Template:Announcements: Difference between revisions
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=====E-Beam #4 (CHA) - |
=====E-Beam #4 (CHA) - UP ===== |
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Cry replaced, system ready for use. |
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After extensive troubleshooting it looks like the cryo pump will need to be replaced. We are hopeful the system will be ready to run sometime tomorrow early afternoon. |
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Tony |
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=====PECVD #2 is UP===== |
=====PECVD #2 is UP===== |
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The tool is up, intial film checks show same dep. rates as before. |
The tool is up, intial film checks show same dep. rates as before. |
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Revision as of 21:58, 14 February 2024
E-Beam #4 (CHA) - UP
Cry replaced, system ready for use. //Demis D. John 13:58, 14 February 2024 (PST)
PECVD #2 is UP
The tool is up, intial film checks show same dep. rates as before. //Demis D. John 11:56, 13 February 2024 (PST)
RIE 5 is up
RIE 5 is up except for processes that use SiCl4.
//Vraj Mehalana 09:39, 30 January 2024 (PST)
Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update
We received most of the chamber assembly replacement parts today. We are still waiting on the lamps and chamber o-rings which are scheduled to be delivered in the next couple of days. Once we have all the parts, we'll start to reassemble the chamber.
I'll send out an update in the next 2-3 days.
Thanks, //Vraj Mehalana 10:58, 5 February 2024 (PST)
ICP #1 is down - Update
Replacing the battery on the board did not resolve the tool issue.
Panasonic has located a replacement board for the tool. From what I gather they need to repair and test it and are hoping to have it ready to ship by the 16th. I'd like to add that there is the possibility that this will not resolve the issue but it is the best path forward at this point.
-Lee //Vraj Mehalana 09:39, 30 January 2024 (PST)
EBeam3 Planned Maintenance 2/21/24 - 2/22/24
The transfer arm installation has been postponed until next week due to other equipment being down at this time.
The work is now scheduled for 2/21/24 - 2/22/24. Please plan accordingly. //Demis D. John 11:56, 13 February 2024 (PST)
Job Opening: Process Engineer
The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the NanoFab Job Openings page for details.
//Demis D. John 14:52, 30 October 2023 (PDT)
Lab Access Changes: Symmetry App
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. IMPORTANT: check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled "Invitation to Access Symmetry App".
// John d 13:49, 7 November 2023 (PST)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)