Dry Etching Recipes

• R = Recipe is available. Clicking this link will take you to the recipe.
• A = Material is available for use, but no recipes are provided.

Dry Etching Recipes
	RIE Etching				ICP Etching				Oxygen Plasma Systems				Other Dry Etchers
Material	RIE 1 (Custom)	RIE 2 (MRC)	RIE 3 (MRC)	RIE 5 (PlasmaTherm)	Si Deep RIE (PlasmaTherm/Bosch Etch)	ICP Etch 1 (Panasonic E626I)	ICP Etch 2 (Panasonic E640)	ICP-Etch (Unaxis VLR)	Ashers (Technics PEII)	Plasma Clean (Gasonics 2000)	UV Ozone Reactor	Plasma Activation (EVG 810)	XeF2 Etch (Xetch)
Al						R1	R1
Ti						R1	A
Cr				A		R1	A
Ge
Ag
Ru
Mo
Ta
W
Al2O3
HfO2
ITo
SiO2						R1	R1
SiN							R1
SiOxNy
Ta2O5
TiO2
TiN
ZnO2
ZrO2
GaAs							R1	R1
AlGaAs				R1		R1		R1
InGaAlAs
InGaAsP
InP		R1						R1
GaN				R1		R1		R1
AlGaN
AlN
GaN
AlGaN
AlN
GaSb
CdZnTe		R1
ZnSe
Si					R1								R1
SiC
Sapphire
Material	RIE 1 (Custom)	RIE 2 (MRC)	RIE 3 (MRC)	RIE 5 (PlasmaTherm)	Si Deep RIE (PlasmaTherm/Bosch Etch)	ICP Etch 1 (Panasonic E626I)	ICP Etch 2 (Panasonic E640)	ICP-Etch (Unaxis VLR)	Ashers (Technics PEII)	Plasma Clean (Gasonics 2000)	UV Ozone Reactor	Plasma Activation (EVG 810)	XeF2 Etch (Xetch)