Template:Announcements: Difference between revisions
Mehalana v (talk | contribs) |
(deleted EB4, other tools up. Updated ICP1 and DSE from emails.) |
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=====E-Beam #4 (CHA) - UP ===== |
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Cryo replaced, system ready for use. |
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=====PECVD #2 is UP===== |
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The tool is up, intial film checks show same dep. rates as before. |
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=====RIE 5 is up===== |
=====RIE 5 is up===== |
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RIE 5 is up except for processes that use SiCl4. |
RIE 5 is up except for processes that use SiCl4. |
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=====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update===== |
=====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update===== |
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We were able to start running recipes last night but we found the C4F8 MFC wasn’t controlling. I’ve ordered a new MFC that’s due to be on site Tuesday morning. If all goes well the tool should be up that afternoon. |
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We received most of the chamber assembly replacement parts today. We are still waiting on the lamps and chamber o-rings which are scheduled to be delivered in the next couple of days. Once we have all the parts, we'll start to reassemble the chamber. |
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I'll send out an update in the next 2-3 days. |
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Thanks, |
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//[[User:Mehalana v|Vraj Mehalana]] 10:58, 5 February 2024 (PST) |
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=====ICP #1 is down - Update===== |
=====ICP #1 is down - Update===== |
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Some additional work is needed on the replacement board that we are waiting on. I have been informed that it will not be shipping until after the 20th (no solid date). |
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Replacing the battery on the board did not resolve the tool issue. |
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Panasonic has located a replacement board for the tool. From what I gather they need to repair and test it and are hoping to have it ready to ship by the 16th. I'd like to add that there is the possibility that this will not resolve the issue but it is the best path forward at this point. |
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-Lee |
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//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST) |
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=====EBeam3 Transfer Arm Upgrade - Postponed===== |
=====EBeam3 Transfer Arm Upgrade - Postponed===== |
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Revision as of 19:18, 23 February 2024
RIE 5 is up
RIE 5 is up except for processes that use SiCl4.
//Vraj Mehalana 09:39, 30 January 2024 (PST)
Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update
We were able to start running recipes last night but we found the C4F8 MFC wasn’t controlling. I’ve ordered a new MFC that’s due to be on site Tuesday morning. If all goes well the tool should be up that afternoon. //Demis D. John 11:18, 23 February 2024 (PST)
ICP #1 is down - Update
Some additional work is needed on the replacement board that we are waiting on. I have been informed that it will not be shipping until after the 20th (no solid date). //Demis D. John 11:18, 23 February 2024 (PST)
EBeam3 Transfer Arm Upgrade - Postponed
The Transfer Arm upgrade has been postponed again, this time due to motor driver compatibility issues.
I am waiting to hear back from the manufacturer so at this time I can not reschedule yet.
I will send another notification when everything has been worked out, and I am ready to schedule the installation.
//Demis D. John 11:56, 13 February 2024 (PST)
Job Opening: Process Engineer
The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the NanoFab Job Openings page for details.
//Demis D. John 14:52, 30 October 2023 (PDT)
Lab Access Changes: Symmetry App
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. IMPORTANT: check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled "Invitation to Access Symmetry App".
// John d 13:49, 7 November 2023 (PST)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)