Deep UV Optical Microscope (Olympus): Difference between revisions
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Revision as of 06:03, 1 September 2018
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About
This system does general purpose imaging in the visible and also has high resolution/high magnification DUV imaging using 250nm light. Surface features less than 100nm can be resolved. The system has precision stage control and is fully computer controlled for image capture and sample manipulation. A Good system for CD measurements on wafer (250nm and above) without entry into the SEM.