Vacuum Deposition Recipes: Difference between revisions

From UCSB Nanofab Wiki
Jump to navigation Jump to search
No edit summary
(added Ebeams rankings)
Line 34: Line 34:
|-
|-
! bgcolor="#d0e7ff" align="center" |Ag
! bgcolor="#d0e7ff" align="center" |Ag
| bgcolor="#eeffff" |{{Al/E1}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |{{Al/E3}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 3 .28Temescal.29|R2]]
| bgcolor="#eeffff" |{{Al/E4}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]]
| bgcolor="#eeffff" |[[Sputtering Recipes|A]]
| bgcolor="#eeffff" |[[Sputtering Recipes|A]]
| bgcolor="#eeffff" |[[Sputtering Recipes|A]]
| bgcolor="#eeffff" |[[Sputtering Recipes|A]]
Line 51: Line 51:
|-
|-
! bgcolor="#d0e7ff" align="center" |Al
! bgcolor="#d0e7ff" align="center" |Al
|[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]]
|{{Al/E1}}
|<br>
|<br>
|[[E-Beam Evaporation Recipes#E-Beam 3 .28Temescal.29|R2]]
|{{Al/E3}}
|[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]]
|{{Al/E4}}
|[[Sputtering Recipes|A]]
|[[Sputtering Recipes|A]]
|{{rl|Sputtering Recipes|Al Deposition (Sputter 4)}}
|{{rl|Sputtering Recipes|Al Deposition (Sputter 4)}}
Line 68: Line 68:
|-
|-
! bgcolor="#d0e7ff" align="center" |Al<sub>2</sub>O<sub>3</sub>
! bgcolor="#d0e7ff" align="center" |Al<sub>2</sub>O<sub>3</sub>
| bgcolor="#eeffff" |{{Al/E1}}
| bgcolor="#eeffff" |
| bgcolor="#eeffff" |{{Al/E2}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 2 .28Custom.29|R2]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 83: Line 83:
| bgcolor="#eeffff" |[[Atomic Layer Deposition Recipes#Al2O3 deposition .28ALD CHAMBER 3.29|R4]]
| bgcolor="#eeffff" |[[Atomic Layer Deposition Recipes#Al2O3 deposition .28ALD CHAMBER 3.29|R4]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
|-
!AuGe
|[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R1]]
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|-
|-
! bgcolor="#d0e7ff" align="center" |AlN
! bgcolor="#d0e7ff" align="center" |AlN
Line 102: Line 119:
|-
|-
! bgcolor="#d0e7ff" align="center" |Au
! bgcolor="#d0e7ff" align="center" |Au
| bgcolor="#eeffff" |{{Al/E1}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |{{Al/E3}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 3 .28Temescal.29|R2]]
| bgcolor="#eeffff" |{{Al/E4}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]]
| bgcolor="#eeffff" |[[Sputtering Recipes|A]]
| bgcolor="#eeffff" |[[Sputtering Recipes|A]]
| bgcolor="#eeffff" |{{rl|Sputtering Recipes|Ti-Au Deposition (Sputter 4)}}
| bgcolor="#eeffff" |{{rl|Sputtering Recipes|Ti-Au Deposition (Sputter 4)}}
Line 136: Line 153:
|-
|-
! bgcolor="#d0e7ff" align="center" |C
! bgcolor="#d0e7ff" align="center" |C
| bgcolor="#eeffff" align="center" |{{rl|E-Beam Evaporation Recipes|Materials Table (E-Beam #1)}}
| bgcolor="#eeffff" align="center" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R3]]
| bgcolor="#eeffff" align="center" |
| bgcolor="#eeffff" align="center" |
| bgcolor="#eeffff" align="center" |
| bgcolor="#eeffff" align="center" |
Line 154: Line 171:
! bgcolor="#d0e7ff" align="center" |CeO<sub>2</sub>
! bgcolor="#d0e7ff" align="center" |CeO<sub>2</sub>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |{{rl|E-Beam Evaporation Recipes|E-Beam 2 (Custom)|CeO<sub>2</sub> deposition (E-Beam 2)}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 2 .28Custom.29|R3]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 170: Line 187:
|-
|-
