | width="65" bgcolor="# |
+ | | width="65" bgcolor="#daf1ff" |[[E-Beam Evaporation Recipes#E-Beam_2_.28Custom.29|E-Beam 2 (Custom)]] |
− | | width="65" bgcolor="# |
+ | | width="65" bgcolor="#daf1ff" |[[E-Beam Evaporation Recipes#E-Beam_3_.28Temescal.29|E-Beam 3 (Temescal)]] |
− | | width="65" bgcolor="# |
+ | | width="65" bgcolor="#daf1ff" |[[E-Beam Evaporation Recipes#E-Beam_4_.28CHA.29|E-Beam 4 (CHA)]] |
− | | width="65" bgcolor="# |
+ | | width="65" bgcolor="#daf1ff" |[[Sputtering_Recipes#Sputter_3_.28AJA_ATC_2000-F.29|Sputter 3<br>(AJA ATC 2000-F)]] |
− | | width="65" bgcolor="# |
+ | | width="65" bgcolor="#daf1ff" |[[Sputtering_Recipes#Sputter_4_.28AJA_ATC_2200-V.29|Sputter 4<br>(AJA ATC 2200-V)]] |
− | | width="65" bgcolor="# |
+ | | width="65" bgcolor="#daf1ff" |[https://wiki.nanotech.ucsb.edu/w/index.php?title=Sputtering_Recipes#Sputter_5_.28AJA_ATC_2200-V.29 Sputter 5 (AJA ATC 2200-V)] |
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+ | | width="55" bgcolor="#daf1ff" |[[Sputtering_Recipes#Ion_Beam_Deposition_.28Veeco_NEXUS.29|Ion Beam<br>Deposition (Veeco Nexus)]] |
− | | width=" |
+ | | width="45" bgcolor="#daf1ff" |[[Thermal Evaporation Recipes#Thermal_Evap_1|Thermal<br>Evap 1]] |
− | | width=" |
+ | | width="65" bgcolor="#daf1ff" |[[Thermal Evaporation Recipes#Thermal_Evap_2_.28Solder.29|Thermal Evap 2 (Solder)]] |
− | | width=" |
+ | | width="65" bgcolor="#daf1ff" |[[PECVD Recipes#PECVD_1_.28PlasmaTherm_790.29|PECVD 1<br>(PlasmaTherm 790)]] |
− | | width="65" bgcolor="# |
+ | | width="65" bgcolor="#daf1ff" |[[PECVD Recipes#PECVD_2_.28Advanced_Vacuum.29|PECVD 2<br>(Advanced Vacuum)]] |
− | | width="65" bgcolor="# |
+ | | width="65" bgcolor="#daf1ff" |[[PECVD_Recipes#ICP-PECVD_.28Unaxis_VLR.29|Unaxis VLR ICP-PECVD]] |
− | | width="65" bgcolor="# |
+ | | width="65" bgcolor="#daf1ff" |[[Atomic_Layer_Deposition_Recipes|Atomic Layer Deposition (Oxford FlexAL)]] |
− | | width="65" bgcolor="# |
+ | | width="65" bgcolor="#daf1ff" |[[Molecular Vapor Deposition|Molecular Vapor Deposition (Tool)]] |
− | | width="65" bgcolor="#DAF1FF" | [[Atomic_Layer_Deposition_Recipes|Atomic Layer Deposition (Oxford FlexAL)]] |
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− | | width="65" bgcolor="#DAF1FF" | [[Molecular Vapor Deposition|Molecular Vapor Deposition (Tool)]] |
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+ | ! bgcolor="#d0e7ff" align="center" |Ag |
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+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]] |
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+ | | bgcolor="#eeffff" |<br> |
− | | bgcolor=" |
+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 3 .28Temescal.29|R2]] |
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+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]] |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R1]] |
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+ | | bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 1|R1]] |
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+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 2 .28Custom.29|R2]] |
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− | | bgcolor="EEFFFF" | [[Sputtering Recipes|A]] {{rl|Sputtering Recipes|Sputter 3 (AJA ATC 2000-F)}} |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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− | | {{rl|Atomic Layer Deposition Recipes|HfO2 deposition (ALD)}} |
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+ | !CdTe |
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− | ! bgcolor="#D0E7FF" align="center" | In |
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+ | !CaF2 |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R2]] |
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− | ! bgcolor="# |
+ | ! bgcolor="#d0e7ff" align="center" |CeO<sub>2</sub> |
− | | bgcolor=" |
+ | | bgcolor="#eeffff" |<br> |
− | | bgcolor=" |
+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 2 .28Custom.29|R3]] |
− | | bgcolor=" |
+ | | bgcolor="#eeffff" |<br> |
− | | bgcolor=" |
+ | | bgcolor="#eeffff" |<br> |
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− | | bgcolor="EEFFFF" | [[Sputtering_Recipes#Ion_Beam_Deposition_.28Veeco_NEXUS.29|A]] |
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− | | bgcolor=" |
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|- |
|- |
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− | ! bgcolor="# |
+ | ! bgcolor="#d0e7ff" align="center" |Co |
+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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− | | [[Sputtering Recipes|A]] |
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− | | [[Sputtering Recipes|A]] |
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− | ! bgcolor="# |
+ | ! bgcolor="#d0e7ff" align="center" |Cr |
+ | |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R1]] |
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+ | |<br> |
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− | | {{Al/E2}} |
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+ | |<br> |
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− | | |
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+ | |[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]] |
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+ | |[https://wiki.nanotech.ucsb.edu/w/index.php?title=Sputtering_Recipes#Sputter_3_.28AJA_ATC_2000-F.29 R3] |
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+ | |<br> |
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+ | |{{Rl|Sputtering_Recipes|Sputter_5_.28AJA_ATC_2200-V.29|R3}} |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 1|R3]] |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R2]] |
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− | ! bgcolor="# |
+ | ! bgcolor="#d0e7ff" align="center" |Cu |
− | | bgcolor=" |
+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R1]] |
− | | bgcolor=" |
+ | | bgcolor="#eeffff" |<br> |
− | | bgcolor=" |
+ | | bgcolor="#eeffff" |<br> |
− | | bgcolor=" |
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− | | bgcolor=" |
+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R3]] |
− | | bgcolor=" |
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− | | bgcolor=" |
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− | | bgcolor=" |
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− | | bgcolor=" |
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− | | bgcolor=" |
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− | | bgcolor="EEFFFF" | <br> |
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|- |
|- |
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− | ! bgcolor="# |
+ | ! bgcolor="#d0e7ff" align="center" |Fe |
