Surface Analysis (KLA/Tencor Surfscan): Difference between revisions
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**''For detailed measurement info, it is highly recommended that you read the manual.'' |
**''For detailed measurement info, it is highly recommended that you read the manual.'' |
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*[[media:Surfscan-Surfscan 6200 info.pdf|Surfscan Info]] |
*[[media:Surfscan-Surfscan 6200 info.pdf|Surfscan Info]] |
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*[https://drive.google.com/drive/u/1/folders/1NzZgUnXo_v2WmsHIfcrsPku9o7lUICxz Standard recipes][[File:UCSBTEST.png|left|thumb|'''UCSBTEST2''' for big size particles '''(1.6-28.0)um''']][[File:UCSBTEST2 for small particles.png|left|thumb|'''UCSBTEST2''' for small size particles '''(0.16-1.6)um''']] |
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*[[Surfscan6200 photos]] |
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Revision as of 21:38, 26 March 2019
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About
This system uses a laser-based scattering method to count size and distribution of particles (or other scattering defects) on a flat wafer surface. It can scan wafers in size from 4 to 6 inches.
Documentation
- Standard Operating Procedure
- Operations Manual
- For detailed measurement info, it is highly recommended that you read the manual.
- Surfscan Info
- Standard recipes
