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- 23:23, 13 September 2020 diff hist +22 m Direct-Write Lithography Recipes categories
- 23:22, 13 September 2020 diff hist +49 m Lithography Recipes categories
- 23:21, 13 September 2020 diff hist +24 Direct-Write Lithography Recipes caterbgory added
- 23:20, 13 September 2020 diff hist +26 Contact Alignment Recipes category added
- 23:20, 13 September 2020 diff hist +26 Stepper Recipes added category
- 23:17, 13 September 2020 diff hist +5 m Direct-Write Lithography Recipes Tag: Visual edit
- 23:16, 13 September 2020 diff hist +168 Template:LithRecipe Table added example visual
- 23:11, 13 September 2020 diff hist +94 m Template:LithRecipe Table
- 23:04, 13 September 2020 diff hist -389 Lithography Recipes →Photolithography Recipes: correcting row colors
- 22:41, 13 September 2020 diff hist -128 Lithography Recipes deleted erroneous columns Tag: Visual edit
- 22:38, 13 September 2020 diff hist +212 Lithography Recipes →Photolithography Recipes: added MLA150 to PhotoLith recipes table; table color formatting Tag: Visual edit: Switched
- 22:32, 13 September 2020 diff hist +191 Template:LithRecipe Table added MLA150, and NoInclude section, and added to Templates category
- 22:25, 13 September 2020 diff hist +142 Maskless Aligner (Heidelberg MLA150) link to MLA150 recipes Tag: Visual edit
- 22:24, 13 September 2020 diff hist +1,028 Direct-Write Lithography Recipes Table inserted to start Tag: Visual edit
- 22:23, 13 September 2020 diff hist +217 Direct-Write Lithography Recipes inital page
- 22:20, 13 September 2020 diff hist +73 N Direct-Write Lithography Recipes initial page Tag: Visual edit
- 22:10, 13 September 2020 diff hist +11 m Focused Ion-Beam Lithography (Raith Velion) →Recipes: formatting Tag: Visual edit
- 22:09, 13 September 2020 diff hist +4 m Suss Aligners (SUSS MJB-3) →Recipes: italics Tag: Visual edit
- 22:09, 13 September 2020 diff hist +230 Suss Aligners (SUSS MJB-3) link to recipes Tag: Visual edit
- 22:06, 13 September 2020 diff hist +1,114 N Maskless Aligner (Heidelberg MLA150) initial page with placeholders
- 21:56, 13 September 2020 diff hist +42 Tool List →Other Patterning Systems: Link to Maskless Aligner (Heidelberg MLA150) Tag: Visual edit
- 21:54, 13 September 2020 diff hist +51 Dan Read →Tools: Added Raith Velion Tag: Visual edit
- 21:40, 13 September 2020 diff hist +86 Template:Tool added Dan Read contact info
- 21:36, 13 September 2020 diff hist +12 Template:Tool →Arguments with Specific Values: added Dan Read
- 21:34, 13 September 2020 diff hist +126 Template:StaffInfo link to Tool template page for editing staff info
- 21:33, 13 September 2020 diff hist +187 Template:Staff link to Tool Tempalte in documentation current
- 21:25, 13 September 2020 diff hist +169 Lithography Recipes linked to tools in header titles Tag: Visual edit
- 21:15, 13 September 2020 diff hist +137 Focused Ion-Beam Lithography (Raith Velion) linked to Recipes page Tag: Visual edit
- 21:14, 13 September 2020 diff hist +80 Lithography Recipes added Raith Velion section, added model to EBL section title Tag: Visual edit
- 21:12, 13 September 2020 diff hist +1,794 N Focused Ion-Beam Lithography (Raith Velion) initial page, copy/pasted the JEOL EBL page
- 21:08, 13 September 2020 diff hist -35 m E-Beam Lithography System (JEOL JBX-6300FS) deleted erroneous fiels in {tool} template
- 21:06, 13 September 2020 diff hist +49 Tool List →Other Patterning Systems: Added Raith Velion link Tag: Visual edit
- 21:05, 13 September 2020 diff hist +81 Tool List →Lithography: added FEI Sirion Nabity Tag: Visual edit
- 15:39, 13 September 2020 diff hist +1,147 COVID-19 User Policies Initial links for files - files not uploaded yet Tag: Visual edit
- 14:43, 13 September 2020 diff hist +192 N COVID-19 User Policies Initial page Tag: Visual edit
- 10:42, 8 September 2020 diff hist +1 m PECVD 1 (PlasmaTherm 790) →Recipes & Process Data Tag: Visual edit
- 10:41, 8 September 2020 diff hist -7 m PECVD 1 (PlasmaTherm 790) →Recipes & Process Information: change to Process Data Tag: Visual edit
- 10:41, 8 September 2020 diff hist +206 PECVD 1 (PlasmaTherm 790) link to recipes and data Tag: Visual edit
- 10:34, 8 September 2020 diff hist -129 m Template:Announcements removed labor day
- 14:27, 1 September 2020 diff hist 0 File:UCSB Service Agreement.pdf John d uploaded a new version of File:UCSB Service Agreement.pdf
- 14:21, 1 September 2020 diff hist 0 File:Facility-Use-MOU---Intercampus-UC-User.pdf John d uploaded a new version of File:Facility-Use-MOU---Intercampus-UC-User.pdf
- 21:30, 31 August 2020 diff hist +129 Template:Announcements labor day closure
- 11:47, 26 August 2020 diff hist +453 N S-Cubed Flexi - Operating Procedure initial secitons, draft only Tag: Visual edit
- 11:42, 26 August 2020 diff hist +238 Automated Coat/Develop System (S-Cubed Flexi) added link to SOP Tag: Visual edit
- 13:33, 24 August 2020 diff hist -551 m Template:Announcements deleted lab shutdown
- 12:17, 20 August 2020 diff hist +325 ICP Etch 1 (Panasonic E646V) link to recipes page Tag: Visual edit
- 14:23, 19 August 2020 diff hist +348 Services added Agreement "Attachment A" Tag: Visual edit
- 14:22, 19 August 2020 diff hist +87 N File:Attachment A - UCSB Master Facilities Use Agreement Labs.pdf Facilities/Service Agreement - attachment listing UCSB facilities covered
- 06:51, 19 August 2020 diff hist +386 Template:Announcements addd lab shutdown, remove ASML
- 15:06, 18 August 2020 diff hist +6 m CAIBE (Oxford Ion Mill) →Recipes: bolded recipe page li nk Tag: Visual edit