User contributions for Biljana

23 March 2020

• 15:1415:14, 23 March 2020 diff hist +9 N File:GCA 6300 Reboot computers.docx No edit summary current
• 15:1015:10, 23 March 2020 diff hist +32 Stepper 1 (GCA 6300) →Operating Procedures
• 03:0103:01, 23 March 2020 diff hist +42 Stepper 2 (AutoStep 200) →Operating Procedures
• 03:0103:01, 23 March 2020 diff hist +47 Autostep 200 Troubleshooting and Recovery No edit summary
• 03:0003:00, 23 March 2020 diff hist −2 Stepper 2 (AutoStep 200) →Operating Procedures
• 02:5902:59, 23 March 2020 diff hist −1 Stepper 2 (AutoStep 200) →Operating Procedures
• 02:5802:58, 23 March 2020 diff hist +4 Stepper 2 (AutoStep 200) →Operating Procedures
• 02:5702:57, 23 March 2020 diff hist −8 Stepper 2 (AutoStep 200) Operating Procedures No edit summary
• 02:5602:56, 23 March 2020 diff hist +39 Stepper 2 (AutoStep 200) →Operating Procedures
• 02:5102:51, 23 March 2020 diff hist +9 Stepper 1 (GCA 6300) →Operating Procedures
• 02:5002:50, 23 March 2020 diff hist −6 Stepper 1 (GCA 6300) →Operating Procedures
• 02:5002:50, 23 March 2020 diff hist +6 Stepper 1 (GCA 6300) →Operating Procedures
• 02:5002:50, 23 March 2020 diff hist 0 Stepper 1 (GCA 6300) →Operating Procedures
• 02:4902:49, 23 March 2020 diff hist +13 Stepper 1 (GCA 6300) →Operating Procedures
• 02:4802:48, 23 March 2020 diff hist −11 Stepper 1 (GCA 6300) →Operating Procedures
• 02:4002:40, 23 March 2020 diff hist +1 Troubleshooting and Recovery No edit summary Tag: Visual edit
• 02:3902:39, 23 March 2020 diff hist +427 Troubleshooting and Recovery No edit summary Tag: Visual edit
• 02:1202:12, 23 March 2020 diff hist +2 Troubleshooting and Recovery No edit summary Tag: Visual edit
• 02:1102:11, 23 March 2020 diff hist +4,310 Troubleshooting and Recovery No edit summary
• 01:5701:57, 23 March 2020 diff hist −2 Stepper 1 (GCA 6300) →Operating Procedures

20 March 2020

• 17:3617:36, 20 March 2020 diff hist +65 Programming a Job →JOB Programming - FULL current

19 March 2020

• 16:4216:42, 19 March 2020 diff hist −8 Stepper 1 (GCA 6300) - Standard Operating Procedure No edit summary current
• 16:3016:30, 19 March 2020 diff hist +121 Stepper 1 (GCA 6300) - Standard Operating Procedure →Resist spin coating and cleaning the back-side of wafer
• 16:2016:20, 19 March 2020 diff hist −102 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a FOCUS and\or EXPOSURE matrix
• 16:1916:19, 19 March 2020 diff hist +73 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a FOCUS and\or EXPOSURE matrix
• 16:1416:14, 19 March 2020 diff hist −1 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a FOCUS and\or EXPOSURE matrix
• 05:3305:33, 19 March 2020 diff hist +2 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a JOB-Normal Operation
• 05:2205:22, 19 March 2020 diff hist −1 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a JOB-Normal Operation
• 05:2005:20, 19 March 2020 diff hist −9 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a JOB-Normal Operation
• 05:1605:16, 19 March 2020 diff hist +8 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a JOB-Normal Operation
• 05:1405:14, 19 March 2020 diff hist +30 Stepper 1 (GCA 6300) No edit summary

10 March 2020

• 18:0818:08, 10 March 2020 diff hist 0 PECVD Recipes →ICP-PECVD (Unaxis VLR)

27 February 2020

• 22:3622:36, 27 February 2020 diff hist −16 PECVD Recipes →SiN deposition (Unaxis VLR)
• 22:3522:35, 27 February 2020 diff hist +270 PECVD Recipes →SiN deposition (Unaxis VLR)
• 22:3222:32, 27 February 2020 diff hist −2 PECVD Recipes →SiN deposition (Unaxis VLR)
• 22:3222:32, 27 February 2020 diff hist −131 PECVD Recipes →SiN deposition (Unaxis VLR)
• 22:3122:31, 27 February 2020 diff hist +1 PECVD Recipes →SiN deposition (Unaxis VLR)
• 22:3022:30, 27 February 2020 diff hist +127 PECVD Recipes →SiN deposition (Unaxis VLR)
• 22:2922:29, 27 February 2020 diff hist +125 PECVD Recipes →SiN deposition (Unaxis VLR)
• 22:2722:27, 27 February 2020 diff hist +144 PECVD Recipes →ICP-PECVD (Unaxis VLR)
• 22:2722:27, 27 February 2020 diff hist −124 PECVD Recipes →SiO2 deposition (Unaxis VLR)
• 22:2622:26, 27 February 2020 diff hist 0 PECVD Recipes →SiO2 deposition (Unaxis VLR)
• 22:2622:26, 27 February 2020 diff hist +1 PECVD Recipes →SiO2 deposition (Unaxis VLR)
• 22:2622:26, 27 February 2020 diff hist +123 PECVD Recipes →SiO2 deposition (Unaxis VLR)
• 22:2422:24, 27 February 2020 diff hist −2 PECVD Recipes →SiO2 deposition (Unaxis VLR)
• 22:2322:23, 27 February 2020 diff hist +260 PECVD Recipes →SiO2 deposition (Unaxis VLR)
• 22:2322:23, 27 February 2020 diff hist −261 PECVD Recipes →SiO2 deposition (Unaxis VLR)
• 22:2222:22, 27 February 2020 diff hist +150 PECVD Recipes →SiO2 deposition (Unaxis VLR)
• 22:2122:21, 27 February 2020 diff hist +1 PECVD Recipes →SiO2 deposition (Unaxis VLR)
• 22:2122:21, 27 February 2020 diff hist +149 PECVD Recipes →SiO2 deposition (Unaxis VLR)