User contributions for Sawyer l

16 March 2021

• 15:3115:31, 16 March 2021 diff hist 0‎ N File:MLA150 SOP Rev H (LS).pdf ‎No edit summary current

15 March 2021

• 18:2818:28, 15 March 2021 diff hist 0‎ RIE 3 (MRC) ‎ Updated SOP Tag: Visual edit
• 18:2818:28, 15 March 2021 diff hist 0‎ N File:RIE 3 SOP Rev D.pdf ‎No edit summary current

12 February 2021

• 17:3017:30, 12 February 2021 diff hist +21‎ Maskless Aligner (Heidelberg MLA150) ‎ Update SOP link Tag: Visual edit
• 17:2917:29, 12 February 2021 diff hist 0‎ N File:MLA150 SOP Rev G (LS).pdf ‎No edit summary current

30 November 2020

• 19:1919:19, 30 November 2020 diff hist −18‎ Contact Aligner (SUSS MA-6) ‎ Intensity info for CH2 updated, SOP updated Tag: Visual edit
• 19:1819:18, 30 November 2020 diff hist 0‎ N File:MA-6 SOP Rev C.pdf ‎No edit summary current

29 October 2020

• 15:1315:13, 29 October 2020 diff hist +12‎ Contact Aligner (SUSS MA-6) ‎ New SOP rev. Change Ch2 intensity info Tag: Visual edit

2 October 2020

• 16:2316:23, 2 October 2020 diff hist −3‎ Plasma Clean (YES EcoClean) ‎ updated SOP link Tag: Visual edit
• 16:2216:22, 2 October 2020 diff hist 0‎ N File:YES SOP Rev C.pdf ‎No edit summary current

23 September 2020

• 16:0116:01, 23 September 2020 diff hist +3‎ m Dicing Saw (ADT) ‎No edit summary

16 September 2020

• 18:5718:57, 16 September 2020 diff hist −68‎ Suss Aligners (SUSS MJB-3) ‎ Changed wording to reflect the downsizing to 2 aligners. Tag: Visual edit

13 September 2020

• 17:4617:46, 13 September 2020 diff hist 0‎ RIE 2 (MRC) ‎ SOP rev Tag: Visual edit
• 17:4517:45, 13 September 2020 diff hist 0‎ N File:RIE 2 SOP Rev B.pdf ‎No edit summary current

20 August 2020

• 14:3914:39, 20 August 2020 diff hist −42‎ Contact Alignment Recipes ‎ Updated MA-6 neg resist flood expose info. Tag: Visual edit

7 August 2020

• 18:5618:56, 7 August 2020 diff hist +6‎ IR Aligner (SUSS MJB-3 IR) ‎ SOP rev current Tag: Visual edit
• 18:5518:55, 7 August 2020 diff hist 0‎ N File:MJB 3 IR Camera SOP Rev B.pdf ‎No edit summary
• 18:5118:51, 7 August 2020 diff hist 0‎ File:MJB 3 IR Camera SOP.pdf ‎ Sawyer l uploaded a new version of File:MJB 3 IR Camera SOP.pdf current

1 August 2020

• 16:5516:55, 1 August 2020 diff hist 0‎ RIE 3 (MRC) ‎ updated SOP link Tag: Visual edit
• 16:5516:55, 1 August 2020 diff hist 0‎ N File:RIE 3 SOP Rev C.pdf ‎No edit summary current

16 July 2020

• 17:0217:02, 16 July 2020 diff hist −749‎ IR Aligner (SUSS MJB-3 IR) ‎ System information Tag: Visual edit
• 16:5416:54, 16 July 2020 diff hist +111‎ IR Aligner (SUSS MJB-3 IR) ‎ added additional documentation Tag: Visual edit
• 16:5316:53, 16 July 2020 diff hist 0‎ N File:MJB 3 IR Camera SOP.pdf ‎No edit summary
• 16:5216:52, 16 July 2020 diff hist +129‎ IR Aligner (SUSS MJB-3 IR) ‎ added additional documentation Tag: Visual edit
• 16:5116:51, 16 July 2020 diff hist 0‎ N File:MJB 3 IR Alignment Mode Conversion.pdf ‎No edit summary current

