Vacuum Deposition Recipes: Difference between revisions

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! width="1675" height="45" colspan="18" | <div style="font-size: 150%;">Vacuum Deposition Recipes</div>
! width="1675" height="45" colspan="18" | <div style="font-size: 150%;">Vacuum Deposition Recipes</div>
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| {{rl|PECVD Recipes|SiN deposition (PECVD #1)}}
| {{rl|PECVD Recipes|SiN deposition (PECVD #1)}}
| {{rl|PECVD Recipes|SiN deposition (PECVD #2)}}
| {{rl|PECVD Recipes|SiN deposition (PECVD #2)}}
| {{rl|PECVD Recipes|SiN deposition (Unaxis VLR)}}
| {{rl|PECVD Recipes|SiN deposition (Unaxis VLR)}}
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! bgcolor="#D0E7FF" align="center" | SiO<sub>2</sub>
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| bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (PECVD #1)}}
| bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (PECVD #1)}}
| bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (PECVD #2)}}
| bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (PECVD #2)}}
| bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (Unaxis VLR)}}
| bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (Unaxis VLR)}}
| bgcolor="EEFFFF" | {{rl|ALD recipes|SiO2 deposition (ALD)}}
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | {{rl|IBD Recipes|SiO2 deposition (IBD)}}
| bgcolor="EEFFFF" | {{rl|IBD Recipes|SiO2 deposition (IBD)}}
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| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
|-
|-
! bgcolor="#D0E7FF" align="center" | SrF<sub>2</sub>
! bgcolor="#D0E7FF" align="center" | SrF<sub>2</sub>
| <br>
| <br>
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! bgcolor="#D0E7FF" align="center" | Ta
! bgcolor="#D0E7FF" align="center" | Ta
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
|-
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! bgcolor="#D0E7FF" align="center" | Ta<sub>2</sub>O<sub>5</sub>
! bgcolor="#D0E7FF" align="center" | Ta<sub>2</sub>O<sub>5</sub>
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! bgcolor="#D0E7FF" align="center" | Ti
! bgcolor="#D0E7FF" align="center" | Ti
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
|-
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! bgcolor="#D0E7FF" align="center" | TiN
! bgcolor="#D0E7FF" align="center" | TiN
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|-
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! bgcolor="#D0E7FF" align="center" | TiO<sub>2</sub>
! bgcolor="#D0E7FF" align="center" | TiO<sub>2</sub>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
|-
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! bgcolor="#D0E7FF" align="center" | V
! bgcolor="#D0E7FF" align="center" | V
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|-
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! bgcolor="#D0E7FF" align="center" | W
! bgcolor="#D0E7FF" align="center" | W
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
|-
|-
! bgcolor="#D0E7FF" align="center" | Zn
! bgcolor="#D0E7FF" align="center" | Zn
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|-
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! bgcolor="#D0E7FF" align="center" | ZnO<sub>2</sub>
! bgcolor="#D0E7FF" align="center" | ZnO<sub>2</sub>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
|-
|-
! bgcolor="#D0E7FF" align="center" | Zr
! bgcolor="#D0E7FF" align="center" | Zr
| <br>
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|-
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! bgcolor="#D0E7FF" align="center" | ZrO<sub>2</sub>
! bgcolor="#D0E7FF" align="center" | ZrO<sub>2</sub>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
|-
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Revision as of 17:47, 6 September 2012

Vacuum Deposition Recipes

 E-Beam Evaporation Sputtering Thermal Evaporation Plasma Enhanced Chemical
Vapor Deposition (PECVD) 		Atomic Layer Deposition Ion Beam Deposition (IBD) Molecular Vapor Deposition
Material E-Beam 1 (Sharon) E-Beam 2 (Custom) E-Beam 3 (Temescal) E-Beam 4 (CHA) Sputter 1 (Custom) Sputter 2
(SFI Endeavor) 		Sputter 3
(ATC 2000-F) 		Sputter 4
(ATC 2200-V) 		Sputter 5 (Lesker AXXIS) Thermal Evap 1 Thermal Evap 2 (Solder) PECVD 1
(PlasmaTherm 790) 		PECVD 2
(Advanced Vacuum) 		Unaxis VLR ICP-PECVD Atomic Layer Deposition (Tool) Ion Beam
Deposition (Tool) 		Molecular Vapor Deposition (Tool)
Ag
















Al
















Al2O3
















AlN
















Au
















B
















Co
















Cr
















Cu
















Fe
















Ge
















Hf
















HfO2
















In
















Ir
















ITO
















Mo
















Nb
















Ni
















Pd
















Pt
















Ru
















Si
















SiN










R1 R1 R1


SiO2










R1 R1 R1
R1
SiOxNy
















Sn
















SrF2
















Ta
















Ta2O5
















Ti
















TiN
















TiO2
















V
















W
















Zn
















ZnO2
















Zr
















ZrO2
















Material E-Beam 1 (Sharon) E-Beam 2 (Custom) E-Beam 3 (Temescal) E-Beam 4 (CHA) Sputter 1 (Custom) Sputter 2
(SFI Endeavor) 		Sputter 3
(ATC 2000-F) 		Sputter 4
(ATC 2200-V) 		Sputter 5 (Lesker AXXIS) Thermal Evap 1 Thermal Evap 2 (Solder) PECVD 1
(PlasmaTherm 790) 		PECVD 2
(Advanced Vacuum) 		Unaxis VLR ICP-PECVD Atomic Layer Deposition (Tool) Ion Beam
Deposition (Tool) 		Molecular Vapor Deposition (Tool)
Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Vacuum_Deposition_Recipes&oldid=2445"