Resistivity Mapper (CDE RESMAP): Difference between revisions

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|picture=CDEResmap.jpg
|picture=CDEResmap.jpg
|type = Inspection, Test and Characterization
|type = Inspection, Test and Characterization
|super= Tony Bosch
|super= Bill Millerski
|phone=(805)839-3918x217
|phone=(805)839-3918x217
|location=Bay ?
|location=Bay ?

Revision as of 15:33, 28 October 2021

Resistivity Mapper (CDE RESMAP)
CDEResmap.jpg
Tool Type Inspection, Test and Characterization
Location Bay ?
Supervisor Bill Millerski
Supervisor Phone (805) 893-2655
Supervisor E-Mail wmillerski@ucsb.edu
Description CDE Resmap 4 Point Resistivity Mapper
Manufacturer Creative Design Engineering


About

The CDE Resmap 4 point resistivity mapper is used for measuring resistivity across the wafer for substrates and thin films deposited in the facility. The system can do automated resistivity mapping for pieces to 8 inch wafers.

The resistivity range is 2 mOhm/Square to 5 MOhm/square. Contour plots, 3D plots, histograms, data exporting are supported from the Windows XP based control system.

Instructions

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