6 March 2020

• 00:3400:34, 6 March 2020 diff hist 0‎ RIE 3 (MRC) ‎ updated SOP link Tag: Visual edit
• 00:3300:33, 6 March 2020 diff hist 0‎ N File:RIE 3 SOP Rev B.pdf ‎No edit summary current

26 February 2020

• 19:2019:20, 26 February 2020 diff hist +1‎ E-Beam 2 (Custom) ‎No edit summary
• 19:1819:18, 26 February 2020 diff hist −153‎ Plasma Clean (YES EcoClean) ‎No edit summary
• 19:1419:14, 26 February 2020 diff hist +47‎ Plasma Clean (YES EcoClean) ‎No edit summary

25 February 2020

• 00:4500:45, 25 February 2020 diff hist 0‎ N File:IMG 5385.JPG ‎No edit summary current

7 January 2020

• 16:1116:11, 7 January 2020 diff hist +4‎ E-Beam 2 (Custom) ‎ Updated SOP link to new rev Tag: Visual edit
• 16:0116:01, 7 January 2020 diff hist 0‎ N File:EB2 SOP Rev B.pdf ‎No edit summary current

5 November 2019

• 17:1817:18, 5 November 2019 diff hist +6‎ Plasma Clean (YES EcoClean) ‎ updated SOP linked Tag: Visual edit
• 17:1717:17, 5 November 2019 diff hist 0‎ N File:YES SOP Rev B.pdf ‎No edit summary current

24 October 2019

• 18:2318:23, 24 October 2019 diff hist −203‎ IR Aligner (SUSS MJB-3 IR) ‎ →‎About: correct about and spec section Tag: Visual edit

17 October 2019

• 17:1817:18, 17 October 2019 diff hist +3‎ Plasma Clean (YES EcoClean) ‎No edit summary Tag: Visual edit
• 17:1717:17, 17 October 2019 diff hist +49‎ Plasma Clean (YES EcoClean) ‎ updated contact info Tag: Visual edit
• 17:1517:15, 17 October 2019 diff hist −13‎ Plasma Clean (YES EcoClean) ‎No edit summary
• 17:1517:15, 17 October 2019 diff hist +13‎ Plasma Clean (YES EcoClean) ‎No edit summary

9 October 2019

• 21:1621:16, 9 October 2019 diff hist +90‎ Plasma Activation (EVG 810) ‎No edit summary Tag: Visual edit
• 21:1521:15, 9 October 2019 diff hist 0‎ N File:EVG Plasma Activation Recipe Copying.pdf ‎No edit summary current
• 21:1521:15, 9 October 2019 diff hist +21‎ Plasma Activation (EVG 810) ‎ updated SOP & added recipe editing SOP Tag: Visual edit
• 21:1321:13, 9 October 2019 diff hist 0‎ N File:EVG Plasma Activation SOP Rev B.pdf ‎No edit summary current

25 September 2019

• 14:5914:59, 25 September 2019 diff hist +58‎ Plasma Clean (YES EcoClean) ‎ Added doc section and linked SOP Tag: Visual edit
• 14:5814:58, 25 September 2019 diff hist 0‎ N File:YES SOP.pdf ‎No edit summary current
• 14:5714:57, 25 September 2019 diff hist +79‎ Plasma Clean (YES EcoClean) ‎No edit summary Tag: Visual edit: Switched

24 September 2019

• 21:1121:11, 24 September 2019 diff hist +22‎ Contact Aligner (SUSS MA-6) ‎ →‎Detailed Specifications Tag: Visual edit

20 September 2019

• 18:2718:27, 20 September 2019 diff hist +120‎ E-Beam 2 (Custom) ‎ Doc section added, SOP linked Tag: Visual edit
• 18:2518:25, 20 September 2019 diff hist 0‎ N File:EB2 SOP.pdf ‎No edit summary current