Autostep 200 Troubleshooting and Recovery

WIP...

Troubleshooting

What to do in case of computer (monitor) freeze-up.  Please try these things in this order.

1)    Try CTRL C followed by A and Enter.  This will abort any command that may have hung up.

2)    For Reticle Robot Hang Up:  See step 25 of start-up procedure. 

What to do in case of unplanned power outage.

     1)  CR Staff will take care of the system in the morning.

What to do for alignment error.

1)   Verify that correct alignment key offset is being used

2)   If you have DFAS alignment marks, perform a MAP job to verify alignment.

What to do for focus resolution problems.

1)   Perform a focus (EXPO) job using the same type of wafer that you will use for your real job and use the optimal focus offset determined from this job.  You may need to look at both exposure time and focus.

2)   If you have been running the same process and now have issues, run SETUP from the : prompt, following the instructions on the GCA Regular Maintenance Sheet.

What to do in case of the stage limit going too far (red stage limit light will be lit inside the stepper chamber next to the joystick.

1)   Press the lit limit switch to release the stage.

Contacts to call if you cannot undo the problem. Do not call after 10 p.m. unless there is a real emergency (A deadline for a paper or conference is not a real emergency)

1)    Mike Silva : x 3918 x 219 Work

2)    Brian Thibeault : x 2268 Work

3)    Biljana Stamenic:x4002 Work

4)    3c technical.  (These guys know all about the stepper, they rebuilt it and service it under contract for us).   Ask for Matt or Adam.

         matt@3ctechnical.com

         www.3ctechnical.com

         480-963-4559 voice

         480.212.0932 fax

5)    Send e-mail to nanofab@ece.ucsb.edu and report the problem.

Restarting procedure

How to power down components  :

1) Press “ctrl C & A” to abort any currently running process.

2) If the system is frozen skip to step 3

If not, press “ctrl & ] (right bracket) “ on the upper keyboard. (The main keyboard under the alignment screens)

3) Open the lower cabinet and pull out the lower keyboard, quickly press “scroll lock” twice followed immediately by the “up arrow key”.

4) On the same lower keyboard, press “alt & x”.

5) Press “enter”.

6) In the lower cabinet, turn off the computer (#2)-(smart set) below the keyboard. Press the power button.

7) Retrieve the keys on the key chain (located in the lower cabinet in front of the computer).

8) Open the tall cabinet to the left.

9) Use the keys to open the locked main computer (#1) - (kontron). It is the black flip down module. Turn off this computer.

10) Go down the rack and turn off each control module. Do NOT turn off the lamp power supply OR the AC interface/ Power interface.

11) DSW/IAS - II control module: Should already be off. (power switch is on the right)

12) DSW/AWH Control module: Switch it off. (power switch is on the right)

13) Stage Control module: Switch it off. (power switch is on the right)

14) RMS Control module: Switch it off. (power switch is on the left)

15) DO NOT TURN OFF THE LAMP