Sputtering Recipes: Difference between revisions
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(→Ion Beam Deposition (Veeco NEXUS): added link to ibd calibrations spreadsheet) |
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=[[Sputter 5 (Lesker AXXIS)]]= |
=[[Sputter 5 (Lesker AXXIS)]]= |
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=[[Ion Beam Deposition (Veeco NEXUS)]]= |
=[[Ion Beam Deposition (Veeco NEXUS)]]= |
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[https://docs.google.com/spreadsheet/ccc?key=0AuBs1GfMrpnXcEdXanZQNko3X0lUcHhVUlNyYnVDUkE&usp=sharing IBD Calibrations Spreadsheet] - Records of historical film depositions (rates, indices), Uniformity etc. |
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==SiO{{sub|2}} deposition (IBD)== |
==SiO{{sub|2}} deposition (IBD)== |
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*{{fl|IBD-SiO2-Recipe.pdf|SiO{{Sub|2}} dep}} |
*{{fl|IBD-SiO2-Recipe.pdf|SiO{{Sub|2}} dep}} |
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Revision as of 18:17, 13 August 2013
Back to Vacuum Deposition Recipes.
Sputter 1 (Custom)
Sputter 2 (SFI Endeavor)
Sputter 3 (AJA ATC 2000-F)
Sputter 4 (AJA ATC 2200-V)
Sputter 5 (Lesker AXXIS)
Ion Beam Deposition (Veeco NEXUS)
IBD Calibrations Spreadsheet - Records of historical film depositions (rates, indices), Uniformity etc.