+ | |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]] |
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− | | {{Al/E1}} |
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− | | |
+ | |<br> |
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+ | |<br> |
+ | |[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]] |
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+ | |[[Sputtering Recipes|R3]] |
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+ | |<br> |
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+ | |<br> |
+ | |<br> |
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− | | [[Sputtering Recipes|R]] |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 1|R1]] |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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+ | !Ga |
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− | ! bgcolor="#D0E7FF" align="center" | Nd |
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− | | [[Sputtering Recipes|A]] |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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+ | !GaAs |
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+ | | |
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− | | bgcolor="EEFFFF" | {{Al/E3}} |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | {{rl|Sputtering Recipes|Sputter 3 (AJA ATC 2000-F)}} |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | [[Thermal Evaporation Recipes|A]] |
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− | | bgcolor="EEFFFF" | [[Thermal Evaporation Recipes|A]] |
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− | | bgcolor="EEFFFF" | <br> |
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− | | bgcolor="EEFFFF" | <br> |
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|- |
|- |
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− | ! bgcolor="# |
+ | ! bgcolor="#d0e7ff" align="center" |Ge |
+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]] |
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− | | {{Al/E1}} |
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+ | | bgcolor="#eeffff" |<br> |
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− | | |
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+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 3 .28Temescal.29|R2]] |
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− | | |
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+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]] |
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− | | {{Al/E4}} |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R1]] |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R1]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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− | | |
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|- |
|- |
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− | ! bgcolor="# |
+ | ! bgcolor="#d0e7ff" align="center" |GeO<sub>2</sub> |
+ | | |
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− | | bgcolor="EEFFFF" | {{Al/E1}} |
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+ | |[[E-Beam Evaporation Recipes#E-Beam 2 .28Custom.29|R2]] |
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− | | bgcolor="EEFFFF" | |
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+ | | |
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− | | bgcolor="EEFFFF" | |
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+ | | |
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− | | bgcolor="EEFFFF" | {{Al/E4}} |
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+ | | |
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− | | bgcolor="EEFFFF" | |
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+ | | |
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− | | bgcolor="EEFFFF" | |
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+ | | |
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− | | bgcolor="EEFFFF" | [[Sputtering Recipes|A]] |
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− | | bgcolor="EEFFFF" | |
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− | | bgcolor="EEFFFF" | |
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|- |
|- |
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− | ! bgcolor="# |
+ | ! bgcolor="#d0e7ff" align="center" |Gd |
+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]] |
||
− | | {{Al/E1}} |
||
− | | <br> |
+ | | bgcolor="#eeffff" |<br> |
+ | | bgcolor="#eeffff" |<br> |
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− | | {{Al/E3}} |
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+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R1]] |
||
− | | {{Al/E4}} |
||
− | | <br> |
+ | | bgcolor="#eeffff" |<br> |
− | | <br> |
+ | | bgcolor="#eeffff" |<br> |
− | | <br> |
+ | | bgcolor="#eeffff" |<br> |
− | | <br> |
+ | | bgcolor="#eeffff" |<br> |
− | | <br> |
+ | | bgcolor="#eeffff" |<br> |
− | | <br> |
+ | | bgcolor="#eeffff" |<br> |
+ | | bgcolor="#eeffff" |<br> |
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− | | [[Thermal Evaporation Recipes|A]] |
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+ | | bgcolor="#eeffff" |<br> |
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− | | [[Thermal Evaporation Recipes|A]] |
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− | | <br> |
+ | | bgcolor="#eeffff" |<br> |
− | | <br> |
+ | | bgcolor="#eeffff" |<br> |
− | | <br> |
+ | | bgcolor="#eeffff" |<br> |
− | | <br> |
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− | | <br> |
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|- |
|- |
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− | ! bgcolor="# |
+ | ! bgcolor="#d0e7ff" align="center" |Hf |
− | | bgcolor=" |
+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R1]] |
− | | bgcolor=" |
+ | | bgcolor="#eeffff" |<br> |
− | | bgcolor=" |
+ | | bgcolor="#eeffff" |<br> |
− | | bgcolor=" |
+ | | bgcolor="#eeffff" |<br>[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R1]] |
− | | bgcolor=" |
+ | | bgcolor="#eeffff" |<br> |
− | | bgcolor=" |
+ | | bgcolor="#eeffff" |<br> |
− | | bgcolor=" |
+ | | bgcolor="#eeffff" |<br> |
+ | | bgcolor="#eeffff" |<br> |
||
− | | bgcolor="EEFFFF" | {{rl|Sputtering Recipes|Sputter 4 (AJA ATC 2200-V)}} |
||
− | | |
+ | | bgcolor="#eeffff" |<br> |
− | | bgcolor=" |
+ | | bgcolor="#eeffff" |<br> |
− | | bgcolor=" |
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− | | bgcolor="EEFFFF" | {{rl|Atomic Layer Deposition Recipes|Pt deposition (ALD)}} |
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− | | bgcolor="EEFFFF" | <br> |
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|- |
|- |
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− | ! bgcolor="# |
