Vacuum Deposition Recipes: Difference between revisions

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{| border="1" class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;"
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! width="1675" height="45" colspan="18" | <div style="font-size: 150%;">Vacuum Deposition Recipes</div>
! width="1675" height="45" colspan="18" | <div style="font-size: 150%;">Vacuum Deposition Recipes</div>
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! width="20" bgcolor="#D0E7FF" align="center" | '''Material'''
! width="20" bgcolor="#D0E7FF" align="center" | '''Material'''
| width="65" bgcolor="#DAF1FF" | [[E-Beam_Evaporation_Recipes#E-Beam_1 (Sharon)|E-Beam 1 (Sharon)]]
| width="65" bgcolor="#DAF1FF" | [[E-Beam Evaporation Recipes#E-Beam_1_.28Sharon.29|E-Beam 1 (Sharon)]]
| width="65" bgcolor="#DAF1FF" | [[E-Beam_Evaporation_Recipes#E-Beam 2 (Custom)|E-Beam 2 (Custom)]]
| width="65" bgcolor="#DAF1FF" | [[E-Beam Evaporation Recipes#E-Beam_2_.28Custom.29|E-Beam 2 (Custom)]]
| width="65" bgcolor="#DAF1FF" | [[E-Beam_Evaporation_Recipes#E-Beam 3 (Temescal)|E-Beam 3 (Temescal)]]
| width="65" bgcolor="#DAF1FF" | [[E-Beam Evaporation Recipes#E-Beam_3_.28Temescal.29|E-Beam 3 (Temescal)]]
| width="65" bgcolor="#DAF1FF" | [[E-Beam_Evaporation_Recipes#E-Beam 4 (CHA)|E-Beam 4 (CHA)]]
| width="65" bgcolor="#DAF1FF" | [[E-Beam Evaporation Recipes#E-Beam_4_.28CHA.29|E-Beam 4 (CHA)]]
| width="65" bgcolor="#DAF1FF" | [[Sputtering Recipes#Sputter 1 (Custom)|Sputter 1 (Custom)]]
| width="65" bgcolor="#DAF1FF" | [[Sputtering Recipes#Sputter_1_.28Custom.29|Sputter 1 (Custom)]]
| width="65" bgcolor="#DAF1FF" | [[Sputtering Recipes#Sputter 2 (SFI Endeavor)|Sputter 2<br>(SFI Endeavor)]]
| width="65" bgcolor="#DAF1FF" | [[Sputtering Recipes#Sputter_2_.28SFI_Endeavor.29|Sputter 2<br>(SFI Endeavor)]]
| width="65" bgcolor="#DAF1FF" | [[Sputtering Recipes#Sputter 3 (ATC 2000-F)|Sputter 3<br>(ATC 2000-F)]]
| width="65" bgcolor="#DAF1FF" | [[Sputtering Recipes#Sputter_3_.28ATC_2000-F.29|Sputter 3<br>(ATC 2000-F)]]
| width="65" bgcolor="#DAF1FF" | [[Sputtering Recipes#Sputter 4 (ATC 2200-V)|Sputter 4<br>(ATC 2200-V)]]
| width="65" bgcolor="#DAF1FF" | [[Sputtering Recipes#Sputter_4_.28ATC_2200-V.29|Sputter 4<br>(ATC 2200-V)]]
| width="65" bgcolor="#DAF1FF" | [[Sputtering Recipes#Sputter 5 (Lesker AXXIS)|Sputter 5 (Lesker AXXIS)]]
| width="65" bgcolor="#DAF1FF" | [[Sputtering Recipes#Sputter_5_.28Lesker_AXXIS.29|Sputter 5 (Lesker AXXIS)]]
| width="65" bgcolor="#DAF1FF" | [[Thermal Evaporation Recipes#Thermal Evap 1|Thermal Evap 1]]
| width="65" bgcolor="#DAF1FF" | [[Thermal Evaporation Recipes#Thermal_Evap_1|Thermal Evap 1]]
| width="65" bgcolor="#DAF1FF" | [[Thermal Evaporation Recipes#Thermal Evap 2 (Solder)|Thermal Evap 2 (Solder)]]
| width="65" bgcolor="#DAF1FF" | [[Thermal Evaporation Recipes#Thermal_Evap_2_.28Solder.29|Thermal Evap 2 (Solder)]]
| width="65" bgcolor="#DAF1FF" | [[PECVD Recipes#PECVD 1 (PlasmaTherm 790)|PECVD 1<br>(PlasmaTherm 790)]]
| width="65" bgcolor="#DAF1FF" | [[PECVD Recipes#PECVD_1_.28PlasmaTherm_790.29|PECVD 1<br>(PlasmaTherm 790)]]
| width="65" bgcolor="#DAF1FF" | [[PECVD Recipes#PECVD 2 (Advanced Vacuum)|PECVD 2<br>(Advanced Vacuum)]]
| width="65" bgcolor="#DAF1FF" | [[PECVD Recipes#PECVD_2_.28Advanced_Vacuum.29|PECVD 2<br>(Advanced Vacuum)]]
| width="65" bgcolor="#DAF1FF" | [[PECVD Recipes#Unaxis VLR ICP-PECVD|Unaxis VLR ICP-PECVD]]
| width="65" bgcolor="#DAF1FF" | [[PECVD Recipes#Unaxis_VLR_ICP-PECVD|Unaxis VLR ICP-PECVD]]
| width="65" bgcolor="#DAF1FF" | [[Atomic Layer Deposition (Oxford FlexAL)|Atomic Layer Deposition (Tool)]]
| width="65" bgcolor="#DAF1FF" | [[Atomic Layer Deposition (Oxford FlexAL)|Atomic Layer Deposition (Tool)]]
| width="65" bgcolor="#DAF1FF" | [[Ion Beam Deposition (Veeco NEXUS)|Ion Beam<br>Deposition (Tool)]]
| width="65" bgcolor="#DAF1FF" | [[Ion Beam Deposition (Veeco NEXUS)|Ion Beam<br>Deposition (Tool)]]
| width="65" bgcolor="#DAF1FF" | [[Molecular Vapor Deposition|Molecular Vapor Deposition (Tool)]]
| width="65" bgcolor="#DAF1FF" | [[Molecular Vapor Deposition|Molecular Vapor Deposition (Tool)]]
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| {{rl|PECVD Recipes|SiN deposition (PECVD #1)}}
| {{rl|PECVD Recipes|SiN deposition (PECVD #1)}}
| {{rl|PECVD Recipes|SiN deposition (PECVD #2)}}
| {{rl|PECVD Recipes|SiN deposition (PECVD #2)}}
| {{rl|PECVD Recipes|SiN deposition (Unaxis VLR)}}
| {{rl|PECVD Recipes|SiN deposition (Unaxis VLR)}}
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| {{rl|Ion Beam Deposition Recipes|SiN deposition (IBD)}}
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| bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (PECVD #1)}}
| bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (PECVD #1)}}
| bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (PECVD #2)}}
| bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (PECVD #2)}}
| bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (Unaxis VLR)}}
| bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (Unaxis VLR)}}
| bgcolor="EEFFFF" | {{rl|ALD recipes|SiO2 deposition (ALD)}}
| bgcolor="EEFFFF" | {{rl|ALD recipes|SiO2 deposition (ALD)}}
| bgcolor="EEFFFF" | {{rl|IBD Recipes|SiO2 deposition (IBD)}}
| bgcolor="EEFFFF" | {{rl|IBD Recipes|SiO2 deposition (IBD)}}
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! bgcolor="#D0E7FF" align="center" | SiO<sub>x</sub>N<sub>y</sub>
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! bgcolor="#D0E7FF" align="center" | Ta<sub>2</sub>O<sub>5</sub>
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| bgcolor="EEFFFF" | {{rl|IBD Recipes|SiO2 deposition (IBD)}}
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! bgcolor="#D0E7FF" align="center" | V
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! bgcolor="#D0E7FF" align="center" | W
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! bgcolor="#D0E7FF" align="center" | '''Material'''
! bgcolor="#D0E7FF" align="center" | '''Material'''

