Dicing Saw (ADT): Difference between revisions

From UCSB Nanofab Wiki
Jump to navigation Jump to search
(→‎Detailed Specifications: deleted old SOP, Lee's SOP only)
(→‎About: added Recipes > Example dicing Instructions for remote work)
 
(13 intermediate revisions by 2 users not shown)
Line 1: Line 1:
{{tool|{{PAGENAME}}
{{tool2|{{PAGENAME}}
|picture=ADT.jpg
|picture=ADT.jpg
|type = Packaging
|type = Packaging
|super= Lee Sawyer
|super= Lee Sawyer
|super2= Aidan Hopkins
|location=Dicing Room: ESB 1147
|location=Backend Lab: ESB 1111
|description = ADT Dicing Saw
|description = ADT Dicing Saw
|model = ADT 7100
|model = ADT 7100
Line 11: Line 12:
}}
}}
==About==
==About==
The Model 7100 Series is a semi-automatic dicing saw. Semiconductor, glass, and plastic substrates of all types can be automatically or manually cut. This dicing Saw is optimized for multi-angle dicing of tight tolerance substrates up to 200 mm diameter in size.
⚫
The ADT 7100 Dicing Saw is optimized for multi-angle dicing of thin, tight tolerance products up to 200 mm x 200 mm. It is currently setup for dicing up to 8” diameter wafers. Check the [https://wiki.nanotech.ucsb.edu/w/index.php?title=Packaging_Recipes#Dicing_Saw_Recipes_.28ADT_7100.29 Dicing Saw Recipes page] for the blades we currently stock.


⚫
Check the [https://wiki.nanotech.ucsb.edu/w/index.php?title=Packaging_Recipes#Dicing_Saw_Recipes_.28ADT_7100.29 Dicing Saw Recipes page] for the blades we currently stock.
⚫
An ADT WM-966 tape applicator & Ultron Systems UH104-8 UV lamp system is used to apply UV-release tape for securing die during dicing.


⚫
An ADT WM-966 tape applicator is used to mount samples to UV-release tape for dicing and an Ultron Systems UH104-8 UV lamp system is used to release samples from the tape after dicing.
⚫
Contact the tool supervisor for blades and dicing frames for your group.

⚫
Contact Staff for blades and dicing frames for your group.


==Detailed Specifications==
==Detailed Specifications==


* Maximum Wafer Size: 8"
*Maximum Wafer Size: 8"
* Parts mounted to UV-release tape for cutting
*Parts mounted to UV-release tape for dicing
* Automated cut maps at multiple angles (0° and 90° typical)
*Automated cut maps at multiple angles (0° and 90° typical)
**"Polygon" cutting to approximate Coring wafers is possible.
* ~few micron alignment to on-wafer features.
*~Few micron alignment to on-wafer features.
* Thermocarbon Resnoid dicing blades provided by staff
*Thermocarbon Resnoid dicing blades provided by Staff


==Operating Procedures==
==Operating Procedures==


*[https://wiki.nanotech.ucsb.edu/w/images/5/57/ADT_SOP_Rev_D.pdf ADT Dicing Saw Standard Operating Procedure]
*[https://wiki.nanofab.ucsb.edu/w/images/5/54/ADT_SOP_Rev_J.pdf ADT Dicing Saw Standard Operating Procedure]
*[https://wiki.nanofab.ucsb.edu/w/images/5/5c/Post_Dicing_Tape_Expansion_SOP.pdf Post Dicing Tape Expansion]
*[[ADT 7100 - Recovering an Old Recipe (2019)|Recovering an Old Recipe]]
*[https://wiki.nanofab.ucsb.edu/w/images/5/5a/Ultron_1042R_Film_specs.pdf Ultron Systems, Inc. 1042R Anti-Static Ultraviolet Film TDS]

*[https://wiki.nanofab.ucsb.edu/w/images/5/59/Recipe_Importing_New_Software.pdf Recovering an Old Recipe (2023)]

==Recipes==
==Recipes==


Line 36: Line 40:


Be sure to also see the recipes for protecting your sample from dicing dust, and mounting/unmounting.
Be sure to also see the recipes for protecting your sample from dicing dust, and mounting/unmounting.

==== Dicing Processing Parameters ====
If you are not familiar with dicing, the following document lists the important parameters you need to document before starting your job:

* [[Media:Dicing - Example Dicing Instructions for UC Santa Barbara v2.pptx|Example Dicing Instructions for UC Santa Barbara v2.pptx]] ''- by Demis D. John''

Latest revision as of 21:29, 9 December 2024

Dicing Saw (ADT)
ADT.jpg
Location Backend Lab: ESB 1111
Tool Type Packaging
Manufacturer Advanced Dicing Technologies Ltd.
Model ADT 7100
Description ADT Dicing Saw
Primary Supervisor Lee Sawyer
(805) 893-2123
lee_sawyer@ucsb.edu

Secondary Supervisor

Aidan Hopkins

Recipes
SignupMonkey: Sign up for this tool


About

The Model 7100 Series is a semi-automatic dicing saw. Semiconductor, glass, and plastic substrates of all types can be automatically or manually cut. This dicing Saw is optimized for multi-angle dicing of tight tolerance substrates up to 200 mm diameter in size.

Check the Dicing Saw Recipes page for the blades we currently stock.

An ADT WM-966 tape applicator is used to mount samples to UV-release tape for dicing and an Ultron Systems UH104-8 UV lamp system is used to release samples from the tape after dicing.

Contact Staff for blades and dicing frames for your group.

Detailed Specifications

  • Maximum Wafer Size: 8"
  • Parts mounted to UV-release tape for dicing
  • Automated cut maps at multiple angles (0° and 90° typical)
    • "Polygon" cutting to approximate Coring wafers is possible.
  • ~Few micron alignment to on-wafer features.
  • Thermocarbon Resnoid dicing blades provided by Staff

Operating Procedures

Recipes

Be sure to also see the recipes for protecting your sample from dicing dust, and mounting/unmounting.

Dicing Processing Parameters

If you are not familiar with dicing, the following document lists the important parameters you need to document before starting your job:

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Dicing_Saw_(ADT)&oldid=162665"