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− | | {{Al/E1}} |
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− | | |
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− | | |
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− | | {{Al/E4}} |
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− | | <br> |
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+ | |[[Sputtering Recipes|R1]] |
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− | | <br> |
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− | | |
+ | |<br> |
− | | |
+ | |<br> |
− | | |
+ | |<br> |
− | | |
+ | |<br> |
− | | |
+ | |<br> |
− | | |
+ | |<br> |
− | | |
+ | |<br> |
+ | |[[Atomic Layer Deposition Recipes#AlN deposition .28ALD CHAMBER 3.29|R4]] |
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− | | <br> |
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− | | |
+ | |<br> |
− | | <br> |
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− | | <br> |
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|- |
|- |
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+ | !Hg |
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− | ! bgcolor="#D0E7FF" align="center" | Si |
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− | | bgcolor="EEFFFF" | {{Al/E2}} |
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− | | bgcolor="EEFFFF" | <br> |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | [[Sputtering Recipes|A]] |
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+ | | |
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− | | bgcolor="EEFFFF" | [[Sputtering Recipes|A]] |
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− | | bgcolor="EEFFFF" | <br> |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | {{rl|PECVD Recipes|PECVD 2 (Advanced Vacuum)|Amorphous-Si deposition (PECVD#2|Amorphous Si Films and Their Stress}} |
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+ | | |
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− | | bgcolor="EEFFFF" | [[PECVD_Recipes#Amorphous_Si_.28100.25SiH4_Ar_He.29|R]] |
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− | | bgcolor="EEFFFF" | <br> |
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− | | bgcolor="EEFFFF" | <br> |
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|- |
|- |
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− | ! bgcolor="# |
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− | | {{rl|Sputtering Recipes|SiN deposition (Sputter 3)}} |
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− | | [[Sputtering Recipes|A]] |
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− | | <br> |
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− | | [[Sputtering_Recipes#Si3N4_deposition_.28IBD.29|R]] |
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− | | {{rl|PECVD Recipes|SiN deposition (PECVD #1)}} |
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− | | {{rl|PECVD Recipes|SiN deposition (PECVD #2)}} |
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− | | {{rl|PECVD Recipes|SiN deposition (Unaxis VLR)}} |
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− | | <br> |
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− | | <br> |
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|- |
|- |
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+ | !InSb |
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− | ! bgcolor="#D0E7FF" align="center" | SiO<sub>2</sub> |
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− | | bgcolor="EEFFFF" | {{Al/E1}} |
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− | | bgcolor="EEFFFF" | {{Al/E2}} |
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− | | bgcolor="EEFFFF" | <br> |
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− | | bgcolor="EEFFFF" | <br> |
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− | | bgcolor="EEFFFF" | <br> |
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− | | bgcolor="EEFFFF" | <br> |
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− | | bgcolor="EEFFFF" | {{rl|Sputtering Recipes|SiO2 deposition (Sputter 3)}} |
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− | | bgcolor="EEFFFF" | [[Sputtering Recipes|A]] |
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− | | bgcolor="EEFFFF" | [[Sputtering Recipes|A]] |
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− | | bgcolor="EEFFFF" | [[Sputtering_Recipes#SiO2_deposition_.28IBD.29|R]] |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (PECVD #1)}} |
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− | | bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (PECVD #2)}} |
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− | | bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (Unaxis VLR)}} |
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− | | bgcolor="EEFFFF" | {{rl|Atomic Layer Deposition Recipes|SiO2 deposition (ALD)}} |
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− | | bgcolor="EEFFFF" | <br> |
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|- |
|- |
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− | ! bgcolor="# |
+ | ! bgcolor="#d0e7ff" align="center" |Ir |
+ | |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R1]] |
||
− | | <br> |
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− | | |
+ | |<br> |
− | | |
+ | |<br> |
+ | |[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R1]] |
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− | | <br> |
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− | | |
+ | |<br> |
− | | |
+ | |<br> |
− | | |
+ | |<br> |
− | | |
+ | |<br> |
+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 1|R1]] |
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− | | <br> |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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− | | [[Sputtering_Recipes#Ion_Beam_Deposition_.28Veeco_NEXUS.29|A]] |
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− | | |
+ | |<br> |
− | | |
+ | |<br> |
+ | |<br> |
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− | | [[PECVD_Recipes#PECVD_1_.28PlasmaTherm_790.29|R]] |
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− | | |
+ | |<br> |
− | | |
+ | |<br> |
− | | <br> |
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− | | <br> |
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|- |
|- |
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− | ! bgcolor="# |
+ | ! bgcolor="#d0e7ff" align="center" |ITO |
− | | bgcolor=" |
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− | | bgcolor=" |
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− | | bgcolor=" |
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− | | bgcolor=" |
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− | | bgcolor=" |