! bgcolor="#d0e7ff" align="center" |Co
! bgcolor="#d0e7ff" align="center" |Co
| bgcolor="#eeffff" |{{Al/E1}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |{{Al/E4}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]]
| bgcolor="#eeffff" |[[Sputtering Recipes|R]]
| bgcolor="#eeffff" |[[Sputtering Recipes|R]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 187: Line 204:
|-
|-
! bgcolor="#d0e7ff" align="center" |Cr
! bgcolor="#d0e7ff" align="center" |Cr
|[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R1]]
|{{Al/E1}}
|<br>
|<br>
|<br>
|<br>
|[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]]
|{{Al/E4}}
|[https://wiki.nanotech.ucsb.edu/w/index.php?title=Sputtering_Recipes#Sputter_3_.28AJA_ATC_2000-F.29 R]
|[https://wiki.nanotech.ucsb.edu/w/index.php?title=Sputtering_Recipes#Sputter_3_.28AJA_ATC_2000-F.29 R]
|<br>
|<br>
Line 204: Line 221:
|-
|-
! bgcolor="#d0e7ff" align="center" |Cu
! bgcolor="#d0e7ff" align="center" |Cu
| bgcolor="#eeffff" |{{Al/E1}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R1]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 221: Line 238:
|-
|-
! bgcolor="#d0e7ff" align="center" |Fe
! bgcolor="#d0e7ff" align="center" |Fe
|[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]]
|{{Al/E1}}
|<br>
|<br>
|<br>
|<br>
|[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]]
|{{Al/E4}}
|[[Sputtering Recipes|R]]
|[[Sputtering Recipes|R]]
|<br>
|<br>
Line 238: Line 255:
|-
|-
! bgcolor="#d0e7ff" align="center" |Ge
! bgcolor="#d0e7ff" align="center" |Ge
| bgcolor="#eeffff" |{{Al/E1}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |{{Al/E3}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 3 .28Temescal.29|R2]]
| bgcolor="#eeffff" |{{Al/E4}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]]
| bgcolor="#eeffff" |[[Sputtering Recipes|A]]
| bgcolor="#eeffff" |[[Sputtering Recipes|A]]
| bgcolor="#eeffff" |[[Sputtering Recipes|A]]
| bgcolor="#eeffff" |[[Sputtering Recipes|A]]
Line 256: Line 273:
! bgcolor="#d0e7ff" align="center" |GeO<sub>2</sub>
! bgcolor="#d0e7ff" align="center" |GeO<sub>2</sub>
|
|
|[[E-Beam Evaporation Recipes#E-Beam 2 .28Custom.29|R2]]
|{{Al/E2}}
|
|
|
|
Line 272: Line 289:
|-
|-
! bgcolor="#d0e7ff" align="center" |Gd
! bgcolor="#d0e7ff" align="center" |Gd
| bgcolor="#eeffff" |{{Al/E1}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |{{Al/E4}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R1]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 289: Line 306:
|-
|-
! bgcolor="#d0e7ff" align="center" |Hf
! bgcolor="#d0e7ff" align="center" |Hf
| bgcolor="#eeffff" |{{Al/E1}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R1]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R1]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 340: Line 357:
|-
|-
! bgcolor="#d0e7ff" align="center" |Ir
! bgcolor="#d0e7ff" align="center" |Ir
|[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R1]]
|{{Al/E1}}
|<br>
|<br>
|<br>
|<br>
|<br>
|[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R1]]
|<br>
|<br>
|<br>
|<br>
Line 358: Line 375:
! bgcolor="#d0e7ff" align="center" |ITO
! bgcolor="#d0e7ff" align="center" |ITO
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |{{rl|E-Beam Evaporation Recipes|E-Beam 2 (Custom)|ITO deposition (E-Beam 2)}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 2 .28Custom.29|R3]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 392: Line 409:
! bgcolor="#d0e7ff" align="center" |MgO
! bgcolor="#d0e7ff" align="center" |MgO
