Vacuum Deposition Recipes: Difference between revisions

Revision as of 18:35, 6 September 2012

Vacuum Deposition Recipes
	E-Beam Evaporation				Sputtering					Thermal Evaporation		Plasma Enhanced Chemical Vapor Deposition (PECVD)			Atomic Layer Deposition	Ion Beam Deposition (IBD)	Molecular Vapor Deposition
Material	E-Beam 1 (Sharon)	E-Beam 2 (Custom)	E-Beam 3 (Temescal)	E-Beam 4 (CHA)	Sputter 1 (Custom)	Sputter 2 (SFI Endeavor)	Sputter 3 (ATC 2000-F)	Sputter 4 (ATC 2200-V)	Sputter 5 (Lesker AXXIS)	Thermal Evap 1	Thermal Evap 2 (Solder)	PECVD 1 (PlasmaTherm 790)	PECVD 2 (Advanced Vacuum)	Unaxis VLR ICP-PECVD	Atomic Layer Deposition (Tool)	Ion Beam Deposition (Tool)	Molecular Vapor Deposition (Tool)
Ag
Al
Al₂O₃															R1
AlN															R1
Au
B
Co
Cr
Cu
Fe
Ge
Hf
HfO₂															R1
In
Ir
ITO
Mo
Nb
Ni
Pd
Pt
Ru
Si
SiN												R1	R1	R1		R1
SiO₂												R1	R1	R1	R1
SiO_xN_y
Sn
SrF₂
Ta
Ta₂O₅
Ti
TiN
TiO₂
V
W
Zn
ZnO₂
Zr
ZrO₂															R1
Material	E-Beam 1 (Sharon)	E-Beam 2 (Custom)	E-Beam 3 (Temescal)	E-Beam 4 (CHA)	Sputter 1 (Custom)	Sputter 2 (SFI Endeavor)	Sputter 3 (ATC 2000-F)	Sputter 4 (ATC 2200-V)	Sputter 5 (Lesker AXXIS)	Thermal Evap 1	Thermal Evap 2 (Solder)	PECVD 1 (PlasmaTherm 790)	PECVD 2 (Advanced Vacuum)	Unaxis VLR ICP-PECVD	Atomic Layer Deposition (Tool)	Ion Beam Deposition (Tool)	Molecular Vapor Deposition (Tool)

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-| bgcolor="EEFFFF" | {{rl|Atomic Layer Deposition Recipes|Al2O3 deposition}}
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-| bgcolor="EEFFFF" | {{rl|Atomic Layer Deposition Recipes|HfO2 deposition}}
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 | bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (PECVD #2)}}
 | bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (Unaxis VLR)}}
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+| bgcolor="EEFFFF" | {{rl|Atomic Layer Deposition Recipes|SiO2 deposition (ALD)}}
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