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− | | bgcolor="EEFFFF" | <br> |
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− | | bgcolor="EEFFFF" | <br> |
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|- |
|- |
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+ | !KCl |
||
− | ! bgcolor="#D0E7FF" align="center" | SrF<sub>2</sub> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | {{Al/E2}} |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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− | | <br> |
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− | | <br> |
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|- |
|- |
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+ | !LiF |
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− | ! bgcolor="#D0E7FF" align="center" | Ta |
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+ | | |
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− | | bgcolor="EEFFFF" | {{Al/E1}} |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | {{rl|Sputtering Recipes|Ta deposition (Sputter 3)}} |
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+ | | |
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− | | bgcolor="EEFFFF" | [[Sputtering Recipes|A]] |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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− | | bgcolor="EEFFFF" | <br> |
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− | | bgcolor="EEFFFF" | <br> |
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|- |
|- |
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+ | !Mg |
||
− | ! bgcolor="#D0E7FF" align="center" | Ta<sub>2</sub>O<sub>5</sub> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | {{Al/E2}} |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 1|R1]] |
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− | | <br> |
||
+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
||
− | | [[Sputtering_Recipes#Ta2O5_deposition_.28IBD.29|R]] |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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− | | <br> |
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− | | <br> |
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|- |
|- |
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− | ! bgcolor="# |
+ | ! bgcolor="#d0e7ff" align="center" |MgF2 |
+ | | |
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− | | bgcolor="EEFFFF" | {{Al/E1}} |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | {{Al/E3}} |
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+ | | |
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− | | bgcolor="EEFFFF" | {{Al/E4}} |
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+ | |[[Sputtering Recipes|R1]] |
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− | | bgcolor="EEFFFF" | <br> |
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+ | |[[Sputtering Recipes|R1]] |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | [[Sputtering Recipes|A]] {{rl|Sputtering Recipes|Sputter 3 (AJA ATC 2000-F)}} |
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− | | bgcolor="EEFFFF" | {{rl|Sputtering Recipes|Ti-Au Deposition (Sputter 4)}} |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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− | | bgcolor="EEFFFF" | <br> |
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− | | bgcolor="EEFFFF" | <br> |
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|- |
|- |
||
− | ! bgcolor="# |
+ | ! bgcolor="#d0e7ff" align="center" |MgO |
+ | | |
||
− | | <br> |
||
+ | |[[E-Beam Evaporation Recipes#E-Beam 2 .28Custom.29|R2]] |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | [[Sputtering Recipes|A]] |
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+ | | |
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− | | <br> |
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+ | | |
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− | | [[Sputtering Recipes|R]] |
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+ | | |
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− | | <br> |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
||
− | | [[Sputtering_Recipes#Ion_Beam_Deposition_.28Veeco_NEXUS.29|A]] |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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− | | {{rl|Atomic Layer Deposition Recipes|TiN deposition (ALD)}} |
||
− | | <br> |
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|- |
|- |
||
+ | !Mn |
||
− | ! bgcolor="#D0E7FF" align="center" | TiW |
||
+ | | |
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− | | bgcolor="EEFFFF" | {{Al/E1}} |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | [[Sputtering Recipes|A]] |
||
+ | | |
||
− | | bgcolor="EEFFFF" | {{rl|Sputtering Recipes|W-TiW Deposition (Sputter 4)}} |
||
+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 1|R2]] |
||
− | | bgcolor="EEFFFF" | <br> |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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− | | bgcolor="EEFFFF" | <br> |
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− | | bgcolor="EEFFFF" | <br> |
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|- |
|- |
||
+ | !MnS |
||
− | ! bgcolor="#D0E7FF" align="center" | TiO<sub>2</sub> |
||
+ | | |
||
− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | {{Al/E2}} |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | {{Rl|Sputtering Recipes|TiO2 deposition (Sputter 2)}} |
||
+ | | |
||
− | | bgcolor="EEFFFF" | [[Sputtering Recipes|A]] |
||
+ | | |
||
− | | bgcolor="EEFFFF" | [[Sputtering Recipes|A]] {{rl|Sputtering Recipes|Sputter 4 (AJA ATC 2200-V)|TiO<sub>2</sub> Deposition (Sputter 4)}} |
||
+ | | |
||
− | | bgcolor="EEFFFF" | <br> |
||
+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
||
− | | bgcolor="EEFFFF" | [[Sputtering_Recipes#TiO2_deposition_.28IBD.29|R]] |
||
+ | | |
||
− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
||
− | | bgcolor="EEFFFF" | <br> |
||
− | | bgcolor="EEFFFF" | {{rl|Atomic Layer Deposition Recipes|TiO2 deposition (ALD)}} |
||
− | | bgcolor="EEFFFF" | <br> |
||
|- |
|- |
||
− | ! bgcolor="# |
+ | ! bgcolor="#d0e7ff" align="center" |Mo |
+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]] |
||
− | | <br> |
||
− | | <br> |
+ | | bgcolor="#eeffff" |<br> |
− | | <br> |
+ | | bgcolor="#eeffff" |<br> |
− | | <br> |
+ | | bgcolor="#eeffff" |<br> |
+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R3]] |
||
− | | <br> |
||
+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R1]] |
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− | | <br> |
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+ | | bgcolor="#eeffff" |<br> |
||
− | | [[Sputtering Recipes|A]] |
||
+ | | bgcolor="#eeffff" |<br> |
||
− | | [[Sputtering Recipes|A]] |
||