|
|
|[[E-Beam Evaporation Recipes#E-Beam 2 .28Custom.29|R2]]
|{{Al/E2}}
|
|
|
|
Line 408: Line 425:
|-
|-
! bgcolor="#d0e7ff" align="center" |Mo
! bgcolor="#d0e7ff" align="center" |Mo
| bgcolor="#eeffff" |{{Al/E1}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 425: Line 442:
|-
|-
! bgcolor="#d0e7ff" align="center" |Nb
! bgcolor="#d0e7ff" align="center" |Nb
|[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]]
|{{Al/E1}}
|<br>
|<br>
|<br>
|<br>
Line 459: Line 476:
|-
|-
! bgcolor="#d0e7ff" align="center" |Ni
! bgcolor="#d0e7ff" align="center" |Ni
| bgcolor="#eeffff" |{{Al/E1}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |{{Al/E3}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 3 .28Temescal.29|R2]]
| bgcolor="#eeffff" |{{Al/E4}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]]
| bgcolor="#eeffff" |{{rl|Sputtering Recipes|Sputter 3 (AJA ATC 2000-F)}}
| bgcolor="#eeffff" |{{rl|Sputtering Recipes|Sputter 3 (AJA ATC 2000-F)}}
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 476: Line 493:
|-
|-
! bgcolor="#d0e7ff" align="center" |NiCr
! bgcolor="#d0e7ff" align="center" |NiCr
|[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]]
|{{Al/E1}}
|
|
|
|
|[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]]
|{{Al/E4}}
|
|
|
|
Line 493: Line 510:
|-
|-
! bgcolor="#d0e7ff" align="center" |NiFe
! bgcolor="#d0e7ff" align="center" |NiFe
| bgcolor="#eeffff" |{{Al/E1}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R1]]
| bgcolor="#eeffff" |
| bgcolor="#eeffff" |
| bgcolor="#eeffff" |
| bgcolor="#eeffff" |
| bgcolor="#eeffff" |{{Al/E4}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]]
| bgcolor="#eeffff" |[[Sputtering Recipes|A]]
| bgcolor="#eeffff" |[[Sputtering Recipes|A]]
| bgcolor="#eeffff" |
| bgcolor="#eeffff" |
Line 510: Line 527:
|-
|-
! bgcolor="#d0e7ff" align="center" |Pd
! bgcolor="#d0e7ff" align="center" |Pd
|[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]]
|{{Al/E1}}
|<br>
|<br>
|[[E-Beam Evaporation Recipes#E-Beam 3 .28Temescal.29|R2]]
|{{Al/E3}}
|[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]]
|{{Al/E4}}
|<br>
|<br>
|<br>
|<br>
Line 527: Line 544:
|-
|-
! bgcolor="#d0e7ff" align="center" |Pt
! bgcolor="#d0e7ff" align="center" |Pt
| bgcolor="#eeffff" |{{Al/E1}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |{{Al/E3}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 3 .28Temescal.29|R2]]
| bgcolor="#eeffff" |{{Al/E4}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]]
| bgcolor="#eeffff" |[[Sputtering Recipes|A]]
| bgcolor="#eeffff" |[[Sputtering Recipes|A]]
| bgcolor="#eeffff" |{{rl|Sputtering Recipes|Sputter 4 (AJA ATC 2200-V)}}
| bgcolor="#eeffff" |{{rl|Sputtering Recipes|Sputter 4 (AJA ATC 2200-V)}}
Line 544: Line 561:
|-
|-
! bgcolor="#d0e7ff" align="center" |Ru
! bgcolor="#d0e7ff" align="center" |Ru
|[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]]
|{{Al/E1}}
|<br>
|<br>
|<br>
|<br>
|[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]]
|{{Al/E4}}
|<br>
|<br>
|[[Sputtering Recipes#Ru Deposition .28Sputter 4.29|R]]
|[[Sputtering Recipes#Ru Deposition .28Sputter 4.29|R]]
Line 562: Line 579:
! bgcolor="#d0e7ff" align="center" |Si
! bgcolor="#d0e7ff" align="center" |Si
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |{{Al/E2}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 2 .28Custom.29|R2]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 612: Line 629:
|-
|-
! bgcolor="#d0e7ff" align="center" |SiO<sub>2</sub>
