User contributions for Thibeault
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17 March 2014
- 20:3020:30, 17 March 2014 diff hist −1 Sputtering Recipes →Sputter 3 Process Table
- 20:2920:29, 17 March 2014 diff hist +27 Sputtering Recipes →Sputter 3 Process Table
- 20:2820:28, 17 March 2014 diff hist +4 Sputtering Recipes No edit summary
- 18:5718:57, 17 March 2014 diff hist +1,000 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
12 March 2014
- 18:4418:44, 12 March 2014 diff hist −241 DUV Flood Expose →Spectra Images
- 18:4418:44, 12 March 2014 diff hist +242 Suss Aligners (SUSS MJB-3) →Detailed Specifications
11 March 2014
- 21:1221:12, 11 March 2014 diff hist 0 ICP-PECVD (Unaxis VLR) →Detailed Specifications
- 20:5120:51, 11 March 2014 diff hist −58 E-Beam Evaporation Recipes →Materials Table (E-Beam #3)
- 20:4620:46, 11 March 2014 diff hist 0 Stepper 3 (ASML DUV) No edit summary
- 20:4220:42, 11 March 2014 diff hist 0 Stepper 2 (AutoStep 200) →Detailed Specifications
- 20:4120:41, 11 March 2014 diff hist +1 Stepper 2 (AutoStep 200) →About
30 January 2014
- 17:4517:45, 30 January 2014 diff hist +57 Vapor HF Etch (uETCH) No edit summary
- 17:4317:43, 30 January 2014 diff hist +1,547 N HF Vapor Etch Created page with "{{tool|{{PAGENAME}} |picture=XeF2.jpg |type = Dry Etch |super= Don Freeborn |phone=(805)839-3918x216 |location=Bay 2 |email=freeborn@ece.ucsb.edu |description = XeF<sub>2</sub..."
28 January 2014
- 18:3418:34, 28 January 2014 diff hist +129 Lithography Recipes →Nanoimprinting
- 18:3318:33, 28 January 2014 diff hist 0 N File:Nanoinprint-Lithopgraphy-UV-Low-Pressure-Temperature-Ormostamp-PDMS-RevA.docx No edit summary current
- 17:5917:59, 28 January 2014 diff hist +68 Lithography Recipes →Chemical Datasheets
- 17:5817:58, 28 January 2014 diff hist 0 N File:OrmoPrime-NIL-Adhesion-RevA.pdf No edit summary current
- 17:5717:57, 28 January 2014 diff hist +49 Lithography Recipes →Chemical Datasheets
- 17:5617:56, 28 January 2014 diff hist 0 N File:OrmoStamp-NIL-Lithography-UV-Soft-RevA.pdf No edit summary current
- 17:1317:13, 28 January 2014 diff hist +24 Lithography Recipes →Chemical Datasheets
- 17:1217:12, 28 January 2014 diff hist 0 N File:Mr-UVCur21.pdf No edit summary current
- 17:1117:11, 28 January 2014 diff hist +36 Lithography Recipes →Chemical Datasheets
27 January 2014
- 18:1018:10, 27 January 2014 diff hist +7 Lithography Recipes →Low-K Dielectric
- 18:0118:01, 27 January 2014 diff hist +63 Lithography Recipes →Low-K Dielectric
- 17:5917:59, 27 January 2014 diff hist 0 N File:Lithography-BCB-photo-lowk-dielectric-spinon-4024-40-revA.docx No edit summary current
24 October 2013
- 23:4223:42, 24 October 2013 diff hist +238 ICP Etching Recipes →ICP Etch 2 (Panasonic E640)
- 23:4223:42, 24 October 2013 diff hist −238 ICP Etching Recipes →Sapphire Etch (Panasonic 1)
- 23:4223:42, 24 October 2013 diff hist +238 ICP Etching Recipes →ICP Etch 2 (Panasonic E640)
- 23:3823:38, 24 October 2013 diff hist 0 N File:Panasonic 1-SiC-ICP-RIE-Etch-Plasma-SF6-RevA.pdf No edit summary current
- 23:3823:38, 24 October 2013 diff hist +130 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 23:3623:36, 24 October 2013 diff hist +49 Dry Etching Recipes No edit summary
- 22:2522:25, 24 October 2013 diff hist 0 N File:Panasonic1-sapphire-etch-RIE-Plasma-BCl3-ICP-RevA.pdf No edit summary current
- 22:2522:25, 24 October 2013 diff hist +168 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 22:2322:23, 24 October 2013 diff hist +54 Dry Etching Recipes No edit summary
- 20:4020:40, 24 October 2013 diff hist 0 N File:Panasonic1-GaAs-PhotonicCrystal-RIE-Plasma-Nanoscale-Etch-RevA.pdf No edit summary current
- 20:4020:40, 24 October 2013 diff hist +151 ICP Etching Recipes →GaAs-AlGaAs Etch (Panasonic 1)
- 18:3418:34, 24 October 2013 diff hist 0 N File:Panasonic1-GaAs-Via-Etch-Plasma-RIE-Fast-DRIE-RevA.pdf No edit summary current
- 18:3418:34, 24 October 2013 diff hist +149 ICP Etching Recipes →AlGaAs Etch (Panasonic 1)
- 17:1417:14, 24 October 2013 diff hist 0 N File:Panasonic1-GaN-AlGaN-Selective-Etch-Plasma-RIE-ICP-RevA.pdf No edit summary current
- 17:1317:13, 24 October 2013 diff hist +140 ICP Etching Recipes →GaN Etch (Panasonic 1)
- 00:0900:09, 24 October 2013 diff hist +10 RIE Etching Recipes →RIE 5 (PlasmaTherm)
- 00:0800:08, 24 October 2013 diff hist +46 Dry Etching Recipes No edit summary
- 00:0500:05, 24 October 2013 diff hist 0 N File:RIE2-ITO-Etch-MHA-Plasma-RevA.pdf No edit summary current
- 00:0500:05, 24 October 2013 diff hist +121 RIE Etching Recipes →RIE 2 (MRC)
- 00:0400:04, 24 October 2013 diff hist +49 Dry Etching Recipes No edit summary
23 October 2013
- 23:4023:40, 23 October 2013 diff hist 0 N File:RIE2-InGaAs-InP-InAlAs-Etch-Plasma-RIE-RevA.pdf No edit summary current
- 23:4023:40, 23 October 2013 diff hist +169 RIE Etching Recipes →RIE 2 (MRC)
- 23:4023:40, 23 October 2013 diff hist −168 RIE Etching Recipes →RIE 3 (MRC)
- 23:3923:39, 23 October 2013 diff hist +169 RIE Etching Recipes No edit summary
- 23:3723:37, 23 October 2013 diff hist +82 Dry Etching Recipes No edit summary