− | | <br> |
+ | | bgcolor="#eeffff" |<br> |
+ | | bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
||
− | | <br> |
||
− | | <br> |
+ | | bgcolor="#eeffff" |<br> |
− | | <br> |
+ | | bgcolor="#eeffff" |<br> |
− | | <br> |
+ | | bgcolor="#eeffff" |<br> |
− | | <br> |
+ | | bgcolor="#eeffff" |<br> |
− | | <br> |
+ | | bgcolor="#eeffff" |<br> |
− | | <br> |
||
− | | <br> |
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|- |
|- |
||
+ | !Na |
||
− | ! bgcolor="#D0E7FF" align="center" | W |
||
+ | | |
||
− | | bgcolor="EEFFFF" | {{Al/E1}} |
||
+ | | |
||
− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
||
− | | bgcolor="EEFFFF" | [[Sputtering Recipes|A]] |
||
+ | | |
||
− | | bgcolor="EEFFFF" | {{rl|Sputtering Recipes|W deposition (Sputter 4)}} |
||
+ | | |
||
− | | bgcolor="EEFFFF" | <br> |
||
+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
||
− | | bgcolor="EEFFFF" | <br> |
||
+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
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+ | | |
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− | | bgcolor="EEFFFF" | <br> |
||
− | | bgcolor="EEFFFF" | <br> |
||
− | | bgcolor="EEFFFF" | <br> |
||
|- |
|- |
||
+ | !NaCl |
||
− | ! bgcolor="#D0E7FF" align="center" | Zn |
||
+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
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+ | | |
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− | | <br> |
||
+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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− | | <br> |
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+ | ! bgcolor="#d0e7ff" align="center" |Ni |
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+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]] |
+ | | bgcolor="#eeffff" |<br> |
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− | | width="65" bgcolor="#DAF1FF" | [[E-Beam Evaporation Recipes#E-Beam_2_.28Custom.29|E-Beam 2 (Custom)]] |
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+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 3 .28Temescal.29|R2]] |
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− | | width="65" bgcolor="#DAF1FF" | [[Sputtering Recipes#Sputter_2_.28SFI_Endeavor.29|Sputter 2<br>(SFI Endeavor)]] |
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− | | width="65" bgcolor="#DAF1FF" | [[Sputtering Recipes#Sputter_3_.28ATC_2000-F.29|Sputter 3<br>(ATC 2000-F)]] |
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− | | width="65" bgcolor="#DAF1FF" | [[Sputtering_Recipes#Sputter_4_.28AJA_ATC_2200-V.29|Sputter 4<br>(ATC 2200-V)]] |
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− | | width="55" bgcolor="#DAF1FF" | [[Sputtering_Recipes#Ion_Beam_Deposition_.28Veeco_NEXUS.29|Ion Beam<br>Deposition (Veeco Nexus)]] |
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− | | width="45" bgcolor="#DAF1FF" | [[Thermal Evaporation Recipes#Thermal_Evap_1|Thermal<br>Evap 1]] |
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− | | width="65" bgcolor="#DAF1FF" | [[Thermal Evaporation Recipes#Thermal_Evap_2_.28Solder.29|Thermal Evap 2 (Solder)]] |
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+ | | bgcolor="#eeffff" |<br> |
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− | | width="65" bgcolor="#DAF1FF" | [[PECVD Recipes#PECVD_1_.28PlasmaTherm_790.29|PECVD 1<br>(PlasmaTherm 790)]] |
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− | | width="65" bgcolor="#DAF1FF" | [[PECVD Recipes#PECVD_2_.28Advanced_Vacuum.29|PECVD 2<br>(Advanced Vacuum)]] |
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− | | width="65" bgcolor="#DAF1FF" | [[PECVD_Recipes#ICP-PECVD_.28Unaxis_VLR.29|Unaxis VLR ICP-PECVD]] |
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+ | |- |
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− | | width="65" bgcolor="#DAF1FF" | [[Atomic_Layer_Deposition_Recipes|Atomic Layer Deposition (Oxford FlexAl)]] |
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+ | ! bgcolor="#d0e7ff" align="center" |NiCr |
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− | | width="65" bgcolor="#DAF1FF" | [[Molecular Vapor Deposition|Molecular Vapor Deposition (Tool)]] |
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+ | |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]] |
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+ | |[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]] |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 1|R3]] |
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+ | ! bgcolor="#d0e7ff" align="center" |NiFe |
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+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R1]] |
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+ | | bgcolor="#eeffff" | |
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+ | | bgcolor="#eeffff" | |
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+ | ! bgcolor="#d0e7ff" align="center" |Pd |
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+ | |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]] |
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+ | |<br> |
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+ | |[[E-Beam Evaporation Recipes#E-Beam 3 .28Temescal.29|R2]] |
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+ | |[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]] |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 1|R3]] |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |- |
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+ | ! bgcolor="#d0e7ff" align="center" |Pt |
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+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 3 .28Temescal.29|R2]] |
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+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]] |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R3]] |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R3]] |
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+ | | bcolor="EEFFFF" |[[Sputtering Recipes|R3]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[Atomic Layer Deposition Recipes#Pt deposition .28ALD CHAMBER 1.29|R4]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | |- |
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+ | ! bgcolor="#d0e7ff" align="center" |Ru |
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+ | |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]] |
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+ | |<br> |
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+ | |<br> |
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+ | |[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]] |
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+ | |<br> |
