Template:Announcements: Difference between revisions
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=====PECVD #2 |
=====PECVD #2 is UP===== |
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The tool is up, intial film checks show same dep. rates as before. |
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We are continuing to work our way through the issue plaguing this system. Unfortunately running at lower power did not work. We will send updates more regularly to keep you all informed. |
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Tony |
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//[[User:Mehalana v|Vraj Mehalana]] 09:52, 7 February 2024 (PST) |
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=====MLA 150 Service Next Week - REMINDER===== |
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The MLA 150 will be down for a service visit from Tuesday February 6th to Thursday February 8th. The tool should be available in the evenings and it's possible the work will be completed by the end of Wednesday. |
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Here's the schedule for when the tool will be unavailable: |
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Tues (2/6): 11:30 am - 5 pm |
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Wed (2/7): 8 am - 5 pm |
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Thurs (2/8) 8 am - 5 pm (if needed). |
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-Lee |
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//[[User:Mehalana v|Vraj Mehalana]] 10:37, 1 February 2024 (PST) |
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===== MJB-3s Are up===== |
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The servicing is completed for both of the MJB-3s. The stage issue with the IR system has been resolved as well. |
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//[[User:Mehalana v|Vraj Mehalana]] 15:51, 8 February 2024 (PST) |
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=====MA6 Service Next Week - REMINDER===== |
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The MA-6 will be unavailable Tuesday Feb 6th from 8 am to roughly 5 pm for its annual service visit. |
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The issue with the backside camera magnification getting stuck will be addressed during the visit. |
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-Lee |
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//[[User:Mehalana v|Vraj Mehalana]] 10:37, 1 February 2024 (PST) |
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=====RIE 5 is up===== |
=====RIE 5 is up===== |
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RIE 5 is up except for processes that use SiCl4. |
RIE 5 is up except for processes that use SiCl4. |
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//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST) |
//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST) |
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=====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update===== |
=====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update===== |
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We received most of the chamber assembly replacement parts today. We are still waiting on the lamps and chamber o-rings which are scheduled to be delivered in the next couple of days. Once we have all the parts, we'll start to reassemble the chamber. |
We received most of the chamber assembly replacement parts today. We are still waiting on the lamps and chamber o-rings which are scheduled to be delivered in the next couple of days. Once we have all the parts, we'll start to reassemble the chamber. |
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//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST) |
//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST) |
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=====EBeam3 Planned Maintenance 2/ |
=====EBeam3 Planned Maintenance 2/21/24 - 2/22/24===== |
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The transfer arm installation has been postponed until next week due to other equipment being down at this time. |
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EBeam3 is scheduled to be down starting at 8:00am on 2/7/24 through 4:00pm on 2/8//24 so that we can install the new transfer arm. |
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The work is now scheduled for 2/21/24 - 2/22/24. |
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Please plan accordingly. |
Please plan accordingly. |
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//[[User:Mehalana v|Vraj Mehalana]] 09:28, 26 January 2024 (PST) |
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=====Oxford Cobra: Software bugs===== |
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The latest revision of software has several bugs: see email for details. We are working with Oxford to resolve via software upgrade. |
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=====Job Opening: Process Engineer===== |
=====Job Opening: Process Engineer===== |
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Revision as of 19:56, 13 February 2024
PECVD #2 is UP
The tool is up, intial film checks show same dep. rates as before. //Demis D. John 11:56, 13 February 2024 (PST)
RIE 5 is up
RIE 5 is up except for processes that use SiCl4.
//Vraj Mehalana 09:39, 30 January 2024 (PST)
Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update
We received most of the chamber assembly replacement parts today. We are still waiting on the lamps and chamber o-rings which are scheduled to be delivered in the next couple of days. Once we have all the parts, we'll start to reassemble the chamber.
I'll send out an update in the next 2-3 days.
Thanks, //Vraj Mehalana 10:58, 5 February 2024 (PST)
ICP #1 is down - Update
Replacing the battery on the board did not resolve the tool issue.
Panasonic has located a replacement board for the tool. From what I gather they need to repair and test it and are hoping to have it ready to ship by the 16th. I'd like to add that there is the possibility that this will not resolve the issue but it is the best path forward at this point.
-Lee //Vraj Mehalana 09:39, 30 January 2024 (PST)
EBeam3 Planned Maintenance 2/21/24 - 2/22/24
The transfer arm installation has been postponed until next week due to other equipment being down at this time.
The work is now scheduled for 2/21/24 - 2/22/24. Please plan accordingly. //Demis D. John 11:56, 13 February 2024 (PST)
Job Opening: Process Engineer
The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the NanoFab Job Openings page for details.
//Demis D. John 14:52, 30 October 2023 (PDT)
Lab Access Changes: Symmetry App
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. IMPORTANT: check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled "Invitation to Access Symmetry App".
// John d 13:49, 7 November 2023 (PST)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)