Resistivity Mapper (CDE RESMAP)

From UCSB Nanofab Wiki
Revision as of 19:08, 1 November 2021 by John d (talk | contribs) (added CSV export)
Jump to navigation Jump to search
Resistivity Mapper (CDE RESMAP)
CDEResmap.jpg
Tool Type Inspection, Test and Characterization
Location Bay ?
Supervisor Bill Millerski
Supervisor Phone (805) 893-2655
Supervisor E-Mail wmillerski@ucsb.edu
Description CDE Resmap 4 Point Resistivity Mapper
Manufacturer Creative Design Engineering


About

The CDE Resmap 4 point resistivity mapper is used for measuring resistivity across the wafer for substrates and thin films deposited in the facility. The system can do automated resistivity mapping for pieces to 8 inch wafers.

The resistivity range is 2 mOhm/Square to 5 MOhm/square. Contour plots, 3D plots, histograms, data exporting are supported from the Windows XP based control system.

Instructions