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+ | |[[Sputtering Recipes#Ru Deposition .28Sputter 4.29|R3]] |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |[[Atomic Layer Deposition Recipes#Pt deposition .28ALD CHAMBER 1.29|R4]] |
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+ | |<br> |
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+ | |- |
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+ | !Sb |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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+ | ! bgcolor="#d0e7ff" align="center" |Si |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 2 .28Custom.29|R2]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R3]] |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R1]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |R1 |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[https://wiki.nanotech.ucsb.edu/w/index.php?title=PECVD_Recipes#Amorphous-Si_deposition_.28PECVD_.232.29 R3] |
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+ | | bgcolor="#eeffff" | |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | |- |
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+ | ! bgcolor="#d0e7ff" align="center" |SiN |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |[[Sputtering Recipes|R3]] |
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+ | |[[Sputtering Recipes|R1]] |
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+ | |<br> |
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+ | |[[Sputtering Recipes#Si3N4 deposition .28IBD.29|R6]] |
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+ | |<br> |
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+ | |<br> |
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+ | |[[PECVD Recipes#SiN deposition .28PECVD .231.29|R6]] |
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+ | |[[PECVD Recipes#SiN deposition .28PECVD .232.29|R6]] |
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+ | |[[PECVD Recipes#ICP-PECVD .28Unaxis VLR.29|R6]] |
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+ | |<br> |
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+ | |<br> |
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+ | ! bgcolor="#d0e7ff" align="center" |SiN - Low Stress |
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+ | |[[PECVD Recipes#Low Stress Si3N4 .28PECVD.231.29|R4]] |
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+ | |[[PECVD Recipes#Low-Stress SiN deposition .28PECVD .232.29|R6]] |
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+ | |[[PECVD Recipes#ICP-PECVD .28Unaxis VLR.29|R6]] |
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+ | | |
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+ | | |
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+ | |- |
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+ | ! bgcolor="#d0e7ff" align="center" |SiO<sub>2</sub> |
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+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]] |
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+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 2 .28Custom.29|R2]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R3]] |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R1]] |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R2]] |
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+ | | bgcolor="#eeffff" |[[Sputtering_Recipes#SiO2_deposition_.28IBD.29|R6]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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+ | | bgcolor="#eeffff" |[[PECVD Recipes#SiO2 deposition .28PECVD .231.29|R6]] |
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+ | | bgcolor="#eeffff" |[[PECVD Recipes#SiO2 deposition .28PECVD .232.29|R6]] |
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+ | | bgcolor="#eeffff" |[[PECVD Recipes#ICP-PECVD .28Unaxis VLR.29|R6]] |
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+ | | bgcolor="#eeffff" |[[Atomic Layer Deposition Recipes#Pt deposition .28ALD CHAMBER 1.29|R4]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | |- |
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+ | !SiO<sub>x</sub> |
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+ | | |
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+ | |[[E-Beam Evaporation Recipes#E-Beam 2 .28Custom.29|R1]] |
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+ | | |
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+ | !SiO |
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+ | | |
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+ | | |
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+ | | |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 1|R1]] |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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+ | | |
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+ | | |
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+ | | |
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+ | | |
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+ | | |
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+ | |- |
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+ | ! bgcolor="#d0e7ff" align="center" |SiO<sub>x</sub>N<sub>y</sub> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |[[Sputtering Recipes#Si3N4 deposition .28IBD.29|R3]] |
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+ | |<br> |
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+ | |<br> |
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+ | |[[PECVD Recipes#SiO2 deposition .28PECVD .231.29|R4]] |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |- |
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+ | ! bgcolor="#d0e7ff" align="center" |Sn |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R2]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | |- |
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+ | ! bgcolor="#d0e7ff" align="center" |SrF<sub>2</sub> |
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+ | |<br> |
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+ | |[[E-Beam Evaporation Recipes#E-Beam 2 .28Custom.29|R2]] |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 1|R1]] |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |- |
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+ | ! bgcolor="#d0e7ff" align="center" |Ta |
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+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R1]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R3]] |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R1]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |R1 |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | |- |
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+ | ! bgcolor="#d0e7ff" align="center" |Ta<sub>2</sub>O<sub>5</sub> |
