ICP Etching Recipes: Difference between revisions
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==SiO<sub>2</sub> Vertical Etch (Panasonic 1)== |
==SiO<sub>2</sub> Vertical Etch (Panasonic 1)== |
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*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe]] |
*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe]] |
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*[[media:Panasonic1-SiO-Etch-SEM.pdf|SiO<sub>2</sub> SEM image Vertical Etch ]] |
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==Cr Etch (Panasonic 1)== |
==Cr Etch (Panasonic 1)== |
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*[[media:Panasonic-1-Cr-Etch-revA.pdf|Cr Etch Recipes]] |
*[[media:Panasonic-1-Cr-Etch-revA.pdf|Cr Etch Recipes]] |
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Revision as of 17:42, 21 August 2013
Back to Dry Etching Recipes.