! bgcolor="#d0e7ff" align="center" |SiO<sub>2</sub>
| bgcolor="#eeffff" |{{Al/E1}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]]
| bgcolor="#eeffff" |{{Al/E2}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 2 .28Custom.29|R2]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 627: Line 644:
| bgcolor="#eeffff" |[[Atomic Layer Deposition Recipes#Pt deposition .28ALD CHAMBER 1.29|R4]]
| bgcolor="#eeffff" |[[Atomic Layer Deposition Recipes#Pt deposition .28ALD CHAMBER 1.29|R4]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
|-
!SiO<sub>x</sub>
|
|[[E-Beam Evaporation Recipes#E-Beam 2 .28Custom.29|R1]]
|
|
|
|
|
|
|
|
|
|
|
|
|
|-
|-
! bgcolor="#d0e7ff" align="center" |SiO<sub>x</sub>N<sub>y</sub>
! bgcolor="#d0e7ff" align="center" |SiO<sub>x</sub>N<sub>y</sub>
Line 664: Line 698:
! bgcolor="#d0e7ff" align="center" |SrF<sub>2</sub>
! bgcolor="#d0e7ff" align="center" |SrF<sub>2</sub>
|<br>
|<br>
|[[E-Beam Evaporation Recipes#E-Beam 2 .28Custom.29|R2]]
|{{Al/E2}}
|<br>
|<br>
|<br>
|<br>
Line 680: Line 714:
|-
|-
! bgcolor="#d0e7ff" align="center" |Ta
! bgcolor="#d0e7ff" align="center" |Ta
| bgcolor="#eeffff" |{{Al/E1}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R1]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 698: Line 732:
! bgcolor="#d0e7ff" align="center" |Ta<sub>2</sub>O<sub>5</sub>
! bgcolor="#d0e7ff" align="center" |Ta<sub>2</sub>O<sub>5</sub>
|<br>
|<br>
|[[E-Beam Evaporation Recipes#E-Beam 2 .28Custom.29|R1]]
|<br>
|<br>
|[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R1]]
|<br>
|{{Al/E2}}
|<br>
|<br>
|<br>
|<br>
Line 714: Line 748:
|-
|-
! bgcolor="#d0e7ff" align="center" |Ti
! bgcolor="#d0e7ff" align="center" |Ti
| bgcolor="#eeffff" |{{Al/E1}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |{{Al/E3}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 3 .28Temescal.29|R2]]
| bgcolor="#eeffff" |{{Al/E4}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]]
| bgcolor="#eeffff" |{{rl|Sputtering Recipes|Sputter 3 (AJA ATC 2000-F)}}
| bgcolor="#eeffff" |{{rl|Sputtering Recipes|Sputter 3 (AJA ATC 2000-F)}}
| bgcolor="#eeffff" |{{rl|Sputtering Recipes|Ti-Au Deposition (Sputter 4)}}
| bgcolor="#eeffff" |{{rl|Sputtering Recipes|Ti-Au Deposition (Sputter 4)}}
Line 748: Line 782:
|-
|-
! bgcolor="#d0e7ff" align="center" |TiW
! bgcolor="#d0e7ff" align="center" |TiW
| bgcolor="#eeffff" |{{Al/E1}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R1]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 766: Line 800:
! bgcolor="#d0e7ff" align="center" |TiO<sub>2</sub>
! bgcolor="#d0e7ff" align="center" |TiO<sub>2</sub>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |{{Al/E2}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 2 .28Custom.29|R2]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 799: Line 833:
|-
|-
! bgcolor="#d0e7ff" align="center" |W
! bgcolor="#d0e7ff" align="center" |W
| bgcolor="#eeffff" |{{Al/E1}}
| bgcolor="#eeffff" |[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]]
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
| bgcolor="#eeffff" |<br>
Line 850: Line 884:
|-
|-
! bgcolor="#d0e7ff" align="center" |Zr
! bgcolor="#d0e7ff" align="center" |Zr
|[[E-Beam Evaporation Recipes#E-Beam 1 .28Sharon.29|R2]]
|{{Al/E1}}
|<br>
|<br>
|<br>
|<br>
|[[E-Beam Evaporation Recipes#E-Beam 4 .28CHA.29|R2]]
|{{Al/E4}}
|[[Sputtering Recipes|A]]
|[[Sputtering Recipes|A]]
|[[Sputtering Recipes|A]]
|[[Sputtering Recipes|A]]

