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- 17:03, 4 September 2018 diff hist +371 Editing Tutorials →Making a New Page: added screenshot to click in Search results Tag: Visual edit
- 17:00, 4 September 2018 diff hist +74 N File:Editing Tutorial - Hyperlink panel nonexisting page 02 - CLICK arrow.png.png current
- 16:56, 4 September 2018 diff hist +51 Editing Tutorials →Making a New Page: updated intro text to clarify whole procedure Tag: Visual edit
- 16:55, 4 September 2018 diff hist +306 Editing Tutorials →Making a New Page: added screenshot showing to click "Create" tab Tag: Visual edit
- 16:53, 4 September 2018 diff hist +71 N File:Click on "Create" Tab to enter VisualEditing Mode.png current
- 16:48, 4 September 2018 diff hist +346 NanoFab Process Group added Equip Cal section, and 3 Litho tools I know we have procedures for. Tag: Visual edit
- 16:46, 4 September 2018 diff hist -4 NanoFab Process Group →Dicing Procedures: changed link from "new/fresh tape" to just "on tape" - will include the variation on the target page. Tag: Visual edit
- 16:42, 4 September 2018 diff hist +1,652 N NanoFab Process Group created page, Links to various dicing procedures. Added Process Control links as well. Tag: Visual edit
- 01:02, 1 September 2018 diff hist +213 Deep UV Optical Microscope (Olympus) added calibration image Tag: Visual edit
- 01:00, 1 September 2018 diff hist +48 N File:Olympus MX61A-DUV res test 100x DUV v1.png current
- 00:38, 1 September 2018 diff hist +41 m Template:Announcements duv link
- 00:36, 1 September 2018 diff hist -1 m Template:Announcements spacing
- 00:36, 1 September 2018 diff hist -26 Template:Announcements ibd update
- 23:05, 31 August 2018 diff hist +85 Microscopes link to DUV scope Tag: Visual edit
- 23:04, 31 August 2018 diff hist +35 m Deep UV Optical Microscope (Olympus) added description field
- 23:03, 31 August 2018 diff hist +18 m Deep UV Optical Microscope (Olympus) added model field Tag: Visual edit: Switched
- 22:31, 31 August 2018 diff hist +19 m Laser Scanning Confocal M-scope (Olympus LEXT) caption update Tag: Visual edit
- 22:30, 31 August 2018 diff hist +405 Microscopes added some model numbers and links to the relevant pages/manuals Tag: Visual edit
- 08:53, 31 August 2018 diff hist +49 Editing Tutorials separated into basic editign and administration Tag: Visual edit
- 08:50, 31 August 2018 diff hist +1,157 Editing Tutorials Making a new page section, with screenshots Tag: Visual edit
- 08:45, 31 August 2018 diff hist +43 N File:RedLink Screenshot.png current
- 08:42, 31 August 2018 diff hist +72 N File:Editing Tutorial - Hyperlink panel nonexisting page 01.png current
- 08:30, 31 August 2018 diff hist +47 N File:Editing Toolbar Hyperlink Button 01.png current
- 23:49, 30 August 2018 diff hist +146 Template:Announcements DUV scope update
- 07:45, 30 August 2018 diff hist +40 m Suss MA-6 Backside Alignment QuickStart explain "BSA" Tag: Visual edit
- 15:19, 29 August 2018 diff hist +449 Template:Announcements IBD down; Stepper 6300 maint.
- 17:19, 28 August 2018 diff hist -5 m Atomic Layer Deposition Recipes →ZnO Deposition (ALD Chamber 1): itlaics Tag: Visual edit
- 17:13, 28 August 2018 diff hist -149 m Atomic Layer Deposition Recipes →ZrO deposition (ALD CHAMBER 3): removed unneeded comment about HfO (which is already in the HfO section) Tag: Visual edit
- 17:11, 28 August 2018 diff hist +235 Atomic Layer Deposition Recipes →ZnO:Al deposition (ALD CHAMBER 1): described double-loop recipes Tag: Visual edit
- 17:09, 28 August 2018 diff hist +167 Atomic Layer Deposition Recipes →Oxford FlexAL Chamber #1: Metals: added ZnO recipe. Tag: Visual edit
- 15:25, 28 August 2018 diff hist +296 Oxygen Plasma System Recipes →Ashers (Technics PEII): added SiN etch and chamber clean Tag: Visual edit
- 15:20, 28 August 2018 diff hist -21 m Dry Etching Recipes replace bottom link from SiDeepEtch → SLR Fluorine ICP Tag: Visual edit
- 15:00, 28 August 2018 diff hist -65 Dry Etching Recipes renamed/linked SiDeepRIE → SLR Fluorine ICP Tag: Visual edit
- 14:57, 28 August 2018 diff hist +24 Tool List →ICP-RIE: link to SLR Fluorine Etcher Tag: Visual edit
- 14:56, 28 August 2018 diff hist +7 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) bolded the top note Tag: Visual edit: Switched
- 14:55, 28 August 2018 diff hist +51 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: linked to proper/new tool page Tag: Visual edit
- 14:53, 28 August 2018 diff hist +180 ICP Etching Recipes added SLR Fluorine, moved SiDeepRIE to bottom
- 14:53, 28 August 2018 diff hist +166 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) note indicate info is from pre-conversion Tag: Visual edit
- 14:51, 28 August 2018 diff hist 0 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) John d moved page Si Deep RIE (PlasmaTherm/Bosch Etch) to Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP): tool converted
- 14:38, 28 August 2018 diff hist +440 ICP Etching Recipes →Si Deep RIE (PlasmaTherm/Bosch Etch): note that the tool does not exist in this configuration any more Tag: Visual edit: Switched
- 14:25, 28 August 2018 diff hist +26 m Stepper 3 (ASML DUV) moved Test Reticles into Process info, othe rminor changes Tag: Visual edit
- 14:14, 24 August 2018 diff hist +6 m Photoluminescence PL Setup (Custom) header formats Tag: Visual edit
- 14:13, 24 August 2018 diff hist +355 Photoluminescence PL Setup (Custom) copied image/info from holography page
- 10:32, 24 August 2018 diff hist +146 N Photoluminescence PL Setup (Custom) iniital page, in progress Tag: Visual edit
- 10:12, 24 August 2018 diff hist +42 Tool List →Inspection, Test and Characterization: PL setup page link Tag: Visual edit
- 23:11, 22 August 2018 diff hist +4 m Talk:Tool List current
- 23:10, 22 August 2018 diff hist +325 N Talk:Tool List mention BrianT, switch Si_DeepRIE --> SLR Fluorine
- 16:03, 22 August 2018 diff hist 0 Tool List →Thermal Processing: corrected Logitech bonder model # & link Tag: Visual edit
- 16:02, 22 August 2018 diff hist +42 N Wafer Bonder (Logitech WSB7) John d moved page Wafer Bonder (Logitech WSB7) to Wafer Bonder (Logitech WBS7): Correct erroneous model number current
- 16:02, 22 August 2018 diff hist 0 m Wafer Bonder (Logitech WBS7) John d moved page Wafer Bonder (Logitech WSB7) to Wafer Bonder (Logitech WBS7): Correct erroneous model number