Sputtering Recipes

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Back to Vacuum Deposition Recipes.

Sputter 1 (Custom)

Sputter 2 (SFI Endeavor)

Sputter 3 (AJA ATC 2000-F)

Sputter 4 (AJA ATC 2200-V)

Sputter 5 (Lesker AXXIS)

Ion Beam Deposition (Veeco NEXUS)

IBD Calibrations Spreadsheet - Records of historical film depositions (rates, indices), Uniformity etc.

SiO₂ deposition (IBD)

SiO₂ dep

SiN deposition (IBD)

Ta₂O₅ deposition (IBD)

Ta₂O₅ dep

TiO₂ deposition (IBD)

TiO₂ dep

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Sputtering_Recipes&oldid=2869"

Recipes