Revision as of 17:16, 5 August 2024

Process Control Data

See linked page for process control data (calibration data over time, such as dep. rate, refractive index, stress etc.) over time, for a selection of highly used tools/films.

Deposition Tools/Materials Table

The Key/Legend for this table's A...R6 values is at the bottom of the page.

Vacuum Deposition Recipes

 E-Beam Evaporation Sputtering Thermal Evaporation Plasma Enhanced Chemical
Vapor Deposition (PECVD) 		Atomic Layer Deposition Molecular Vapor Deposition
Material E-Beam 1 (Sharon) E-Beam 2 (Custom) E-Beam 3 (Temescal) E-Beam 4 (CHA) Sputter 3
(AJA ATC 2000-F) 		Sputter 4
(AJA ATC 2200-V) 		Sputter 5 (AJA ATC 2200-V) Ion Beam
Deposition (Veeco Nexus) 		Thermal
Evap 1 		Thermal Evap 2 (Solder) PECVD 1
(PlasmaTherm 790) 		PECVD 2
(Advanced Vacuum) 		Unaxis VLR ICP-PECVD Atomic Layer Deposition (Oxford FlexAL) Molecular Vapor Deposition (Tool)
Ag R2
R2 R2 A A








Al R2
R2 R2 A R1
R1 A A




Al2O3 R2

A R1
R5




R4
AuGe R1
AlN



A A
R1




R4
Au R2
R2 R2 A R1

A A




B














C R3
CeO2
R3












Co R2

R2 R









Cr R1

R2 R


A A




Cu R1


R1 A








Fe R2

R2 R









Ge R2
R2 R2 A A








GeO2 R2
Gd R2

R1










Hf R1


R1










HfO2



A A






R4
In








A




Ir R1

R1










ITO
R3

A A
R1






MgF2 A A
MgO R2
Mo R2


R A








Nb R2



R








Nd



A








Ni R2
R2 R2 R1


A A




NiCr R2 R2
NiFe R1 R2 A
Pd R2
R2 R2



A A




Pt R2
R2 R2 A R1 R1





R4
Ru R2

R2
R






R4
Si
R2

R A
R1


R3

SiN



R1 A
R6

R6 R6 R6

SiN - Low Stress R4 R6 R6
SiO2 R2 R2

R1 A A R6

R6 R6 R6 R4
SiOx R1
SiOxNy






R3

R4



Sn








A




SrF2
R2












Ta R1


R1 A
R1






Ta2O5
R1
R1


R6






Ti R2
R2 R2 R1 R1 R1 R1






TiN




R
R1




R4
TiW R1


A R1








TiO2
R2

A R1
R5




R4
V



A A








W R2


A R1








Zn







A A




ZnO












R3
Zr R2

R2 A A








ZrO2












R4
Material E-Beam 1 (Sharon) E-Beam 2 (Custom) E-Beam 3 (Temescal) E-Beam 4 (CHA) Sputter 3
(ATC 2000-F) 		Sputter 4
(ATC 2200-V) 		Sputter 5 (ATC 2200-V) Ion Beam
Deposition (Veeco Nexus) 		Thermal
Evap 1 		Thermal Evap 2 (Solder) PECVD 1
(PlasmaTherm 790) 		PECVD 2
(Advanced Vacuum) 		Unaxis VLR ICP-PECVD Atomic Layer Deposition (Oxford FlexAl) Molecular Vapor Deposition (Tool)

Process Ranking Table

Processes in the table above are ranked by their "Process Maturity Level" as follows:

Process Level Description of Process Level Ranking
A Process Allowed and materials available but never done
R1 Process has been ran at least once
R2 Process has been ran and/or procedure is documented or/and data available
R3 Process has been ran, procedure is documented, and data is available
R4 Process has a documented procedure with regular (≥4x per year) data or lookahead/in-Situ control available
R5 Process has a documented procedure with regular (≥4x per year) data and lookahead/in-Situ control available
R6 Process has a documented procedure, regular ( ≥4x per year) data, and control charts/limits available
Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Vacuum_Deposition_Recipes&oldid=162165"