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+ | |<br> |
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+ | |[[E-Beam Evaporation Recipes#E-Beam 2 .28Custom.29|R1]] |
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+ | |<br> |
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+ | |[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R1]] |
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+ | |<br> |
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+ | |<br> |
||
+ | |<br> |
||
+ | |[[Sputtering Recipes#Si3N4 deposition .28IBD.29|R6]] |
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+ | |<br> |
||
+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
||
+ | |<br> |
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+ | |- |
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+ | ! bgcolor="#d0e7ff" align="center" |Ti |
||
+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]] |
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+ | | bgcolor="#eeffff" |<br> |
||
+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 3 .28Temescal.29|R2]] |
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+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]] |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R3]] |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R3]] |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R3]] |
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+ | | bgcolor="#eeffff" |R1 |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R2]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | |- |
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+ | ! bgcolor="#d0e7ff" align="center" |TiN |
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+ | |<br> |
||
+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |[https://wiki.nanotech.ucsb.edu/w/index.php?title=Sputtering_Recipes#Sputter_4_.28AJA_ATC_2200-V.29 R3] |
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+ | |<br> |
||
+ | |R1 |
||
+ | |<br> |
||
+ | |<br> |
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+ | |<br> |
||
+ | |<br> |
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+ | |<br> |
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+ | |[[Atomic Layer Deposition Recipes#Pt deposition .28ALD CHAMBER 1.29|R4]] |
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+ | |<br> |
||
+ | |- |
||
+ | ! bgcolor="#d0e7ff" align="center" |TiW |
||
+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R1]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R2]] |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R3]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | |- |
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+ | !TiO |
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+ | | |
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+ | | |
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+ | | |
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+ | | |
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+ | | |
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+ | | |
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+ | | |
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+ | | |
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+ | | |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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+ | | |
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+ | | |
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+ | | |
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+ | | |
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+ | | |
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+ | |- |
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+ | ! bgcolor="#d0e7ff" align="center" |TiO<sub>2</sub> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 2 .28Custom.29|R2]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R1]] |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R3]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes#Si3N4 deposition .28IBD.29|R5]] |
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+ | | bgcolor="#eeffff" |<br> |
||
+ | | bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[Atomic Layer Deposition Recipes#Pt deposition .28ALD CHAMBER 1.29|R4]] |
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+ | | bgcolor="#eeffff" |<br> |
||
+ | |- |
||
+ | ! bgcolor="#d0e7ff" align="center" |V |
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+ | |<br> |
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+ | |<br> |
||
+ | |<br> |
||
+ | |<br> |
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+ | |[[Sputtering Recipes|R1]] |
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+ | |[[Sputtering Recipes|R1]] |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
||
+ | |- |
||
+ | ! bgcolor="#d0e7ff" align="center" |W |
||
+ | | bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R2]] |
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+ | | bgcolor="#eeffff" |[[Sputtering Recipes|R3]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | |- |
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+ | !WC |
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+ | | |
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+ | | |
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+ | | |
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+ | | |
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+ | | |
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+ | | |
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+ | | |
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+ | | |
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+ | | |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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+ | | |
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+ | | |
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+ | | |
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+ | | |
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+ | | |
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+ | |- |
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+ | ! bgcolor="#d0e7ff" align="center" |Zn |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
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+ | |<br> |
||
+ | |<br> |
||
+ | |<br> |
||
+ | |<br> |
||
+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 1|R3]] |
||
+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R2]] |
||
+ | |<br> |
||
+ | |<br> |
||
+ | |<br> |
||
+ | |<br> |
||
+ | |<br> |
||
+ | |- |
||
+ | ! bgcolor="#d0e7ff" align="center" |ZnO |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
