Vacuum Deposition Recipes
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Vacuum Deposition Recipes
E-Beam Evaporation
Sputtering
Thermal Evaporation
Plasma Enhanced Chemical
Vapor Deposition (PECVD)
Atomic Layer Deposition
Ion Beam Deposition (IBD)
Molecular Vapor Deposition
Material
E-Beam 1 (Sharon)
E-Beam 2 (Custom)
E-Beam 3 (Temescal)
E-Beam 4 (CHA)
Sputter 1 (Custom)
Sputter 2
(SFI Endeavor)
Sputter 3
(ATC 2000-F)
Sputter 4
(ATC 2200-V)
Sputter 5 (Lesker AXXIS)
Thermal Evap 1
Thermal Evap 2 (Solder)
PECVD 1
(PlasmaTherm 790)
PECVD 2
(Advanced Vacuum)
Unaxis VLR ICP-PECVD
Atomic Layer Deposition (Tool)
Ion Beam
Deposition (Tool)
Molecular Vapor Deposition (Tool)
Ag
Al
Al
2
O
3
AlN
Au
B
Co
Cr
Cu
Fe
Ge
Hf
HfO
2
In
Ir
ITO
Mo
Nb
Ni
Pd
Pt
Ru
Si
SiN
R1
R1
R1
SiO
2
R1
R1
SiO
x
N
y
Sn
SrF
2
Ta
Ta
2
O
5
Ti
TiN
TiO
2
V
W
Zn
ZnO
2
Zr
ZrO
2
Material
E-Beam 1 (Sharon)
E-Beam 2 (Custom)
E-Beam 3 (Temescal)
E-Beam 4 (CHA)
Sputter 1 (Custom)
Sputter 2
(SFI Endeavor)
Sputter 3
(ATC 2000-F)
Sputter 4
(ATC 2200-V)
Sputter 5 (Lesker AXXIS)
Thermal Evap 1
Thermal Evap 2 (Solder)
PECVD 1
(PlasmaTherm 790)
PECVD 2
(Advanced Vacuum)
Unaxis VLR ICP-PECVD
Atomic Layer Deposition (Tool)
Ion Beam
Deposition (Tool)
Molecular Vapor Deposition (Tool)
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