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Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
- 17:19, 16 August 2012 Zwarburg talk contribs deleted page SiN Deposition 100C Low stress.pdf (content was: "*SiN Deposition 100C-120W Low stress *media:SiN Deposition 250C-120W Low stress.pdf|SiN Deposition 2500C-120W …" (and the only contributor was "Biljana"))
- 17:19, 16 August 2012 Zwarburg talk contribs deleted page SiN low stress2% SiH4 No Ar.pdf (content was: "*SiN deposition 2% SiH4 No Ar 100C-120W low stress *media:SiN deposition 250C-120W low stress.pdf|SiN depositi…" (and the only contributor was "Biljana"))
- 17:19, 16 August 2012 Zwarburg talk contribs deleted page Standard Recipes (content was: "{| style="color:black; background-color:#ffffcc;" cellpadding="4" class="wikitable" |Recipe |Standard Recipes |Comments |- |1 |media: InP 200C Standard.pdf|In…" (and the only contributor was "Biljana"))
- 17:18, 16 August 2012 Zwarburg talk contribs deleted page SiN process 2% SiH4 No Ar.pdf (content was: "*SiN deposition 2%SiH4 No Ar 250C-120W-low stress * media: SiN deposition 2%SiH4 No Ar 100C-120…" (and the only contributor was "Biljana"))
- 17:18, 16 August 2012 Zwarburg talk contribs deleted page SiN Process Low stress.pdf (content was: "* SiN deposition 100C-120W-low stress * media:SiN deposition 250C-120W-low stress.pdf|SiN deposition 250C-120W…" (and the only contributor was "Biljana"))
- 17:18, 16 August 2012 Zwarburg talk contribs deleted page Recipe 183.pdf (content was: "* recipe 183" (and the only contributor was "Biljana"))
- 17:18, 16 August 2012 Zwarburg talk contribs deleted page Recipe 144.pdf (content was: "* recipe 144" (and the only contributor was "Biljana"))
- 17:18, 16 August 2012 Zwarburg talk contribs deleted page Recipe 121.pdf (content was: "* recipe 121" (and the only contributor was "Biljana"))
- 17:18, 16 August 2012 Zwarburg talk contribs deleted page Recipe 117.pdf (content was: "* recipe 117" (and the only contributor was "Biljana"))
- 17:18, 16 August 2012 Zwarburg talk contribs deleted page ICP II Standard recipes.pdf (content was: "{|style="color:black; background-color:#ffffcc;" cellpadding="10" class="wikitable" |Recipe No |Standard Recipes |Comments |- |100 | media:recipe 100.pdf|O2cle…" (and the only contributor was "Biljana"))
- 17:17, 16 August 2012 Zwarburg talk contribs deleted page Lithography materials.pdf (content was: "{| border="1" class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" |- bgcolor="#D0E7FF" ! width="1675" height="45" co…" (and the only contributor was "Biljana"))
- 16:21, 16 August 2012 Biljana talk contribs uploaded File:Advanced PECVD2 Nitride 2 deposition.pdf
- 00:39, 15 August 2012 Biljana talk contribs uploaded File:SiN deposition 2%SiH4 100C-5W-high stress.pdf
- 00:39, 15 August 2012 Biljana talk contribs uploaded File:SiN deposition 2%SiH4 100C-50W-medium stress.pdf
- 00:35, 15 August 2012 Biljana talk contribs uploaded File:SiN deposition 2%SiH4 100C-120W-low stress.pdf
- 22:43, 14 August 2012 Biljana talk contribs uploaded File:Standard SiO2 deposition-PECVD 1.pdf
- 22:42, 14 August 2012 Biljana talk contribs uploaded File:Standard SiN deposition-PECVD 1.pdf
- 22:39, 14 August 2012 Biljana talk contribs uploaded File:Standard SiO2 deposition PECVD 1.pdf
- 22:39, 14 August 2012 Biljana talk contribs uploaded File:Standard SiN deposition PECVD 1.pdf
- 21:21, 14 August 2012 Biljana talk contribs uploaded File:Standard recipe SiO2 deposition PECVD 1.pdf
- 21:21, 14 August 2012 Biljana talk contribs uploaded File:Standard recipe SiN deposition PECVD 1.pdf
- 21:13, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 SiN Data-particles, thickness, index.pdf
- 21:13, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 SiO2 Data-particles, thickness, index.pdf
- 21:01, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 SiN deposition.pdf
- 21:01, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 LS SiN deposition.pdf
- 21:00, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 SiO2 deposition.pdf
- 21:00, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 Standard plasma clean.pdf
- 18:25, 14 August 2012 Biljana talk contribs uploaded File:Standard recipe for SiO2 deposition in PECVD 1.pdf
- 18:25, 14 August 2012 Biljana talk contribs uploaded File:Standard recipe for SiN deposition in PECVD 1.pdf
- 18:20, 14 August 2012 Biljana talk contribs uploaded File:PECVD 1 Standard recipes.pdf
- 17:54, 14 August 2012 Biljana talk contribs uploaded File:PECVD 1 SiN data-particles, thickness, index.pdf
- 17:52, 14 August 2012 Biljana talk contribs uploaded File:PECVD 1 SiO2 data-particles, thickness, index.pdf
- 00:33, 14 August 2012 Biljana talk contribs uploaded File:PM1O2 Etch 60min 200C.pdf
- 00:28, 14 August 2012 Biljana talk contribs uploaded File:O2etch 15min 30C.pdf
- 00:26, 14 August 2012 Biljana talk contribs uploaded File:Recipe6.pdf
- 00:25, 14 August 2012 Biljana talk contribs uploaded File:Recipe 6.pdf
- 00:22, 14 August 2012 Biljana talk contribs uploaded File:PM1 O2 Etch 2min 30C.pdf
- 00:18, 14 August 2012 Biljana talk contribs uploaded a new version of File:PM1 O2 Etch 60min 200C.pdf
- 00:18, 14 August 2012 Biljana talk contribs uploaded File:PM1 O2 Etch 60min 200C.pdf
- 00:17, 14 August 2012 Biljana talk contribs uploaded File:PM1 O2 Etch 30min 200C.pdf
- 00:15, 14 August 2012 Biljana talk contribs uploaded File:PM1 O2 Etch 15min 30C.pdf
- 00:13, 14 August 2012 Biljana talk contribs uploaded File:PM1 O2 Etch 15min 200C.pdf
- 00:10, 14 August 2012 Biljana talk contribs uploaded File:PM1 InP Etch 200C H2 Ar Std.pdf
- 00:06, 14 August 2012 Biljana talk contribs uploaded File:InP 200C Standard.pdf
- 23:55, 13 August 2012 Biljana talk contribs uploaded File:ICP II SiN and SiO2 etch rates.pdf
- 23:49, 13 August 2012 Biljana talk contribs uploaded File:Vik's recipe.pdf
- 23:44, 13 August 2012 Biljana talk contribs uploaded File:Bill's recipe.pdf
- 18:20, 13 August 2012 Biljana talk contribs uploaded File:SiO2 and SIN calibrated etches.pdf
- 18:11, 13 August 2012 Biljana talk contribs uploaded File:SurfScan 6200-Operating Manual.pdf
- 18:09, 13 August 2012 Biljana talk contribs uploaded File:SurfScan 6200-Operating MAnual.pdf