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+ | | bgcolor="#eeffff" |<br> |
||
+ | | bgcolor="#eeffff" |<br> |
||
+ | | bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 1|R1]] |
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+ | | bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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+ | | bgcolor="#eeffff" |<br> |
||
+ | | bgcolor="#eeffff" |<br> |
||
+ | | bgcolor="#eeffff" |<br> |
||
+ | | bgcolor="#eeffff" |[[Atomic Layer Deposition Recipes#Pt deposition .28ALD CHAMBER 1.29|R3]] |
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+ | | bgcolor="#eeffff" |<br> |
||
+ | |- |
||
+ | !ZnS |
||
+ | | |
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+ | | |
||
+ | | |
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+ | | |
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+ | | |
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+ | | |
||
+ | | |
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+ | | |
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+ | | |
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+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
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+ | | |
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+ | | |
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+ | | |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | ! bgcolor="#d0e7ff" align="center" |Zr |
||
+ | |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]] |
||
+ | |<br> |
||
+ | |<br> |
||
+ | |[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]] |
||
+ | |[[Sputtering Recipes|R1]] |
||
+ | |[[Sputtering Recipes|R1]] |
||
+ | |<br> |
||
+ | |<br> |
||
+ | |<br> |
||
+ | |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
||
+ | |<br> |
||
+ | |<br> |
||
+ | |<br> |
||
+ | |<br> |
||
+ | |<br> |
||
+ | |- |
||
+ | ! bgcolor="#d0e7ff" align="center" |ZrO<sub>2</sub> |
||
+ | | bgcolor="#eeffff" |<br> |
||
+ | | bgcolor="#eeffff" |<br> |
||
+ | | bgcolor="#eeffff" |<br> |
||
+ | | bgcolor="#eeffff" |<br> |
||
+ | | bgcolor="#eeffff" |<br> |
||
+ | | bgcolor="#eeffff" |<br> |
||
+ | | bgcolor="#eeffff" |<br> |
||
+ | | bgcolor="#eeffff" |<br> |
||
+ | | bgcolor="#eeffff" |<br> |
||
+ | | bgcolor="#eeffff" |[[Thermal Evaporation Recipes#Thermal Evaporator 2|R1]] |
||
+ | | bgcolor="#eeffff" |<br> |
||
+ | | bgcolor="#eeffff" |<br> |
||
+ | | bgcolor="#eeffff" |<br> |
||
+ | | bgcolor="#eeffff" |[[Atomic Layer Deposition Recipes#Pt deposition .28ALD CHAMBER 1.29|R4]] |
||
+ | | bgcolor="#eeffff" |<br> |
||
+ | |- |
||
+ | ! width="20" bgcolor="#d0e7ff" align="center" |'''Material''' |
||
+ | | width="65" bgcolor="#daf1ff" |[[E-Beam Evaporation Recipes#E-Beam_1_.28Sharon.29|E-Beam 1 (Sharon)]] |
||
+ | | width="65" bgcolor="#daf1ff" |[[E-Beam Evaporation Recipes#E-Beam_2_.28Custom.29|E-Beam 2 (Custom)]] |
||
+ | | width="65" bgcolor="#daf1ff" |[[E-Beam Evaporation Recipes#E-Beam_3_.28Temescal.29|E-Beam 3 (Temescal)]] |
||
+ | | width="65" bgcolor="#daf1ff" |[[E-Beam Evaporation Recipes#E-Beam_4_.28CHA.29|E-Beam 4 (CHA)]] |
||
+ | | width="65" bgcolor="#daf1ff" |[[Sputtering Recipes#Sputter_3_.28ATC_2000-F.29|Sputter 3<br>(ATC 2000-F)]] |
||
+ | | width="65" bgcolor="#daf1ff" |[[Sputtering_Recipes#Sputter_4_.28AJA_ATC_2200-V.29|Sputter 4<br>(ATC 2200-V)]] |
||
+ | | width="65" bgcolor="#daf1ff" |[[Sputtering Recipes|Sputter 5 (ATC 2200-V)]] |
||
+ | | width="55" bgcolor="#daf1ff" |[[Sputtering_Recipes#Ion_Beam_Deposition_.28Veeco_NEXUS.29|Ion Beam<br>Deposition (Veeco Nexus)]] |
||
+ | | width="45" bgcolor="#daf1ff" |[[Thermal Evaporation Recipes#Thermal_Evap_1|Thermal<br>Evap 1]] |
||
+ | | width="65" bgcolor="#daf1ff" |[[Thermal Evaporation Recipes#Thermal_Evap_2_.28Solder.29|Thermal Evap 2 (Solder)]] |
||
+ | | width="65" bgcolor="#daf1ff" |[[PECVD Recipes#PECVD_1_.28PlasmaTherm_790.29|PECVD 1<br>(PlasmaTherm 790)]] |
||
+ | | width="65" bgcolor="#daf1ff" |[[PECVD Recipes#PECVD_2_.28Advanced_Vacuum.29|PECVD 2<br>(Advanced Vacuum)]] |
||
+ | | width="65" bgcolor="#daf1ff" |[[PECVD_Recipes#ICP-PECVD_.28Unaxis_VLR.29|Unaxis VLR ICP-PECVD]] |
||
+ | | width="65" bgcolor="#daf1ff" |[[Atomic_Layer_Deposition_Recipes|Atomic Layer Deposition (Oxford FlexAl)]] |
||
+ | | width="65" bgcolor="#daf1ff" |[[Molecular Vapor Deposition|Molecular Vapor Deposition (Tool)]] |
||
|} |
|} |
||
+ | ===Process Ranking Table=== |
||
+ | Processes in the table above are ranked by their "''Process Maturity Level''" as follows: |
||
+ | {| class="wikitable" |
||
+ | |'''Process Level''' |
||
+ | | colspan="11" |'''Description of Process Level Ranking''' |
||
+ | |- |
||
+ | |A |
||
+ | | colspan="11" |Process '''A'''llowed and materials available but never done |
||
+ | |- |
||
+ | |R1 |
||
+ | | colspan="11" |Process has been ran at least once |
||
+ | |- |
||
+ | |R2 |
||
+ | | colspan="11" |Process has been ran and/or procedure is documented or/and data available |
||
+ | |- |
||
+ | |R3 |
||
+ | | colspan="11" |Process has been ran, procedure is documented, and data is available |
||
+ | |- |
||
+ | |R4 |
||
+ | | colspan="11" |Process has a documented procedure with regular (≥4x per year) data '''or''' lookahead/in-Situ control available |
||
+ | |- |
||
+ | |R5 |
||
+ | | colspan="11" |Process has a documented procedure with regular (≥4x per year) data '''and''' lookahead/in-Situ control available |
||
+ | |- |
||
+ | |R6 |
||
+ | | colspan="11" |Process has a documented procedure, regular ( ≥4x per year) data, and control charts/limits available |
||
+ | |} |
||
[[Category:Processing]] |
[[Category:Processing]] |
Latest revision as of 17:11, 23 August 2024
Process Control Data
See linked page for process control data (calibration data over time, such as dep. rate, refractive index, stress etc.) over time, for a selection of highly used tools/films.
Deposition Tools/Materials Table
The Key/Legend for this table's A...R6
values is at the bottom of the page.
Process Ranking Table
Processes in the table above are ranked by their "Process Maturity Level" as follows:
Process Level | Description of Process Level Ranking | ||||||||||
A | Process Allowed and materials available but never done | ||||||||||
R1 | Process has been ran at least once | ||||||||||
R2 | Process has been ran and/or procedure is documented or/and data available | ||||||||||
R3 | Process has been ran, procedure is documented, and data is available | ||||||||||
R4 | Process has a documented procedure with regular (≥4x per year) data or lookahead/in-Situ control available | ||||||||||
R5 | Process has a documented procedure with regular (≥4x per year) data and lookahead/in-Situ control available | ||||||||||
R6 | Process has a documented procedure, regular ( ≥4x per year) data, and control charts/limits available |