Revision as of 17:47, 6 September 2012

Vacuum Deposition Recipes

 E-Beam Evaporation Sputtering Thermal Evaporation Plasma Enhanced Chemical
Vapor Deposition (PECVD) 		Atomic Layer Deposition Ion Beam Deposition (IBD) Molecular Vapor Deposition
Material E-Beam 1 (Sharon) E-Beam 2 (Custom) E-Beam 3 (Temescal) E-Beam 4 (CHA) Sputter 1 (Custom) Sputter 2
(SFI Endeavor) 		Sputter 3
(ATC 2000-F) 		Sputter 4
(ATC 2200-V) 		Sputter 5 (Lesker AXXIS) Thermal Evap 1 Thermal Evap 2 (Solder) PECVD 1
(PlasmaTherm 790) 		PECVD 2
(Advanced Vacuum) 		Unaxis VLR ICP-PECVD Atomic Layer Deposition (Tool) Ion Beam
Deposition (Tool) 		Molecular Vapor Deposition (Tool)
Ag
















Al
















Al2O3
















AlN
















Au
















B
















Co
















Cr
















Cu
















Fe
















Ge
















Hf
















HfO2
















In
















Ir
















ITO
















Mo
















Nb
















Ni
















Pd
















Pt
















Ru
















Si
















SiN










R1 R1 R1


SiO2










R1 R1 R1 R1 R1
SiOxNy
















Sn
















SrF2
















Ta
















Ta2O5
















Ti
















TiN
















TiO2
















V
















W
















Zn
















ZnO2
















Zr
















ZrO2
















Material E-Beam 1 (Sharon) E-Beam 2 (Custom) E-Beam 3 (Temescal) E-Beam 4 (CHA) Sputter 1 (Custom) Sputter 2
(SFI Endeavor) 		Sputter 3
(ATC 2000-F) 		Sputter 4
(ATC 2200-V) 		Sputter 5 (Lesker AXXIS) Thermal Evap 1 Thermal Evap 2 (Solder) PECVD 1
(PlasmaTherm 790) 		PECVD 2
(Advanced Vacuum) 		Unaxis VLR ICP-PECVD Atomic Layer Deposition (Tool) Ion Beam
Deposition (Tool) 		Molecular Vapor Deposition (Tool)
Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Vacuum_Deposition_Recipes&oldid=2444"